公开(公告)号：US07247251B2

公开(公告)日：2007-07-24

申请号：US11050769

申请日：2005-02-07

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： H01F1/00

CPC分类号： G11B5/855 ,  H01F41/32

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。

公开(公告)号：US07225528B2

公开(公告)日：2007-06-05

申请号：US10972325

申请日：2004-10-26

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/855 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.

摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。

公开(公告)号：US20070059562A1

公开(公告)日：2007-03-15

申请号：US11600725

申请日：2006-11-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

IPC分类号： G11B5/65

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/851 ,  G11B11/10582

摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.

摘要翻译： 提供防止划分的记录元件劣化的磁记录介质。 磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

公开(公告)号：US20060292400A1

公开(公告)日：2006-12-28

申请号：US11472419

申请日：2006-06-22

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/64 ,  G11B5/65

CPC分类号： G11B5/855

摘要： A magnetic recording medium that includes a recording layer formed in a predetermined concavo-convex pattern in which recording elements are formed as convex portions, has high areal density, cannot cause crash of a magnetic head easily, and has high reliability, and a magnetic recording and reproducing apparatus including that magnetic recording medium are provided. The magnetic recording medium includes: the recording elements formed as the convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate; and a filling material with which a concave portion between the recording elements is filled. The surface roughness of a portion of a surface of the medium above the filling material is larger than that of portions of the surface above the recording elements.

摘要翻译： 包括以预定的凹凸图案形成的记录层的磁记录介质，其中记录元件形成为凸部，具有高的面密度，不容易使磁头发生碰撞，并且具有高可靠性，并且磁记录 并且提供包括该磁记录介质的再现装置。 磁记录介质包括：记录元件，形成为在衬底上以预定的凹凸图案形成的记录层的凸部; 以及填充有记录元件之间的凹部的填充材料。 在填充材料之上的介质的表面的一部分的表面粗糙度大于记录元件上方表面的部分的表面粗糙度。

公开(公告)号：US20090101624A1

公开(公告)日：2009-04-23

申请号：US12285935

申请日：2008-10-16

申请人： Takahiro Suwa ,  Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： B44C1/22

CPC分类号： G11B5/855

摘要： A method for efficiently manufacturing a magnetic recording medium by filling concave portions of a concavo-convex patterned recording layer with a filler to provide sufficient surface flatness is provided. A cladding is etched by a dry etching method in which an etch rate of the cladding is equal to or higher than an etch rate of the filler. Then, by dry etching method in which an etch rate of the filler is higher than that of the cladding, the filler is etched so that a top surface of a diaphragm over a recording element (or a top surface of the recording element in absence of the diaphragm) is exposed, and the cladding remains over the concave portion of the concavo-convex pattern of the recording layer.

摘要翻译： 提供一种通过用填充物填充凹凸图案记录层的凹部来有效地制造磁记录介质以提供足够的表面平坦度的方法。 通过干蚀刻方法蚀刻包层，其中包层的蚀刻速率等于或高于填料的蚀刻速率。 然后，通过干式蚀刻方法，其中填料的蚀刻速率高于包层的蚀刻速率，对填料进行蚀刻，使得隔膜的上表面在记录元件上（或记录元件的顶表面上， 隔膜）暴露，并且包层保留在记录层的凹凸图案的凹部上。

公开(公告)号：US07438982B2

公开(公告)日：2008-10-21

申请号：US11065142

申请日：2005-02-24

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/66 ,  G11B5/72

CPC分类号： G11B5/855 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24488 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.

摘要翻译： 磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。 在磁记录层或非磁性层上形成由非磁性材料制成的凸形。 每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状 。

公开(公告)号：US20070231473A1

公开(公告)日：2007-10-04

申请号：US11785532

申请日：2007-04-18

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

IPC分类号： B05D5/12

CPC分类号： G11B5/855 ,  G11B5/8408

摘要： A magnetic recording medium and a method for manufacturing the same are provided, which provide high surface recording density and high recording/reading performance. The magnetic recording medium is manufactured by forming an intermediate protective layer between a continuous recording layer and a mask layer, dividing the continuous recording layer to form divided recording elements and removing the mask layer while leaving the intermediate protective layer on the top of the divided recording elements. Further, gaps between the divided recording elements are filled with a non-magnetic material while leaving the intermediate protective layer on the top of the divided recording elements.

