公开(公告)号：US5820680A

公开(公告)日：1998-10-13

申请号：US839322

申请日：1997-04-17

Applicant: Kazuo Miyamoto ,  Humio Watanabe

Inventor： Kazuo Miyamoto ,  Humio Watanabe

IPC: C23C14/30 ,  H01J37/305 ,  C23C16/00

CPC classification number: H01J37/3053 ,  H01J2237/3132

Abstract: A vacuum evaporator is characterized in that hot-cathode filaments (7) are provided as the electron source around a tip of a rod evaporation material (4); the peripheries of the rod evaporation material (4) and the hot-cathode filaments (7) are disposed in parallel to a conductive cooling member (1) of a good heat conductive metal which is partly contacted with the atmosphere to decrease the dissipation of radiation heat produced from the hot-cathode filaments (7) and a tip (41) of the rod evaporation material (4) into a vacuum vessel a; heat absorbed by the conductive cooling member (1) is quickly conducted through the conductive cooling member and discharged to the atmosphere to prevent the temperature of the electron impact heating part from increasing and to prevent the increase of the gas discharge due to the heat dissipation from the electron impact heating part.

Abstract translation: 真空蒸发器的特征在于，将热阴极细丝（7）设置为围绕棒状蒸发材料（4）的尖端的电子源; 棒状蒸发材料（4）和热阴极丝（7）的周边平行于与大气部分接触的良好导热金属的导电性冷却部件（1），以减少辐射耗散 从热阴极细丝（7）和棒蒸发材料（4）的尖端（41）产生的热量进入真空容器a; 导电性冷却部件（1）吸收的热量迅速地通过导电性冷却部件导入并排放到大气中，以防止电子冲击加热部件的温度升高，并且防止由于散热而产生的气体放电 电子冲击加热部分。

公开(公告)号：US06521866B1

公开(公告)日：2003-02-18

申请号：US09623809

申请日：2000-09-08

Applicant: Kunio Arai ,  Humio Watanabe

Inventor： Kunio Arai ,  Humio Watanabe

IPC: B23K2638

CPC classification number: B23K26/0626 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/0673 ,  H05K3/0026

Abstract: Beam distributing/shaping units 21a and 21b the number of which is the same as the number of heads 7a and 7b are disposed in series with each other on an optical path of a laser beam 2 radiated from a laser oscillator 1. Then, the beam distributing/shaping units 21a and 21b are operated so that a laser pulse is supplied to one of the heads which has been positioned. By selecting the timing for operating the beam distributing/shaping units 21a and 21b, the laser beam 2 having energy the magnitude of which is substantially fixed is supplied to a portion to be machined. Thus, the laser oscillator is used effectively, and the machining energy is controlled accurately so that a high-quality hole can be machined.

Abstract translation: 光束分配/成形单元21a和21b的数量与头7a和7b的数量相同，在从激光振荡器1辐射的激光束2的光路上彼此串联设置。然后，光束 分配/整形单元21a和21b被操作，使得激光脉冲被提供给已定位的一个头部。 通过选择用于操作光束分配/成形单元21a和21b的定时，将具有其大小基本固定的能量的激光束2提供给待加工的部分。 因此，激光振荡器被有效地使用，并且精确地控制加工能量，从而可以加工高质量的孔。