公开(公告)号：US08192194B2

公开(公告)日：2012-06-05

申请号：US13121348

申请日：2009-01-29

申请人： Kazunobu Hashimoto ,  Tetsuya Imai ,  Osamu Kasono ,  Masahiro Katsumura

发明人： Kazunobu Hashimoto ,  Tetsuya Imai ,  Osamu Kasono ,  Masahiro Katsumura

IPC分类号： B29C59/02 ,  B29C33/30 ,  G11B5/84

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10S425/81 ,  Y10S977/887

摘要： A mold is provided, at an outer circumferential region thereof, with portions to be gripped, to allow a transfer apparatus to perform transferring to an object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. For a mold set including two molds, each of the molds is provided, at an outer circumferential region thereof, with portions to be gripped, to allow the transfer apparatus to perform transferring to the object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. The portions to be gripped of one of the molds and the portions to be gripped of the other mold are disposed at different angular positions.

摘要翻译： 在其外周区域处设置有要夹持的部分的模具，以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 对于包括两个模具的模具组，每个模具在其外周区域处设置有要夹持的部分，以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 要将其中一个模具夹紧的部分和另一个模具夹紧的部分设置在不同的角度位置。

公开(公告)号：US20110272850A1

公开(公告)日：2011-11-10

申请号：US13121348

申请日：2009-01-29

申请人： Kazunobu Hashimoto ,  Tetsuya Imai ,  Osamu Kasono ,  Masahiro Katsumura

发明人： Kazunobu Hashimoto ,  Tetsuya Imai ,  Osamu Kasono ,  Masahiro Katsumura

IPC分类号： B29C31/00

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10S425/81 ,  Y10S977/887

摘要： A mold is provided, at an outer circumferential region thereof, with portions to be gripped, to allow a transfer apparatus to perform transferring to an object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. For a mold set including two molds, each of the molds is provided, at an outer circumferential region thereof, with portions to be gripped, to allow the transfer apparatus to perform transferring to the object.The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. The portions to be gripped of one of the molds and the portions to be gripped of the other mold are disposed at different angular positions.

摘要翻译： 在其外周区域处设置有要夹持的部分的模具，以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 对于包括两个模具的模具组，每个模具在其外周区域处设置有要夹持的部分，以允许传送装置执行到对象的传送。 待夹持的部分形成为与外周区域的剩余部分不同的形状。 要将其中一个模具夹紧的部分和另一个模具夹紧的部分设置在不同的角度位置。

公开(公告)号：US20070182942A1

公开(公告)日：2007-08-09

申请号：US10593744

申请日：2005-03-28

申请人： Osamu Kasono ,  Osamu Kumasaka ,  Yasuo Hosoda

发明人： Osamu Kasono ,  Osamu Kumasaka ,  Yasuo Hosoda

IPC分类号： G03B27/42

CPC分类号： F16C37/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70875 ,  G11B7/261 ,  H01J37/3174

摘要： The device includes a substrate holding portion for holding a substrate having resist formed thereon, a driving portion for varying the irradiation position of an exposure beam relatively to the substrate, and a cooling portion for cooling the substrate during irradiation of the exposure beam.

摘要翻译： 该装置包括用于保持其上形成有抗蚀剂的基板的基板保持部分，用于改变相对于基板的曝光光束的照射位置的驱动部分，以及用于在曝光光束照射期间冷却基板的冷却部分。

公开(公告)号：US06194129B1

公开(公告)日：2001-02-27

申请号：US09173164

申请日：1998-10-15

申请人： Osamu Kasono ,  Hiroki Kuribayashi ,  Takanobu Higuchi

发明人： Osamu Kasono ,  Hiroki Kuribayashi ,  Takanobu Higuchi

IPC分类号： G11B726

CPC分类号： G11B7/1372 ,  G11B7/261 ,  Y10S430/146

摘要： In a method of manufacturing a master optical disk, a photoresist applied to an optical disk substrate is coated with an optical film for converging recording light on the optical disk substrate in cooperation with a solid immersion lens body. The photoresist is exposed through the optical film by using an optical system including the solid immersion lens.

