公开(公告)号：US5114889A

公开(公告)日：1992-05-19

申请号：US618480

申请日：1990-11-27

申请人： Kazumi Osamura ,  Masaki Terazono ,  Shoji Kohsaka ,  Kazunori Koga ,  Akira Saito ,  Masahiro Sato ,  Hideki Uchimura

发明人： Kazumi Osamura ,  Masaki Terazono ,  Shoji Kohsaka ,  Kazunori Koga ,  Akira Saito ,  Masahiro Sato ,  Hideki Uchimura

IPC分类号： C04B35/593

CPC分类号： C04B35/593

摘要： Disclosed is a silicon nitride sintered body comprising 70 to 99 mole % of silicon nitride, 0.1 to 5 moles % of a rare earth element oxide and up to 25 moles % of silicon oxide and having a silicon oxide-to-rare earth element oxide molar ratio of from 2 to 25, wherein silicon nitride crystal grains have a fine acicular structure having an average particle major axis of up to 7 .mu.m and an average aspect ratio of at least 3.

摘要翻译： 公开了一种氮化硅烧结体，其包含70至99摩尔％的氮化硅，0.1至5摩尔％的稀土元素氧化物和至多25摩尔％的氧化硅，并且具有氧化硅与稀土元素氧化物摩尔 比例为2至25，其中氮化硅晶粒具有平均粒子长轴高达7μm，平均纵横比至少为3的细针状结构。

公开(公告)号：US5523267A

公开(公告)日：1996-06-04

申请号：US276596

申请日：1994-07-18

申请人： Kouichi Tanaka ,  Masaki Terazono ,  Masahiro Satoh ,  Masahito Nakanishi ,  Hideki Uchimura ,  Shoji Kousaka

发明人： Kouichi Tanaka ,  Masaki Terazono ,  Masahiro Satoh ,  Masahito Nakanishi ,  Hideki Uchimura ,  Shoji Kousaka

IPC分类号： C04B35/565 ,  C04B35/575 ,  C04B35/584 ,  C04B35/593 ,  C04B35/567

CPC分类号： C04B35/593 ,  C04B35/575

摘要： A silicon nitride-silicon carbide composite sintered material which comprises 100 parts by weight of a silicon nitride component containing 92 to 99.5 mol % of silicon nitride including excessive oxygen and 0.5 to 8 mol % of the elements of Group IIIa in the Periodic Table as corresponding oxides thereof and 1 to 100 parts by weight of a silicon carbide component in a dispersed state, wherein the silicon nitride component has an average particle size of 1 .mu.m or less and an average aspect ratio of 2 to 10, and the silicon carbide component has an average particle size of 1 .mu.m or less, moreover, the total amount of Al, Mg, Ca respectively contained in the sintered material as calculated as oxides thereof is 0.5% by weight or less, and a manufacturing method thereof.According to the above-mentioned composite sintered material, it becomes possible to suppress deterioration of strength at 1400.degree. C. and realize excellent creep properties. Therefore, the composite sintered material is applicable not only to structural materials for heat engines such as gas turbines and turbo-rotors but also to other heat resistant materials for various uses.

摘要翻译： 一种氮化硅 - 碳化硅复合烧结材料，其包含100重量份的包含92至99.5摩尔％的包含过量氧的氮化硅和0.5至8摩尔％的元素周期表中的IIIa族的元素的氮化硅组分， 氧化物和1〜100重量份的分散状态的碳化硅成分，其中，氮化硅成分的平均粒径为1μm以下，平均纵横比为2〜10，碳化硅成分 具有1μm以下的平均粒径，此外，以氧化物计算的烧结体中所含的Al，Mg，Ca的总量为0.5重量％以下，其制造方法。 根据上述复合烧结材料，可以抑制1400℃强度的劣化，实现优异的蠕变性能。 因此，复合烧结体不仅适用于燃气轮机，涡轮转子等发动机的结构材料，还适用于各种用途的其他耐热材料。

公开(公告)号：US08441174B2

公开(公告)日：2013-05-14

申请号：US11917747

申请日：2006-06-15

申请人： Takeshi Okamura ,  Masaki Terazono ,  Tomohiro Kawamoto ,  Takafumi Tsurumaru ,  Shigenobu Nakamura ,  Ken Yamamoto

发明人： Takeshi Okamura ,  Masaki Terazono ,  Tomohiro Kawamoto ,  Takafumi Tsurumaru ,  Shigenobu Nakamura ,  Ken Yamamoto

IPC分类号： H01L41/083

CPC分类号： H01L41/0838 ,  B05B17/0653 ,  F02M51/0603 ,  H01L41/0471 ,  H01L41/0477

摘要： In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction. In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers composed mainly of an alloy are stacked alternately, the plurality of metal layers include a plurality of high-ratio metal layers having a higher ratio of a component constituting the alloy than oppositely disposed metal layers adjacent to each other in a stacking direction.

