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    Liquid discharge head and producing method therefor
    2.
    发明授权
    Liquid discharge head and producing method therefor 失效
    排液头及其制造方法

    公开(公告)号：US06659588B2

    公开(公告)日：2003-12-09

    申请号：US10222875

    申请日：2002-08-19

    申请人： Ken Ikegame ,  Yoshiaki Suzuki ,  Toshio Kashino ,  Shuji Koyama ,  Masashi Miyagawa ,  Junji Tatsumi ,  Hiroaki Mihara ,  Miki Ito

    发明人： Ken Ikegame ,  Yoshiaki Suzuki ,  Toshio Kashino ,  Shuji Koyama ,  Masashi Miyagawa ,  Junji Tatsumi ,  Hiroaki Mihara ,  Miki Ito

    IPC分类号： B41J2015

    CPC分类号： B41J2/1632 ,  B41J2/14024 ,  B41J2/1433 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1637 ,  B41J2202/11 ,  B41J2202/21

    摘要： A liquid discharge head having plural liquid paths and plural discharge openings is formed by joining an adhesion face of an orifice plate with an adhesion face of a head main body—The liquid paths are formed upon joining an element substrate and a ceiling substrate which comprise the head main body. Apertures of the liquid paths are provided in the adhesion face of the head main body, and a protruding portion is provided in the adhesion face of the orifice plate. The protruding portion has a shape corresponding to the cross-sectional shape of one of the liquid paths, and one of the discharge openings is provided in the protruding portion. The protruding portion or a part thereof fits into one of the liquid paths, and is inserted into the liquid path for joining the adhesion face of the orifice plate with the adhesion face of the head main body.

    摘要翻译： 通过将孔板的粘合面与头主体的粘合面接合而形成具有多个液体通道和多个排出口的液体排出头 - 液体通路在连接元件基板和天花板基板时形成， 头部主体。 液体通道的孔口设置在头主体的粘附面上，并且突出部分设置在孔板的粘合面中。 突出部具有与一个液体通道的横截面形状对应的形状，并且在突出部中设置一个排出口。 突出部分或其一部分配合到一个液体通道中，并且插入到用于将孔板的粘合面与头主体的粘合面接合的液体路径中。

    Liquid discharge head and method for manufacturing the same
    4.
    发明授权
    Liquid discharge head and method for manufacturing the same 失效
    液体排出头及其制造方法

    公开(公告)号：US06511162B1

    公开(公告)日：2003-01-28

    申请号：US09608167

    申请日：2000-06-30

    申请人： Toshio Kashino ,  Hiroshi Sugitani ,  Masami Ikeda ,  Yoshiaki Suzuki ,  Shuji Koyama ,  Masashi Miyagawa ,  Hiroaki Mihara ,  Takashi Saito

    发明人： Toshio Kashino ,  Hiroshi Sugitani ,  Masami Ikeda ,  Yoshiaki Suzuki ,  Shuji Koyama ,  Masashi Miyagawa ,  Hiroaki Mihara ,  Takashi Saito

    IPC分类号： B41J2045

    CPC分类号： B41J2/1632 ,  B41J2/1408 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1626 ,  B41J2/1634 ,  B41J2002/14379

    摘要： In a liquid discharge head having a head body provided with an orifice plate having a plurality of discharge ports for discharging liquid droplets therefrom, a plurality of flow paths communicating with respective ones of the plurality of discharge ports, a liquid chamber for supplying liquid to the plurality of flow paths, and a plurality of energy generating elements disposed correspondingly to the plurality of flow paths and generating energy for discharging the liquid droplets, the orifice plate being joined to the joined surface of the head body in which the communication ports of the flow paths communicating with the discharge ports of the orifice plate are disposed, the orifice plate comprises a first member providing the core of the orifice plate and formed with apertures layer than the discharge ports at locations whereat the discharge ports are formed, and a second member covering the both surfaces of the first member and the inner surfaces of the apertures.