摘要翻译： 在制造主光盘的方法中，与固体浸没透镜主体配合，用光聚合光学基片的光学膜涂敷涂敷在光盘基板上的光致抗蚀剂。 光致抗蚀剂通过使用包括固体浸没透镜的光学系统通过光学膜曝光。

公开(公告)号：US08355036B2

公开(公告)日：2013-01-15

申请号：US12295095

申请日：2007-03-27

申请人： Osamu Kasono ,  Yasuo Hosoda

发明人： Osamu Kasono ,  Yasuo Hosoda

IPC分类号： B41J2/47 ,  G11B20/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865 ,  G11B7/261 ,  G11B9/10

摘要： A signal generating unit of a formatter inputs a misalignment amount δ unique to an individual recording apparatus and record data into a record signal compensation unit, and in accordance with these the record signal compensation unit generates a compensated beam deflection signal and substrate velocity signal to a beam unit and rotation and movement drive unit. With this arrangement, it is possible to perform compensation which matches errors in individual unit, in response to the errors (mechanical errors) in assembly dimension precision of parts and control precision of control devices which can vary among individual unit of the recording apparatus.

摘要翻译： 格式化器的信号生成单元输入单个记录装置唯一的未对准量δ，并将数据记录到记录信号补偿单元中，并且根据这些记录信号补偿单元，生成补偿的光束偏转信号和基板速度信号到 梁单元和旋转和移动驱动单元。 通过这种布置，可以响应于部件的组装尺寸精度中的误差（机械误差）和可在记录装置的各个单元之间变化的控制装置的控制精度来执行与各单元中的误差相匹配的补偿。

公开(公告)号：US20080093562A1

公开(公告)日：2008-04-24

申请号：US11813004

申请日：2005-11-22

申请人： Osamu Kasono ,  Osamu Kumasaka

发明人： Osamu Kasono ,  Osamu Kumasaka

IPC分类号： G21K5/04

CPC分类号： G11B7/261 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/20214 ,  H01J2237/30483 ,  H01J2237/3175

摘要： A recording device including a beam deflection section for relatively moving an irradiation position of an exposure beam with respect to a substrate on which a resist layer is formed; a substrate velocity adjustment section for adjusting a moving velocity of the substrate based on a deflection amount of the exposure beam; and a deflection control section for controlling to change a deflection velocity of the exposure beam during exposure of the recording signals according to the moving velocity of the substrate.

摘要翻译： 一种记录装置，包括用于相对于其上形成有抗蚀剂层的基板相对移动曝光光束的照射位置的光束偏转部分; 基板速度调节部，其基于曝光光束的偏转量来调整基板的移动速度; 以及偏转控制部，用于根据基板的移动速度，控制在记录信号的曝光期间改变曝光光束的偏转速度。

公开(公告)号：US06996043B2

公开(公告)日：2006-02-07

申请号：US09813306

申请日：2001-03-21

申请人： Osamu Kasono ,  Yoshiaki Kojima ,  Yasumitsu Wada

发明人： Osamu Kasono ,  Yoshiaki Kojima ,  Yasumitsu Wada

IPC分类号： G11B7/085

CPC分类号： G11B7/1387 ,  G11B7/0927 ,  G11B7/0948 ,  G11B7/122

摘要： Preceding to the reading out of the recording information of the optical disk by the pick-up, the height of the foreign material existing at the light converging position on the information reading surface is detected by the detector, and when the height of the foreign material is higher than the floating height h of the SIL, the magnetic field is generated by applying the control current corresponding to the height of the foreign material to the coil as the magnetic field generator at the timing before the foreign material is moved to the information reading position of the pick-up by the rotation of the optical disk. Then, when the magnetic field is provided to the magnetic substance fixedly holding the SIL which is floating, the movement operation to separate the SIL to the higher position than the height of the foreign material from the information reading surface together with the magnetic substance, is conducted.