摘要翻译： 在其中多个压电层和多个金属层交替堆叠的多层压电元件中，多个金属层包括多个低填充金属层，其中构成金属层的金属填充率低于相对设置的金属层 在层叠方向上彼此相邻的金属层。 在其中多个压电层和多个金属层交替堆叠的多层压电元件中，多个金属层包括多个薄金属层，其厚度相对于彼此相邻布置的金属层的厚度小于堆叠 方向。 在其中多个压电层和主要由合金构成的多个金属层交替堆叠的多层压电元件中，多个金属层包括多个高比例的金属层，其中构成 合金比层叠方向上彼此相邻的相对设置的金属层。

公开(公告)号：US07633210B2

公开(公告)日：2009-12-15

申请号：US10566044

申请日：2004-07-28

申请人： Susumu Ono ,  Takeshi Okamura ,  Katsushi Sakaue ,  Takaaki Hira ,  Masaki Terazono

发明人： Susumu Ono ,  Takeshi Okamura ,  Katsushi Sakaue ,  Takaaki Hira ,  Masaki Terazono

IPC分类号： H01L41/083

CPC分类号： H01L41/083 ,  H01L41/0471 ,  H01L41/273

摘要： In order to provide a multi-layer electronic component in which the occurrence of delamination between the ceramic layer and the internal electrode is restricted and a method for manufacturing the same, the multi-layer electronic component of the present invention comprises a stack formed by stacking piezoelectric layers and internal electrodes one on another alternately and a pair of external electrodes formed on two opposing side faces of the stack, wherein the internal electrode consists of a first internal electrode connected to the external electrode formed on one of the two side faces and a second internal electrode located between the first internal electrode and connected to the external electrode formed on the other one of the two side faces, and wherein the internal electrodes and the piezoelectric layers are faced in proximity so that a space between them is 2 μm or less over an area occupying 50% or more of the active region where the first internal electrode and the second internal electrode oppose each other.

摘要翻译： 为了提供限制陶瓷层和内部电极之间的分层的发生的多层电子部件及其制造方法，本发明的多层电子部件包括：叠层体 压电层和内部电极彼此交替设置，一对外部电极形成在堆叠的两个相对侧面上，其中内部电极由连接到形成在两个侧面中的一个侧面上的外部电极的第一内部电极和 所述第二内部电极位于所述第一内部电极之间并且与形成在所述两个侧面中的另一个侧面上的所述外部电极连接，并且其中所述内部电极和所述压电层面对，使得它们之间的空间为2μm或更小 在占有第一内部电极和第二内部电极的有源区域的50％以上的区域上 d内部电极彼此相对。

公开(公告)号：US06643115B2

公开(公告)日：2003-11-04

申请号：US10090438

申请日：2002-02-27

申请人： Katsushi Sakaue ,  Shoji Kosaka ,  Ichio Kiyofuji ,  Junji Ohe ,  Masaki Terazono ,  Yasushi Migita ,  Naohito Higashi ,  Hitoshi Atari

发明人： Katsushi Sakaue ,  Shoji Kosaka ,  Ichio Kiyofuji ,  Junji Ohe ,  Masaki Terazono ,  Yasushi Migita ,  Naohito Higashi ,  Hitoshi Atari

IPC分类号： H02N1300

CPC分类号： H02N13/00 ,  H01L21/6831 ,  Y10T279/23

摘要： Disclosed is an electrostatic chuck comprising a ceramic dielectric layer having a surface for placing thereon a work that is to be held, and an electrode provided on a surface opposite to the surface of the ceramic dielectric layer for placing the work thereon, wherein: the placing surface of the ceramic dielectric layer is sectionalized into an outer peripheral region and a central region by gas injection grooves extending in a circumferential manner; the surface roughness Ra(o) of the outer peripheral region of the placing surface and the surface roughness Ra(i) ot the central region satisfy the following conditions: 0.6≦Ra(i)≦1.5 &mgr;m Ra(o)≦0.7 &mgr;m Ra(i)≧Ra(o)  and the outer peripheral region of the placing surface is higher than the inner peripheral region by not less than 0.6 &mgr;m. The electrostatic chuck holds the substrate with a large adsorptive force, maintains evenness in the heat distribution of the substrate, enables the substrate to be quickly separated away from the chuck, and permits the gas to leak little.