    摘要翻译： 在具有头板本体的排液头中，该头本体设置有具有用于从其排出液滴的多个排出口的孔板，与多个排出口中的相应排出口连通的多个流路，用于向 多个流路，以及多个与多个流路对应设置的能量产生元件，并且产生用于排出液滴的能量，孔板与头体的接合表面接合，在该主体的接合表面中，流体的连通口 设置与孔板的排出口连通的路径，孔板包括提供孔板的芯部的第一构件，并且在形成排出口的位置处形成有比排出口的孔层，并且第二构件覆盖 第一构件的两个表面和孔的内表面。

    Method for manufacturing an orifice plate for use of a liquid discharge, an orifice plate, a liquid discharge provided with such orifice plate, and a method for manufacturing such liquid discharge
    5.
    发明授权
    Method for manufacturing an orifice plate for use of a liquid discharge, an orifice plate, a liquid discharge provided with such orifice plate, and a method for manufacturing such liquid discharge 失效
    用于制造用于液体喷射的孔板的方法，孔板，设置有这种孔板的液体排出口，以及用于制造这种液体排出物的方法

    公开(公告)号：US06328420B1

    公开(公告)日：2001-12-11

    申请号：US09110025

    申请日：1998-07-02

    申请人： Shuji Koyama ,  Kazuaki Masuda ,  Ken Ikegame ,  Hiroaki Mihara ,  Toshio Kashino ,  Hiroyuki Ishinaga

    发明人： Shuji Koyama ,  Kazuaki Masuda ,  Ken Ikegame ,  Hiroaki Mihara ,  Toshio Kashino ,  Hiroyuki Ishinaga

    IPC分类号： B41J2135

    CPC分类号： B41J2/1625 ,  B41J2/162 ,  B41J2/1643 ,  B41J2202/03

    摘要： A method for manufacturing an orifice plate used for a liquid discharge provided with discharge port for discharging liquid comprises the steps of preparing a non-conductive plate having recessed portion formed on the circumference of the flat portion corresponding to the discharge port, forming a first conductive material peelable from the non-conductive plate only in the recessed portion of the non-conductive plate, forming a plate member by plating the first conductive material with a second conductive material by electroforming method after the formation of the first conductive material, and obtaining the orifice plate having the discharge port by peeling off the plate member from the non-conductive plate. With the method thus arranged, it is possible to materialize the same precision as in the glass mask used for photolithography, and make the variation of orifice areas smaller for the formation of highly densified orifices.

    摘要翻译： 一种用于制造用于液体排出口的孔板的方法，其具有用于排出液体的排出口，包括以下步骤：制备具有形成在与排出口对应的平坦部分的圆周上的凹部的非导电板，形成第一导电 仅在非导电板的凹部中从非导电板剥离的材料，在形成第一导电材料之后，通过电铸法通过用第二导电材料电镀第一导电材料形成板构件，并且获得 通过从非导电板剥离板构件而具有排出口的孔板。 通过如此布置的方法，可以实现与用于光刻的玻璃掩模相同的精度，并且使得孔面积的变化更小以形成高密度孔。

    Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate
    6.
    发明授权
    Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate 有权
    硅板生产方法

