公开(公告)号：US20080268654A1

公开(公告)日：2008-10-30

申请号：US12213784

申请日：2008-06-24

申请人： Keisuke Suzuki ,  Toshiyuki Ikouchi ,  Kota Umezawa

发明人： Keisuke Suzuki ,  Toshiyuki Ikouchi ,  Kota Umezawa

IPC分类号： H01L21/30 ,  H01L21/31

CPC分类号： H01L21/67017 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67757

摘要： An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a supplying unit of an oxidative gas being provided at one end of the processing container, a plurality of supplying units of a reducing gas being provided at a plurality of positions in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. The atmosphere forming step has: a selecting step of selecting a predetermined supplying unit of a reducing gas among the plurality of supplying units of a reducing gas, based on an arrangement number and respective arrangement positions of the plurality of objects to be processed in the processing container; an oxidative-gas supplying step of supplying the oxidative gas into the processing container by means of the supplying unit of an oxidative gas; and an reducing-gas supplying step of supplying the reducing gas into the processing container by means of only the supplying unit of a reducing gas selected by the selecting step.

摘要翻译： 根据本发明的待处理物体的氧化方法包括：排列步骤，将待处理的多个物体布置在可以被抽真空的处理容器中，处理容器具有预定长度，供应单元 在处理容器的一端设有氧化性气体，在处理容器的长度方向的多个位置设有多个还原气体供给单元， 将氧化性气体和还原性气体供给到处理容器中以在处理容器中形成具有活性氧和活性羟基的气氛的气氛形成工序; 以及在大气中氧化多个待处理物体的表面的氧化步骤。 气氛形成步骤具有：选择步骤，基于在处理中的待处理的多个物体的排列数和各个排列位置，选择还原气体的多个供给单元中的还原气体的规定供给单元 容器; 氧化气体供给步骤，通过氧化性气体供给单元将氧化性气体供给到处理容器内; 以及还原气体供给工序，通过仅由所述选择工序所选择的还原气体的供给部供给所述还原气体到所述处理容器。

公开(公告)号：US20060183343A1

公开(公告)日：2006-08-17

申请号：US11059630

申请日：2005-02-17

申请人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

发明人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

IPC分类号： H01L21/31

CPC分类号： H01L21/67017 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67757

摘要： An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a supplying unit of an oxidative gas being provided at one end of the processing container, a plurality of supplying units of a reducing gas being provided at a plurality of positions in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. The atmosphere forming step has: a selecting step of selecting a predetermined supplying unit of a reducing gas among the plurality of supplying units of a reducing gas, based on an arrangement number and respective arrangement positions of the plurality of objects to be processed in the processing container; an oxidative-gas supplying step of supplying the oxidative gas into the processing container by means of the supplying unit of an oxidative gas; and an reducing-gas supplying step of supplying the reducing gas into the processing container by means of only the supplying unit of a reducing gas selected by the selecting step.

摘要翻译： 根据本发明的待处理物体的氧化方法包括：排列步骤，将待处理的多个物体布置在可以被抽真空的处理容器中，处理容器具有预定长度，供应单元 在处理容器的一端设有氧化性气体，在处理容器的长度方向的多个位置设有多个还原气体供给单元， 将氧化性气体和还原性气体供给到处理容器中以在处理容器中形成具有活性氧和活性羟基的气氛的气氛形成工序; 以及在大气中氧化多个待处理物体的表面的氧化步骤。 气氛形成步骤具有：选择步骤，基于在处理中的待处理的多个物体的排列数和各个排列位置，选择还原气体的多个供给单元中的还原气体的规定供给单元 容器; 氧化气体供给步骤，通过氧化性气体供给单元将氧化性气体供给到处理容器内; 以及还原气体供给工序，通过仅由所述选择工序所选择的还原气体的供给部供给所述还原气体到所述处理容器。

公开(公告)号：US07674724B2

公开(公告)日：2010-03-09

申请号：US12213784

申请日：2008-06-24

申请人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

发明人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

IPC分类号： H01L21/469

CPC分类号： H01L21/67017 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67757

摘要： An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a supplying unit of an oxidative gas being provided at one end of the processing container, a plurality of supplying units of a reducing gas being provided at a plurality of positions in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. The atmosphere forming step has: a selecting step of selecting a predetermined supplying unit of a reducing gas among the plurality of supplying units of a reducing gas, based on an arrangement number and respective arrangement positions of the plurality of objects to be processed in the processing container; an oxidative-gas supplying step of supplying the oxidative gas into the processing container by means of the supplying unit of an oxidative gas; and an reducing-gas supplying step of supplying the reducing gas into the processing container by means of only the supplying unit of a reducing gas selected by the selecting step.