摘要翻译： 提供一种提供高表面记录密度和高记录/读取性能的磁记录介质及其制造方法。 通过在连续记录层和掩模层之间形成中间保护层来制造磁记录介质，分割连续记录层以形成分割的记录元件，并且除去掩模层，同时将中间保护层留在分割记录的顶部 元素。 此外，分割的记录元件之间的间隙被非磁性材料填充，同时将中间保护层留在分割的记录元件的顶部。

公开(公告)号：US20070195459A1

公开(公告)日：2007-08-23

申请号：US11708595

申请日：2007-02-21

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/33 ,  G11B5/66 ,  G11B5/82

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/82

摘要： A method for manufacturing magnetic recording media is provided, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. The method includes the steps of: depositing a first filling material over a workpiece to cover recording elements formed as convex portions of the concavo-convex pattern, and to fill at least part of a concave portion; depositing a detection material over the first filling material; depositing a second filling material over the detection material; and irradiating a surface of the workpiece with a process gas to flatten the surface. In the flattening step, a component of the detection material removed from and flying off the workpiece is detected to stop the irradiation with the process gas based on a result of detecting the component of the detection material.

摘要翻译： 提供一种制造磁记录介质的方法，通过该方法可以制造具有形成为凹凸图案的记录层，足够平坦的表面和良好的记录/再现特性的磁记录介质。 该方法包括以下步骤：在工件上沉积第一填充材料以覆盖形成为凹凸图案的凸部的记录元件，并填充凹部的至少一部分; 在第一填充材料上沉积检测材料; 在所述检测材料上沉积第二填充材料; 并用工艺气体照射工件的表面以使表面变平。 在平坦化步骤中，基于检测到检测材料的成分的结果，检测出从工件移除并从工件飞离的检测材料的成分，停止用处理气体的照射。

公开(公告)号：US07247343B2

公开(公告)日：2007-07-24

申请号：US10924991

申请日：2004-08-25

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following Eq I: 0.1≦V/V0−0.003×(L·d/t)+1.2 Eq I where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.

摘要翻译： 一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。 磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。 根据该方法，通过调整溅射条件，使非磁性材料沉积在待加工构件10中，并满足以下等式I：<？in-line-formula description =“In- 线公式“end =”lead“？> 0.1 <= V / V <0> -0.003x（Ld / t）+1.2 Eq I <？in-line-formula description =”In-line Formulas “end =”tail“？>其中V表示作为每单位时间的膜厚度的沉积速率，V 表示在偏置功率为零的情况下的沉积速率，t表示 沉积的非磁性材料的膜厚度L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

公开(公告)号：US20070062450A1

公开(公告)日：2007-03-22

申请号：US11600728

申请日：2006-11-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/851 ,  G11B11/10582

摘要： A production apparatus, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements. The magnetic recording medium production apparatus includes: recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product of a magnetic recording medium comprising a continuous recording layer, partitions the continuous recording layer into a plurality of partitioned recording elements; non-magnetic body filling device for filling the grooves between the partitioned recording elements with a non-magnetic body; protective layer formation device for forming a protective layer on the partitioned recording elements and the non-magnetic body; and vacuum retention device which houses the recording layer processing device, the non-magnetic body filling device, and the protective layer formation device, and maintains the environment surrounding the intermediate product in a state of vacuum.

摘要翻译： 一种制造装置，其能够有效地生产分立型磁记录介质，同时可靠地防止分隔的记录元件的任何劣化。 磁记录介质制造装置包括：记录层处理装置，其在包括连续记录层的磁记录介质的中间产物中，在平面方向上以间隔形成多个凹槽，分隔连续记录层 分成多个划分的记录元件; 非磁性体填充装置，用于用非磁性体填充分隔的记录元件之间的凹槽; 用于在分隔的记录元件和非磁性体上形成保护层的保护层形成装置; 以及容纳记录层处理装置，非磁性体填充装置和保护层形成装置的真空保持装置，并且在真空状态下保持围绕中间产品的环境。