    公开(公告)号：US06569343B1

    公开(公告)日：2003-05-27

    申请号：US09609223

    申请日：2000-06-30

    申请人： Yoshiaki Suzuki ,  Toshio Kashino ,  Masashi Miyagawa ,  Hiroaki Mihara

    发明人： Yoshiaki Suzuki ,  Toshio Kashino ,  Masashi Miyagawa ,  Hiroaki Mihara

    IPC分类号： G11B5127

    CPC分类号： B41J2/1604 ,  B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646

    摘要： The invention provides a method for producing a liquid discharge head including a head main body provided with plural energy generation elements for generating energy for discharging liquid as a flying liquid droplet and plural flow paths in which the energy generation elements are respectively provided, and an orifice plate provided with plural discharge ports respectively communicating with the flow paths, wherein the orifice plate and the head main body are mutually adjoined, the method comprising a step of preparing a substrate consisting of a silicon-containing material for preparing the orifice plate a step of forming, by dry etching, plural recesses in positions on the surface of the substrate respectively corresponding to the discharge ports, with a depth larger by 5 to 50 &mgr;m than the depth of the discharge ports, a step of thinning the substrate from the reverse side thereof until the depth of the recesses becomes equal to the depth of the discharge apertures to form plural discharge ports on the substrate, thereby preparing the orifice plate constructed by forming the plural discharge ports in the substrate, and a step of adjoining the orifice plate to the head main body.

    摘要翻译： 本发明提供了一种液体排出头的制造方法，其特征在于，具备：头主体，该主体具有多个发生能量的能量产生元件，所述多个能量产生元件用于产生排出液体的能量，作为飞散液滴;以及多个流路，其中分别设有能量产生元件， 其具有分别与所述流路连通的多个排出口，其中所述孔板和所述头主体相互邻接，所述方法包括准备由用于制备所述孔板的含硅材料构成的基板的步骤，所述步骤包括： 通过干蚀刻在分别对应于排出口的基板的表面上的位置上形成多个凹槽，其深度比排出口的深度大5至50微米，从背面减薄基板的步骤 直到凹部的深度等于排放孔的深度以形成多个d 在基板上设置充电口，由此制备通过在基板中形成多个排出口构成的孔板，以及将孔板与头主体相邻的台阶。

    Liquid discharge head, producing method therefor and liquid discharge apparatus
    7.
    发明授权
    Liquid discharge head, producing method therefor and liquid discharge apparatus 失效
    排液头，其制造方法和排液装置

    公开(公告)号：US06378993B1

    公开(公告)日：2002-04-30

    申请号：US09452184

    申请日：1999-12-02

    申请人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

    发明人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

    IPC分类号： B41J205

    CPC分类号： B41J2/14048 ,  B41J2/055

    摘要： There is provided a liquid discharge head provided with an element substrate and a ceiling plate fixed in a mutually opposed state, plural liquid path lateral walls provided between the ceiling plate and the element substrate and defining plural light flow paths, plural discharge energy generating elements arranged in parallel on the surface of the element substrate so as to be respectively positioned in the plural liquid paths, plural movable members in the form of a beam supported at an end, provided on the element substrate so as to be respectively opposed to the plural discharge energy generating elements and provided with fixed ends at the upstream side in the liquid flowing direction in the liquid paths and free ends at the downstream ends, and plural projections provided on the ceiling plate for respectively limiting the amount of displacement of the plural movable members, the element substrate and the ceiling plate being composed of similar materials, wherein the liquid path lateral walls are formed on the element substrate, and, on the ceiling plate, there is provided an engaging layer having recesses for fitting with the upper end faces of the liquid path lateral walls.

    摘要翻译： 设置有设置有相互相对的状态的元件基板和顶板的液体排出头，设置在顶板与元件基板之间并限定多个光流路的多个液体流路侧壁，多个排出能量产生元件 在元件基板的表面上平行地分别设置在多个液体通道中的多个可移动部件，其形式为支撑在一端的梁，设置在元件基板上，以分别与多个放电 能量产生元件，并且在液体流道的上游侧和下游端的自由端处设置有固定端，并且在顶板上设置有分别限制多个可动构件的位移量的多个突起， 元件基板和顶板由类似的材料组成，其中液体路径1 在该元件基板上形成有一个隔壁，并且在顶板上设有一个接合层，该接合层具有用于与液体通道侧壁的上端面相配合的凹槽。

    Liquid discharge head and method of manufacturing the same
    9.
    发明授权
    Liquid discharge head and method of manufacturing the same 有权
    液体排放头及其制造方法