摘要翻译： 根据本发明的待处理物体的氧化方法包括：排列步骤，将待处理的多个物体布置在可以被抽真空的处理容器中，处理容器具有预定长度，供应单元 在处理容器的一端设有氧化性气体，在处理容器的长度方向的多个位置设有多个还原气体供给单元， 将氧化性气体和还原性气体供给到处理容器中以在处理容器中形成具有活性氧和活性羟基的气氛的气氛形成工序; 以及在大气中氧化多个待处理物体的表面的氧化步骤。 气氛形成步骤具有：选择步骤，基于在处理中的待处理的多个物体的排列数和各个排列位置，选择还原气体的多个供给单元中的还原气体的规定供给单元 容器; 氧化气体供给步骤，通过氧化性气体供给单元将氧化性气体供给到处理容器内; 以及还原气体供给工序，通过仅由所述选择工序所选择的还原气体的供给部供给所述还原气体到所述处理容器。

公开(公告)号：US20060003542A1

公开(公告)日：2006-01-05

申请号：US11157170

申请日：2005-06-21

申请人： Keisuke Suzuki ,  Kimiya Aoki ,  Kota Umezawa ,  Thomas Wilhelm Matthes ,  Uwe Wellhausen ,  Norbert Dyroff

发明人： Keisuke Suzuki ,  Kimiya Aoki ,  Kota Umezawa ,  Thomas Wilhelm Matthes ,  Uwe Wellhausen ,  Norbert Dyroff

IPC分类号： H01L21/76

CPC分类号： H01L21/02238 ,  H01L21/0223 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/76235

摘要： A method of oxidizing an object to be processed comprises the steps of: providing an object to be processed W having a groove 4 formed on its surface in a processing vessel 22 capable of forming a vacuum therein, oxidizing the surface of the object to be processed in an atmosphere including active oxygen species and active hydroxyl species which are generated by supplying an oxidative gas and a reductive gas into the processing vessel to interact the gases. A temperature in the processing vessel during the oxidizing step is set to be equal to or less than 900° C. Thus, not only corner portions of shoulders of a trench (groove) but also corner portions of a bottom portion of the trench can be rounded to have curved surfaces so as to prevent a generation of facet.

摘要翻译： 氧化被处理物的方法包括以下步骤：提供待处理物体W，其具有在其表面上形成有能够在其中形成真空的处理容器22中的凹槽4，氧化被处理物体的表面 在包括通过将氧化性气体和还原性气体供应到处理容器中以使气体相互作用而产生的活性氧和活性羟基的气氛中。 氧化步骤中的处理容器内的温度设定为900℃以下。因此，沟槽（槽）的肩部的角部以及沟槽的底部的角部不仅可以是 圆形以具有曲面以便防止产生小面。

公开(公告)号：US07419550B2

公开(公告)日：2008-09-02

申请号：US11059630

申请日：2005-02-17

申请人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

发明人： Keisuke Suzuki ,  Toshiyuki Ikeuchi ,  Kota Umezawa

IPC分类号： C23C16/00

CPC分类号： H01L21/67017 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31662 ,  H01L21/67757

摘要： An oxidizing method for includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, a supplying unit of an oxidative gas being provided at one end of the processing container, a plurality of supplying units of a reducing gas being provided at a plurality of positions in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form active oxygen species and active hydroxyl species; and an oxidizing step of oxidizing surfaces of the plurality of objects. The atmosphere forming step has: a selecting step of selecting a predetermined supplying unit of a reducing gas among the plurality of supplying units, based on an arrangement number and respective arrangement positions of the plurality of objects; an oxidative-gas supplying step of supplying the oxidative gas into the processing container by means of the supplying unit of an oxidative gas and an reducing-gas supplying step of supplying the reducing gas into the processing container by means of only the supplying unit of a reducing gas selected by the selecting step.