摘要翻译： 在通过拾取器读出光盘的记录信息之前，通过检测器检测存在于信息读取表面上的聚光位置的异物的高度，并且当异物的高度 高于SIL的浮动高度h时，通过在外来材料移动到信息读取之前的时刻将与异物的高度相对应的控制电流作为磁场发生器施加到线圈，产生磁场 通过光盘的旋转拾取拾取位置。 然后，当将磁场提供给固定保持浮动的SIL的磁性体时，将SIL与磁性物质一起从信息读取表面分离出高于异物的高度的位置的移动操作是 进行。

公开(公告)号：US08130626B2

公开(公告)日：2012-03-06

申请号：US12293017

申请日：2007-03-15

申请人： Osamu Kasono

发明人： Osamu Kasono

IPC分类号： G11B7/00 ,  G03C5/00

CPC分类号： H01J37/30 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855 ,  G11B7/261 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/30483

摘要： Blanking by a blanking control unit is eliminated by making the tangential direction movement velocity of the substrate and the deflection velocity of the beam faster in the segment, in which the recording pattern is sparse, and making and slower in segments, in which it is dense. In this case, in segment in which it is desired to form a recording pattern thicker in the radial direction, a thick recording can be realized by setting the recording velocity by the recording velocity setting means to be slower, and in the case where is substantially constant, setting to be relatively slower, than in the segments.

摘要翻译： 通过使消光控制单元的消隐通过使衬底的切向方向移动速度和光束的偏转速度在记录图案稀疏的段中更快，并且使其在较长的段中变得较慢 。 在这种情况下，在期望形成在径向方向上较厚的记录图案的片段中，通过将记录速度设定装置的记录速度设定为较慢，可以实现厚的记录，并且在基本上 常数，设置相对较慢，比细分。

公开(公告)号：US07744358B2

公开(公告)日：2010-06-29

申请号：US10594893

申请日：2005-03-15

申请人： Osamu Kasono

发明人： Osamu Kasono

IPC分类号： B29C59/02

CPC分类号： B29C59/02 ,  G11B7/263 ,  Y10S425/033 ,  Y10S425/81

摘要： An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.

摘要翻译： 目的是将形成在转印模具表面上的凹凸图案精确地转印到转印目标上。 根据本发明的图案转印装置是将具有凹凸图案的转印模具放置在基板上的转印对象上以将凹凸图案转印到转印对象的表面上的图案转印装置。 其特征在于包括用于在多个不同位置独立地将转印模压在衬底上的转印靶上按压的装置。

公开(公告)号：US20090175143A1

公开(公告)日：2009-07-09

申请号：US12295095

申请日：2007-03-27

申请人： Osamu Kasono ,  Yasuo Hosoda

发明人： Osamu Kasono ,  Yasuo Hosoda

IPC分类号： G11B20/10

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865 ,  G11B7/261 ,  G11B9/10

摘要： A signal generating unit of a formatter inputs a misalignment amount δ unique to an individual recording apparatus and record data into a record signal compensation unit, and in accordance with these the record signal compensation unit generates a compensated beam deflection signal and substrate velocity signal to a beam unit and rotation and movement drive unit. With this arrangement, it is possible to perform compensation which matches errors in individual unit, in response to the errors (mechanical errors) in assembly dimension precision of parts and control precision of control devices which can vary among individual unit of the recording apparatus.

摘要翻译： 格式化器的信号产生单元输入单个记录装置唯一的未对准量增量，并将数据记录到记录信号补偿单元中，并且根据这些记录信号补偿单元，生成补偿的光束偏转信号和衬底速度信号到 梁单元和旋转和移动驱动单元。 通过这种布置，可以响应于部件的组装尺寸精度中的误差（机械误差）和可在记录装置的各个单元之间变化的控制装置的控制精度来执行与各单元中的误差相匹配的补偿。