    公开(公告)号：US06908564B2

    公开(公告)日：2005-06-21

    申请号：US10418216

    申请日：2003-04-18

    申请人： Shuji Koyama ,  Toshio Kashino ,  Hiroaki Mihara

    发明人： Shuji Koyama ,  Toshio Kashino ,  Hiroaki Mihara

    IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B41J2/04

    CPC分类号： B41J2/1604 ,  B41J2/1404 ,  B41J2/14048 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642

    摘要： Patterning is performed to thermal oxide films 12a and 12b formed on both surface sides of a silicon substrate in which crystal orientation of a surface is (100) or (110), a liquid chamber pattern and a liquid supplying port pattern are formed, and a liquid chamber and a liquid supplying port are formed separately by anisotropically etching the silicon substrate from both surface sides at the same time. Then, a silicon nitride film is deposited with a low pressure chemical vapor deposition to both surface sides of the silicon substrate and all faces of the liquid chamber and the liquid supplying port which are formed by etching. As a result, when the silicon substrate is used for a top plate, stiffness of the top plate is improved, design freedom of the liquid chamber and the liquid supplying port is increased, misalignment is prevented in bonding to the substrate, degradation of ejecting performance is prevented, and a liquid discharge head having high preciseness and high reliability can be provided.

    摘要翻译： 对形成在表面的结晶取向为（100）或（110）的硅衬底的两个表面侧，形成液体室图案和液体供给端口图案的热氧化膜12a和12b进行图案化， 并且通过同时从两个表面侧各向异性地蚀刻硅衬底而分别形成液体室和液体供给口。 然后，通过低压化学气相沉积将氮化硅膜沉积到硅衬底的两个表面侧和通过蚀刻形成的液体室和液体供给口的所有表面。 结果，当硅衬底用于顶板时，顶板的刚度提高，液室和液体供应口的设计自由度增加，在与基板接合时防止失准，喷射性能降低 并且可以提供具有高精度和高可靠性的液体排出头。

    Method of manufacturing a liquid discharge head
    10.
    发明授权
    Method of manufacturing a liquid discharge head 失效
    液体排出头的制造方法

    公开(公告)号：US06374482B1

    公开(公告)日：2002-04-23

    申请号：US09128538

    申请日：1998-08-04

    申请人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

    发明人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

    IPC分类号： H05B310

    CPC分类号： B41J2/14129 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  Y10S29/016 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： A method for manufacturing liquid discharge heads is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in liquid, and movable members facing the heat generating members, each being arranged in each liquid flow path, having the free end on the discharge port side with a specific gap with the heat generating member. This method comprises the steps of forming the boundary layer used for providing a gap between the movable member and the substrate above the heat generating member on the substrate, of laminating the movable member on the boundary layer so as to position the free end above the heat generating member, at the same time fixing the movable member on the substrate, and of forming the gap between the movable member and the heat generating member by use of the boundary layer. With the structure thus arranged, there is no need for the step to position the movable member with the substrate, and also, the movable portion of the movable member is separated from the substrate after the movable member is formed on the substrate and incorporated in the liquid discharge head so as to implement arranging the interior of each liquid flow path finer and more precisely.

    摘要翻译： 一种液体排出头的制造方法，具有用于排出液体的排出口，与排出口连通的液体流路，用于向排出口供给液体，具有用于在液体中形成气泡的发热部件的基板，以及面向热量的活动部件 每个液体流路中的每一个都具有与发热元件具有特定间隙的排气口侧的自由端。 该方法包括以下步骤：形成边界层，用于在基板上的发热部件上方的可移动部件和基板之间提供间隙，将可动部件层压在边界层上，以将自由端定位在热 同时将可动构件固定在基板上，并且通过使用边界层在可动构件和发热构件之间形成间隙。 利用如此布置的结构，不需要用基板定位可移动部件的步骤，并且在可移动部件形成在基板上之后，可移动部件的可动部分也与基板分离， 液体排出头，从而更精细地布置每个液体流动通道的内部。