摘要翻译： 一种氧化方法，包括：排列步骤，将待处理的多个物体排列在可以被抽真空的处理容器中;氧化气体的供给单元设置在处理容器的一端，多个供给单元 的还原气体设置在处理容器的纵向方向上的多个位置; 将氧化性气体和还原性气体供给到处理容器中以形成活性氧和活性羟基的气氛形成工序; 以及氧化多个物体的表面的氧化步骤。 气氛形成步骤具有：选择步骤，基于多个物体的排列数量和各个排列位置来选择多个供给单元中的还原气体的预定供应单元; 氧化气体供给步骤，通过氧化气体供给单元将氧化性气体供给到处理容器中，还原气体供给工序仅通过供给单元将供给的还原气体供给到处理容器 通过选择步骤选择的还原气体。

公开(公告)号：US09731878B2

公开(公告)日：2017-08-15

申请号：US11789420

申请日：2007-04-23

申请人： Keisuke Suzuki

发明人： Keisuke Suzuki

IPC分类号： B29C70/68 ,  B65D51/00 ,  A61J1/14

CPC分类号： B65D51/002 ,  A61J1/1406 ,  B29C70/68

摘要： In the medical cap comprising a plug 10 made of thermoplastic elastomer and an outer frame 20 made of synthetic resin, the side surface part of the plug is contacted with an inner wall 211 of the side circuit part of the outer frame in a non-fused state and is held in a state with pressure applied from the leg part of the outer frame 22. As a result, the wetted surface of the plug is not flat shaped but has an inclination downward to the circle center. Protrusion 14 can also be provided on the wetted surface and in such a case, the bottom part of the protrusion part that is one part of the wetted surface has an inclination downward to the circle center.

公开(公告)号：US09034718B2

公开(公告)日：2015-05-19

申请号：US13571559

申请日：2012-08-10

申请人： Keisuke Suzuki ,  Kentaro Kadonaga ,  Yuichiro Morozumi

发明人： Keisuke Suzuki ,  Kentaro Kadonaga ,  Yuichiro Morozumi

IPC分类号： H01L21/02 ,  H01L49/02 ,  H01L27/108 ,  C23C16/34 ,  C23C16/455

CPC分类号： H01L28/91 ,  C23C16/345 ,  C23C16/45531 ,  C23C16/45542 ,  C23C16/45578 ,  H01L21/0217 ,  H01L21/02274 ,  H01L21/0228 ,  H01L27/10852

摘要： Provided is a semiconductor device capable of preventing destruction of an electrode having a pillar shape and densely arranged. The semiconductor device having a field-effect transistor and a capacitor having a pillar shape, the semiconductor device includes: a first electrode having a pillar shape and electrically connected to an impurity diffusion region of the field-effect transistor; a dielectric film formed at least on a side of the first electrode; a second electrode formed on the dielectric film; and a support film extending in a direction crossing a length direction of the first electrode having the pillar shape, and formed by a boron-added silicon nitride film connected to the first electrode by penetrating through at least a part of the second electrode.

摘要翻译： 提供能够防止具有柱状并且密集布置的电极的破坏的半导体器件。 具有场效应晶体管和具有柱状电容器的半导体器件，该半导体器件包括：具有柱状并与该场效应晶体管的杂质扩散区电连接的第一电极; 至少在所述第一电极的一侧形成的电介质膜; 形成在电介质膜上的第二电极; 以及在与具有柱状的第一电极的长度方向交叉的方向上延伸的支撑膜，并且通过贯穿第二电极的至少一部分而与第一电极连接的添加硼的氮化硅膜形成。

公开(公告)号：US08892134B2

公开(公告)日：2014-11-18

申请号：US13520206

申请日：2010-12-14

申请人： Katsutoshi Nishida ,  Keisuke Suzuki

发明人： Katsutoshi Nishida ,  Keisuke Suzuki

IPC分类号： H04W68/00 ,  H04L29/06 ,  H04W76/00

CPC分类号： H04W76/007 ,  H04L65/1006 ,  H04L65/105 ,  H04W76/50

摘要： The present invention provides the steps of: at a priority control node (PCRF), when reception of an invite signal including priority call information is notified from a call control node (P-CSCF), determining whether it is required to change the ARP of a call control signal bearer for sending the invite signal from a gateway (P-GW) to a mobile terminal (UE) to a higher ARP than the priority set in the call control signal bearer; when change of the ARP is determined to be required, changing the ARP of the call control signal bearer to a higher ARP than the ARP set in the call control signal bearer; and performing a paging for the mobile terminal (UE) according to the priority of the call control signal bearer.

