公开(公告)号：US08382421B2

公开(公告)日：2013-02-26

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： B25J18/00

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US20100040447A1

公开(公告)日：2010-02-18

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： H01L21/68 ,  B25J9/00 ,  B25J18/02

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US20050232744A1

公开(公告)日：2005-10-20

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J13/00 ,  B25J17/00 ,  B65G49/07 ,  B66C23/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不会彼此干涉。

公开(公告)号：US07645112B2

公开(公告)日：2010-01-12

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B66C23/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US07572093B2

公开(公告)日：2009-08-11

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J18/02

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不彼此干涉。

公开(公告)号：US20050286993A1

公开(公告)日：2005-12-29

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US20100121487A1

公开(公告)日：2010-05-13

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677 ,  G06F7/00

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US08571704B2

公开(公告)日：2013-10-29

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US10197948B2

公开(公告)日：2019-02-05

申请号：US15511291

申请日：2015-08-31

申请人： Hitoshi Iwatsuki ,  Koichi Sakata ,  Hiroshi Tohmatsu ,  Toyoaki Tano ,  Kenichi Mashiko ,  Mariko Takii ,  Hiroyuki Kishida ,  Yoshihiro Murasawa ,  Keinosuke Kondoh ,  Toshio Koike ,  Yutaka Takahashi

发明人： Hitoshi Iwatsuki ,  Koichi Sakata ,  Hiroshi Tohmatsu ,  Toyoaki Tano ,  Kenichi Mashiko ,  Mariko Takii ,  Hiroyuki Kishida ,  Yoshihiro Murasawa ,  Keinosuke Kondoh ,  Toshio Koike ,  Yutaka Takahashi

IPC分类号： G03G15/09 ,  G03G9/113 ,  G03G15/06

摘要： A developing device, including: a developer containing toner and carrier; and developer bearer configured to have surface thereof bear the developer and endlessly move, and to develop latent image over surface of latent image bearer by supplying toner in developer to latent image in developing region facing the latent image bearer, wherein carrier contains fine particles, value X in volume resistivity R (=10X) (Ω·cm) of carrier is 11.5-16.0, developer bearer includes: magnetic field generating unit including a plurality of magnetic poles; and developing sleeve having a cylindrical shape enclosing magnetic field generating unit, and configured to bear developer over outer circumferential surface of cylindrical shape by magnetic force of the magnetic field generating unit and perform surface moving by rotating relative to developing device body, and developing device includes developing sleeve voltage applying unit configured to apply AC component-containing voltage to developing sleeve.

公开(公告)号：US09581936B2

公开(公告)日：2017-02-28

申请号：US15007545

申请日：2016-01-27

申请人： Teppei Kikuchi ,  Kentaro Mikuniya ,  Toshio Koike ,  Keinosuke Kondoh ,  Yutaka Takahashi ,  Hideki Kosugi

发明人： Teppei Kikuchi ,  Kentaro Mikuniya ,  Toshio Koike ,  Keinosuke Kondoh ,  Yutaka Takahashi ,  Hideki Kosugi

IPC分类号： G03G15/08

CPC分类号： G03G15/0865 ,  G03G15/0877 ,  G03G15/0889 ,  G03G15/0893

摘要： A developing device includes: a developer bearer configured to bear developer thereon; a developer conveyance path for conveying developer to be fed to the developer bearer; a developer conveying member configured to convey the developer in the developer conveyance path; a developer discharge port disposed in the developer conveyance path to discharge developer from the developer conveyance path by overflow; and a contact member configured to be brought into contact with the developer conveyed toward the developer discharge port in the developer conveyance path, the developer conveyance path being configured to receive externally-supplied developer therein, the contact member being configured to repeat a sequence of movements including being elastically deformed by being brought into contact with the developer conveying member being driven and thereafter being elastically restored by being brought out of contact with the developer conveying member.

摘要翻译： 显影装置包括：显影剂载体，其构造成在其上承载显影剂; 显影剂输送路径，用于输送供给到显影剂承载体的显影剂; 构造成将显影剂输送到显影剂输送路径中的显影剂输送构件; 显影剂排出口，设置在显影剂输送路径中，以通过溢出从显影剂输送路径排出显影剂; 以及接触构件，其构造成与在显影剂输送路径中朝向显影剂排出口输送的显影剂接触，所述显影剂输送路径构造成在其中接收外部供应的显影剂，所述接触构件被配置为重复一系列运动 包括通过与被驱动的显影剂传送构件接触而弹性变形，然后通过与显影剂传送构件脱离而被弹性恢复。