摘要翻译： 公开了一种静电卡盘，其包括具有用于放置待保持的工件的表面的陶瓷电介质层和设置在与陶瓷电介质层的与陶瓷电介质层的表面相反的表面上的电极，用于将工件放置在其上，其中：放置 陶瓷电介质层的表面通过沿周向延伸的气体注入槽分成外周区域和中心区域;放置表面的外周区域的表面粗糙度Ra（o）和表面粗糙度Ra（i ）满足以下条件：载置面的外周区域比内周区域高0.6μm以上。 静电吸盘以大的吸附力保持基板，保持基板的热分布均匀性，能够将基板快速地从夹头分离，并允许气体泄漏很少。

公开(公告)号：US08288921B2

公开(公告)日：2012-10-16

申请号：US12088428

申请日：2006-09-29

申请人： Masaki Terazono ,  Takafumi Tsurumaru ,  Shigenobu Nakamura ,  Ken Yamamoto

发明人： Masaki Terazono ,  Takafumi Tsurumaru ,  Shigenobu Nakamura ,  Ken Yamamoto

IPC分类号： H01L41/047 ,  H01L41/083

CPC分类号： H01L41/0471 ,  H01L41/0838

摘要： In a multilayer piezoelectric element comprising a plurality of piezoelectric layers and a plurality of metal layers which are alternately stacked one upon another, the metal layers includes a plurality of high resistance metal layers having a higher electrical resistance than adjacent metal layers on the both sides. The high resistance metal layers are regularly arranged so as to interpose a plurality of different metal layers other than the high resistance metal layers. In another multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are alternately stacked one upon another, at least one layer of the metal layers is formed by a plurality of partial metal layers disposed between the piezoelectric layers.

摘要翻译： 在包括多个压电层和彼此交替堆叠的多个金属层的多层压电元件中，金属层包括多个具有比两侧的相邻金属层更高的电阻的高电阻金属层。 高电阻金属层规则地布置成包括除了高电阻金属层之外的多个不同的金属层。 在其中多个压电层和多个金属层彼此交替堆叠的另一层叠压电元件中，至少一层金属层由设置在压电层之间的多个部分金属层形成。

公开(公告)号：US08125124B2

公开(公告)日：2012-02-28

申请号：US12717018

申请日：2010-03-03

申请人： Mitsuo Kondo ,  Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

发明人： Mitsuo Kondo ,  Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

IPC分类号： H01L41/047 ,  H01L41/083

CPC分类号： H01L41/0472 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/273 ,  Y10T29/42

摘要： A multi-layer piezoelectric element having high durability which allows it to increase the amount of displacement of a piezoelectric actuator under high voltage and high pressure and does not undergo a change in the amount of displacement during continuous operation in a high electric field and under a high pressure over a long time period is provided.The multi-layer piezoelectric element comprises a stack of at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, a first external electrode formed on a first side face of the stack and connected to the first internal electrode and a second external electrode formed on a second side face of the stack and connected to the second internal electrode, wherein the bonding strength between the piezoelectric layer and the internal electrode is weaker than the bending strength of the piezoelectric layer.

摘要翻译： 一种具有高耐久性的多层压电元件，其能够在高电压和高压下增加压电致动器的位移量，并且在高电场和在高电压下连续操作期间不会发生位移量的变化 提供了长时间的高压。 所述层叠型压电元件包括​​由至少一个压电体层叠的多个内部电极和由彼此重叠的第一和第二内部电极组成的多个内部电极，形成在所述堆叠体的第一侧面上的第一外部电极， 第一内部电极和第二外部电极，形成在所述堆叠的第二侧面上并与所述第二内部电极连接，其中所述压电层和所述内部电极之间的接合强度弱于所述压电层的弯曲强度。

公开(公告)号：US07705525B2

公开(公告)日：2010-04-27

申请号：US12467901

申请日：2009-05-18

申请人： Mitsuo Kondo ,  Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

发明人： Mitsuo Kondo ,  Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

IPC分类号： H01L41/047 ,  H01L41/083

CPC分类号： H01L41/0472 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/273 ,  Y10T29/42

摘要： A multi-layer piezoelectric element having high durability which allows it to increase the amount of displacement of a piezoelectric actuator under high voltage and high pressure and does not undergo a change in the amount of displacement during continuous operation in a high electric field and under a high pressure over a long time period is provided.The multi-layer piezoelectric element comprises a stack of at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, a first external electrode formed on a first side face of the stack and connected to the first internal electrode and a second external electrode formed on a second side face of the stack and connected to the second internal electrode, wherein the bonding strength between the piezoelectric layer and the internal electrode is weaker than the bending strength of the piezoelectric layer.

