摘要:
An apparatus for designing a mask that enables quick mask design. A generation unit generates data regarding a mask pattern formed on a mask from design data regarding an exposure pattern transferred onto a semiconductor substrate. A calculation unit calculates an exposure pattern transferred onto the semiconductor substrate by applying a filter having a predetermined characteristic to the data regarding a mask pattern generated by the generation unit. A correction unit corrects the data regarding a mask pattern generated by the generation unit by comparing the exposure pattern calculated by the calculation unit and the design data.
摘要:
A pattern data creation method creates mask pattern data on an exposure mask, the exposure mask having a surface divided into plural unit regions and the mask pattern data including pattern data parts each defined for one of the plural unit regions, each of the pattern data parts including pattern information of a pattern included in the unit region and header information indicative of a location of the unit region on the surface of the exposure mask. The pattern data creation method includes the steps of replacing, in a part of said plural unit regions, the pattern information in the mask pattern data part with new pattern information, and reconstructing the header for that unit region in which the pattern information is replaced.
摘要:
Provided is a computer 15 for producing corrected pattern data which includes corrected features each obtained by adding auxiliary features (serifs) to the right-angle corners of an original feature to compensate for the photo proximity effect. The computer performs the step of: (S1) inputting an original pattern data; (S2) adding triangle or rectangle serifs to right-angle corners of original features, each serif having a side which is an extension of a first side of a corresponding original feature and another side which is a portion of the side adjacent to the first side; (S3) performing a geometric OR operation on the original feature and the serifs to obtain a synthesized feature; and (S4) decomposing the synthesized feature into basic figures which can be processed in an electron beam exposure apparatus.
摘要:
A see-through image display system having an Exit-Pupil-Expander (EPE) to enlarge the eyebox of display is disclosed. The EPE uses a hologram functioning as a micro-lens-array as well as collimation lens.
摘要:
A method for producing adenine compound (1): wherein m and n are independently an integer of 2 to 5, R1 is C1-6 alkyl group, R2 and R3 are the same or different, and hydrogen atom, or C1-6 alkyl group, or R2 and R3 are combined with an adjacent nitrogen atom to form pyrrolidine, morpholine, piperidine, piperazine, etc., and R4 is C1-3 alkyl group, which comprises a step of reacting compound (2): and compound (3): in the presence of a boron-containing reducing agent.
摘要:
A method of ejecting a faulty absorbent article which includes a step of detecting a failure region of an absorbent article in which a failure location of the absorbent article exists, and a type of a failure in the failure region, by identifying a shape of the absorbent article in the course of the manufacturing line, a step of deciding the absorbent article to be ejected based on the detection result of the failure region and the type of failure in the step of detecting, and a step of disengaging, from the manufacturing line, the absorbent article decided in the step of deciding, and then ejecting the absorbent article in the course of the manufacturing line. In the step of deciding, the number of absorbent articles to be ejected in the step of ejecting is decided according to the failure region and the type of the failure.
摘要:
A method of ejecting absorbent articles which comprises: a step of providing a joint portion where a trailing end of a continuous web is joined to a starting end of a next continuous web, a step of controlling a timing of supplying the continuous web so as to locate the joint portion at a central portion of the absorbent articles in a machine direction, based on a length of the continuous web from the joint portion up to a cutting location and a dimension of the absorbent articles in the machine direction of the continuous web; and a step of disengaging only absorbent articles having the joint portion and ejecting the absorbent articles in the course of the manufacturing line.
摘要:
An endoscope includes a bending operation knob inputting a bending operation of a bending section in first perpendicular directions, a touch surface which is exposed in an outer surface of a grip casing and on which a bending operation of the bending section in second perpendicular directions is input, and a positional information calculator calculating a positional information of a touched region with time, the touched region being a region that is touched in the touch surface. The endoscope includes a positional change detector detecting a positional change of the touched region when the bending operation of the bending section in the second perpendicular directions is input, and a drive controller controlling a drive state of a drive member in accordance with the positional change of the touched region.
摘要:
A rotating electrical machine includes: a rotor comprising a rotor core and a field winding wound round the rotor core; and a stator comprising a stator core and a stator winding wound round the stator core. The stator is arranged in opposition to the rotor with a predetermined spacing therebetween. the stator core is formed by punching a split piece, which comprises teeth for insertion of the stator winding thereinto and a core back on an outer periphery thereof, from a magnetic steel sheet, and laminating a plurality of those circular configurations in an axial direction, in which a plurality of the split pieces are arranged in a circle in a circumferential direction. The stator core has magnetic steel sheets, which are different in magnetic permeability in a diametrical direction, laminated at an axial end region of and in an axial central region of the stator core.
摘要:
A method for producing adenine compound (1): wherein m and n are independently an integer of 2 to 5, R1 is C1-6 alkyl group, R2 and R3 are the same or different, and hydrogen atom, or C1-6 alkyl group, or R2 and R3 are combined with an adjacent nitrogen atom to form pyrrolidine, morpholine, piperidine, piperazine, etc., and R4 is C1-3 alkyl group, which comprises a step of reacting compound (2): and compound (3): in the presence of a boron-containing reducing agent.