摘要翻译： 本发明提供以下步骤：在优先控制节点（PCRF）中，当从呼叫控制节点（P-CSCF）通知包括优先呼叫信息的邀请信号的接收时，确定是否需要改变ARP 用于将来自网关（P-GW）的邀请信号发送到移动终端（UE）的呼叫控制信号承载到比呼叫控制信号承载中设置的优先级高的ARP; 当确定需要更改ARP时，将呼叫控制信号承载的ARP更改为比呼叫控制信号承载中的ARP设置更高的ARP; 以及根据呼叫控制信号承载的优先级为移动终端（UE）执行寻呼。

公开(公告)号：US08868073B2

公开(公告)日：2014-10-21

申请号：US13381799

申请日：2010-07-02

申请人： Keisuke Suzuki ,  Itsuma Tanaka ,  Masashi Kanauchi

发明人： Keisuke Suzuki ,  Itsuma Tanaka ,  Masashi Kanauchi

IPC分类号： H04Q7/20 ,  H04W48/18 ,  H04W60/00 ,  H04W88/14 ,  H04W8/04

CPC分类号： H01L31/0525 ,  H01L31/0547 ,  H02S20/00 ,  H02S40/00 ,  H04W8/04 ,  H04W48/18 ,  H04W60/00 ,  H04W88/14

摘要： A mobile communication method according to the present invention comprising the subscriber management server device HSS determines either the radio access network of the WCDMA scheme or the radio access network of the LTE scheme as the standby radio access network of the mobile station UE based on the CSFB capability presence/absence information included in the received “Update GPRS Location/Update Location Request” of received the mobile station UE, and a step in which the mobile station UE performs the standby operation in the standby radio access network of the mobile station UE determined by the subscriber management server device HSS.

摘要翻译： 根据本发明的根据本发明的移动通信方法包括用户管理服务器设备HSS基于CSFB来确定WCDMA方案的无线接入网络或LTE方案的无线接入网络作为移动台UE的备用无线接入网络 所接收的移动台UE的“更新GPRS位置/更新位置请求”中包含的能力存在/不存在信息，以及移动台UE在移动台UE的待机无线接入网中进行待机动作的步骤 由用户管理服务器设备HSS。

公开(公告)号：US08565189B2

公开(公告)日：2013-10-22

申请号：US13059824

申请日：2009-08-18

申请人： Itsuma Tanaka ,  Keisuke Suzuki ,  Akimichi Tanabe

发明人： Itsuma Tanaka ,  Keisuke Suzuki ,  Akimichi Tanabe

IPC分类号： H04W4/00

CPC分类号： H04W36/0022 ,  H04W48/18 ,  H04W76/16 ,  H04W88/14

摘要： A CSFB processing unit (14) of a mobile switching center (MME) of according to the present invention is configured not to perform CSFB processing to enable a mobile station (UE), which establishes a bearer in a core network of a mobile communication system of the LTE scheme, to start CS communication in a mobile communication system of the WCDMA scheme, when CS communication of the mobile station (UE) in the mobile communication system of the WCDMA scheme is restricted in a specified area, even when the mobile switching center (MME) of the mobile communication system of the LTE scheme detects that a service request signal transmitted by the mobile station contains the first identification information.

摘要翻译： 根据本发明的移动交换中心（MME）的CSFB处理单元（14）被配置为不执行CSFB处理，以使移动站（UE）能够在移动通信系统的核心网络中建立承载 的LTE方式的移动通信系统中，在WCDMA方式的移动通信系统中的移动台（UE）的CS通信在指定区域中被限制的情况下，在WCDMA方式的移动通信系统中开始CS通信，即使在移动切换 LTE方案的移动通信系统的中心（MME）检测到由移动台发送的服务请求信号包含第一识别信息。