公开(公告)号：US07528408B2

公开(公告)日：2009-05-05

申请号：US11342602

申请日：2006-01-31

申请人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

发明人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

IPC分类号： H01L29/10

CPC分类号： C30B29/06 ,  C30B13/00 ,  Y10S117/904

摘要： To improve the laser annealing process for polycrystallizing amorphous silicon to form silicon thin films having large crystal particle diameters at a high throughput, the present invention is directed to a process of crystallization by irradiation of a semiconductor thin film formed on a substrate with pulsed laser light. The process comprises having a means to shape laser light into a linear beam and a means to periodically and spatially modulate the intensity of pulsed laser in the direction of the long axis of the linear beam by passing through a phase-shifting stripy pattern perpendicular to the long axis, and collectively forming for each shot a polycrystalline film composed of crystals which have grown in a certain direction over the entire region irradiated with the linear beam.

摘要翻译： 为了改善多晶非晶硅的激光退火工艺，以高通量形成具有大晶粒直径的硅薄膜，本发明涉及通过用脉冲激光照射形成在基板上的半导体薄膜进行结晶的工艺 。 该方法包括具有将激光成形为线性光束的装置以及通过穿过垂直于线性光束的相移条纹图案来周期性和空间地调制脉冲激光在线性光束的长轴方向上的强度的装置 长轴，并且对于每一次射出，共同形成由在被线束束照射的整个区域上沿一定方向生长的晶体的多晶膜。

公开(公告)号：US20060118036A1

公开(公告)日：2006-06-08

申请号：US11342602

申请日：2006-01-31

申请人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

发明人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

IPC分类号： C30B23/00 ,  C30B25/00 ,  C30B28/12 ,  C30B28/14

CPC分类号： C30B29/06 ,  C30B13/00 ,  Y10S117/904

摘要： To improve the laser annealing process for polycrystallizing amorphous silicon to form silicon thin films having large crystal particle diameters at a high throughput, the present invention is directed to a process of crystallization by irradiation of a semiconductor thin film formed on a substrate with pulsed laser light. The process comprises having a means to shape laser light into a linear beam and a means to periodically and spatially modulate the intensity of pulsed laser in the direction of the long axis of the linear beam by passing through a phase-shifting stripy pattern perpendicular to the long axis, and collectively forming for each shot a polycrystalline film composed of crystals which have grown in a certain direction over the entire region irradiated with the linear beam.

公开(公告)号：US07022183B2

公开(公告)日：2006-04-04

申请号：US10462792

申请日：2003-06-17

申请人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

发明人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

IPC分类号： C30B23/00

CPC分类号： C30B29/06 ,  C30B13/00 ,  Y10S117/904

摘要： To improve the laser annealing process for polycrystallizing amorphous silicon to form silicon thin films having large crystal particle diameters at a high throughput, the present invention is directed to a process of crystallization by irradiation of a semiconductor thin film formed on a substrate with pulsed laser light. The process comprises having a means to shape laser light into a linear beam and a means to periodically and spatially modulate the intensity of pulsed laser in the direction of the long axis of the linear beam by passing through a phase-shifting stripy pattern perpendicular to the long axis, and collectively forming for each shot a polycrystalline film composed of crystals which have grown in a certain direction over the entire region irradiated with the linear beam.

公开(公告)号：US08386536B2

公开(公告)日：2013-02-26

申请号：US12628379

申请日：2009-12-01

申请人： Jun Gotou

发明人： Jun Gotou

IPC分类号： G06F12/00 ,  G06F17/30 ,  G06F7/04

CPC分类号： G06F21/6218

摘要： With a new function introduced neither to a file server nor to a client terminal, control of displaying only a file or a folder whose access right is held by a user is enabled by using existing file server and client terminal. A gateway server connected to a file server and a client terminal through a network, which has the function of filtering structure information of a folder and a file that the file server has based on access authorization of a user of the client terminal on the user basis and presenting the filtered structure information of the folder and the file to the client terminal of a user who has access authorization for the folder and the file.

摘要翻译： 通过使用既不对文件服务器也不向客户终端引入的新功能，通过使用现有的文件服务器和客户端终端来实现仅显示用户持有的访问权限的文件或文件夹的控制。 通过网络连接到文件服务器和客户终端的网关服务器，其具有基于用户基于客户终端的用户的访问授权来过滤文件夹和文件的文件的结构信息的功能 并将文件夹和文件的过滤结构信息呈现给具有文件夹和文件的访问权限的用户的客户终端。

公开(公告)号：US08276187B2

公开(公告)日：2012-09-25

申请号：US12573543

申请日：2009-10-05

申请人： Jun Gotou

发明人： Jun Gotou

IPC分类号： G06F17/30 ,  G06F7/04

CPC分类号： H04L63/08 ,  G06F21/31 ,  H04L63/0846

摘要： An information processing system includes a client device and a server system. The client device executes an application program as a confidential process for performing processing based on confidential information. When a transmission request asking for transmission of confidential information is generated by the application program being executed, the client device transmits, to the server system, the transmission request and confidential process information indicating that the process in which the transmission request was generated is a confidential process. When the server system receives the transmission request and the confidential process information from the client device, the server system transmits stored confidential information in accordance with the received transmission request.

摘要翻译： 信息处理系统包括客户端设备和服务器系统。 客户端装置执行应用程序作为基于秘密信息进行处理的机密处理。 当正在执行的应用程序生成要求发送机密信息的传输请求时，客户端设备向服务器系统发送指示发送请求生成的处理是机密的传输请求和机密处理信息 处理。 当服务器系统从客户端装置接收到发送请求和机密处理信息时，服务器系统根据接收到的发送请求发送存储的机密信息。