公开(公告)号：US06972509B2

公开(公告)日：2005-12-06

申请号：US10311711

申请日：2002-04-17

申请人： Kazuo Ikeda ,  Yasumichi Murase ,  Kazunori Nishimura

发明人： Kazuo Ikeda ,  Yasumichi Murase ,  Kazunori Nishimura

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/25

CPC分类号： H03H9/25 ,  H03H3/08 ,  H03H9/02921

摘要： A surface acoustic wave (SAW) device includes a piezoelectric substrate, and on this substrate there are provided comb electrodes for forming an inter digital transducer (IDT), reflector electrodes placed closely along a traveling direction of a surface wave generated by the IDT, and a frame-like short-circuited auxiliary electrode having a width varying depending on its portions. This structure allows to uniform electric charges overall the electrode-surfaces, where the electric charges are generated in a heat treatment applied to the piezoelectric substrate during the manufacturing of the SAW device. Thus even after the device is diced into pieces, this structure can prevent damages of the electrodes or degradation in electrical properties due to an electric discharge generated by accumulated electric charges caused by pyroelectricity of the substrate.

摘要翻译： 表面声波（SAW）器件包括压电衬底，并且在该衬底上设置用于形成数字式变换器（IDT）的梳状电极，沿IDT产生的表面波的行进方向紧密放置的反射器电极，以及 具有根据其部分变化的宽度的框状短路辅助电极。 这种结构允许在制造SAW器件期间在施加到压电基板的热处理中产生电荷的电极表面的整体电荷均匀。 因此，即使在将器件切割成片之后，由于由基板的热电性引起的累积电荷而产生的放电，因此该结构可以防止电极的损坏或电性能的劣化。

公开(公告)号：US07064471B2

公开(公告)日：2006-06-20

申请号：US10362209

申请日：2002-06-18

申请人： Kazuo Ikeda ,  Kazunori Nishimura ,  Yasumichi Murase

发明人： Kazuo Ikeda ,  Kazunori Nishimura ,  Yasumichi Murase

IPC分类号： H03H9/25

CPC分类号： H03H9/6473 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16225 ,  H01L2924/16195 ,  H03H3/08 ,  H03H9/02913 ,  H03H9/02921 ,  H03H9/059 ,  H03H9/1071 ,  H03H9/25 ,  H03H9/6433 ,  H03H9/6463 ,  H01L2224/05624 ,  H01L2924/00014 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05666 ,  H01L2224/05671

摘要： A surface acoustic wave (SAW) device includes a comb-shaped electrode 2, a reflector 3 and a plurality of auxiliary electrodes 6a and 6b for surrounding the comb-shaped electrode 2 and the reflector 3, which are electrically independent of each other and have different widths locally. The SAW device is capable of efficiently and electrically uniformizing electric charge generated by pyroelectric property of a piezoelectric substrate 1.

摘要翻译： 表面声波（SAW）器件包括梳状电极2，反射器3和用于围绕彼此电独立的梳状电极2和反射器3的多个辅助电极6a和6b 并且在本地具有不同的宽度。 SAW器件能够使由压电基片1的热电性产生的电荷有效地并且均匀化。