摘要翻译： 一种具有高耐久性的多层压电元件，其能够在高电压和高压下增加压电致动器的位移量，并且在高电场和在高电压下连续操作期间不会发生位移量的变化 提供了长时间的高压。 所述层叠型压电元件包括​​由至少一个压电体层叠的多个内部电极和由彼此重叠的第一和第二内部电极组成的多个内部电极，形成在所述堆叠体的第一侧面上的第一外部电极， 第一内部电极和第二外部电极，形成在所述堆叠的第二侧面上并与所述第二内部电极连接，其中所述压电层和所述内部电极之间的接合强度弱于所述压电层的弯曲强度。

公开(公告)号：US07656077B2

公开(公告)日：2010-02-02

申请号：US10596475

申请日：2004-12-17

申请人： Takaaki Hira ,  Takeshi Okamura ,  Masaki Terazono ,  Hirotaka Tsuyoshi ,  Ryuusuke Tsuyoshi, legal representative ,  Katsushi Sakaue

发明人： Takaaki Hira ,  Takeshi Okamura ,  Masaki Terazono ,  Hirotaka Tsuyoshi ,  Katsushi Sakaue

IPC分类号： H01L41/047

CPC分类号： F02M51/0603 ,  H01L41/0471 ,  H01L41/0477 ,  H01L41/1876 ,  H01L41/273 ,  Y10T29/42

摘要： A laminated piezoelectric device obtained by alternately laminating the piezoelectric layers containing Pb and the conducting layers containing palladium as a conducting component, wherein the piezoelectric layer formed between the two conducting layers has layer regions where Pb and Pd are mixed together in the interfacial portions thereof relative to the conducting layers, the layer regions having a thickness of not larger than 3% of the thickness of the piezoelectric layer. The laminated piezoelectric device is formed by co-firing the Pb-containing piezoelectric layers and the palladium (Pd)-containing layers, the piezoelectric layers therein having a large insulation resistance and good piezoelectric characteristics.

摘要翻译： 通过交替层叠含有Pb的压电层和含有钯的导电层作为导电成分而获得的叠层压电元件，其中形成在两个导电层之间的压电层具有其相互界面部分中Pb和Pd混合在一起的层区域 对于导电层，层区域的厚度不大于压电层的厚度的3％。 叠层压电元件通过共烧烧含有Pb的压电层和含钯（Pd）的层，其中具有绝缘电阻大的压电层和良好的压电特性而形成。

公开(公告)号：US20070080612A1

公开(公告)日：2007-04-12

申请号：US10577843

申请日：2004-10-26

申请人： Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

发明人： Masaki Terazono ,  Takeshi Okamura ,  Katsushi Sakaue

IPC分类号： H01L41/047

CPC分类号： B41J2/14274 ,  F02M51/0603 ,  H01L41/0471 ,  H01L41/0838

摘要： A multi-layer piezoelectric element of high reliability and high durability, that undergoes smaller variations in the amount of displacement even when used under a high electric field and high pressure and is subject to less variations in the amount of displacement even when used in continuous operation over a long period of time is provided. The multi-layer piezoelectric element comprises a stack formed by stacking piezoelectric layers and internal electrodes alternately one on another and external electrodes formed on a first side face and on a second side face of the stack, wherein one of the adjacent internal electrodes is connected to the external electrode on the first side face and the other internal electrode is connected to the external electrode formed on the second side face, while the ratio of change in the amount of displacement of the element after undergoing continuous operation of 1×109 cycles or more to the initial device dimension is not larger than 5%.

摘要翻译： 具有高可靠性和高耐久性的多层压电元件即使在高电场和高压下使用时也能够发生位移量变化较小，并且即使在连续操作中使用也容易发生位移量变动 提供了很长一段时间。 所述层叠型压电元件具有将叠层的压电层和内部电极彼此交替堆叠而形成的叠层和形成在所述堆叠的第一侧面和第二侧面上的外部电极，其中，所述相邻的内部电极之一与 第一侧面上的外部电极和另一个内部电极连接到形成在第二侧面上的外部电极，而连续操作后的元件的位移量的变化比例为1×10 9 / SUP>循环或更多的初始设备尺寸不大于5％。