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    Position detecting method and apparatus
    2.
    发明授权
    Position detecting method and apparatus 失效
    位置检测方法和装置

    公开(公告)号：US5319444A

    公开(公告)日：1994-06-07

    申请号：US20464

    申请日：1993-02-22

    申请人： Kenji Saitoh ,  Masakazu Matsugu ,  Yukichi Niwa ,  Noriyuki Nose ,  Minoru Yoshii ,  Shigeyuki Suda

    发明人： Kenji Saitoh ,  Masakazu Matsugu ,  Yukichi Niwa ,  Noriyuki Nose ,  Minoru Yoshii ,  Shigeyuki Suda

    IPC分类号： G03F9/00 ,  G01B11/14 ,  G01N21/86

    CPC分类号： G03F9/7049

    摘要： A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.

    摘要翻译： 一种检测第一和第二物体之间的相对位置偏差的方法。 该方法包括以下步骤：向第一物体提供用作透镜的第一标记，为第二物体提供用作透镜的第二标记，在第一和第二物体之间提供光学系统，引导辐射束通过 第一标记和第二标记的光学系统，并且检测来自用来自光学系统的辐射束照射的第二标记的辐射束的任何偏移，以检测第一和第二物体的相对位置偏差。

    Device for detecting positional relationship between two objects
    3.
    发明授权
    Device for detecting positional relationship between two objects 失效
    用于检测两个物体之间的位置关系的装置

    公开(公告)号：US5327221A

    公开(公告)日：1994-07-05

    申请号：US919380

    申请日：1992-07-29

    申请人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

    发明人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

    IPC分类号： G03F9/00 ,  G01B9/02

    CPC分类号： G03F9/7023 ,  G03F9/7049

    摘要： A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.

    摘要翻译： 一种用于检测在预定方向上的第一和第二物体之间的位置关系的装置包括：用于沿与第一或第二物体的方向发射光的光源;以及第一检测部分，用于检测第一和第二物体偏转的第一光的入射位置 第一和第二物体，其中在第一检测部分上的第一光的入射位置随预定方向上第一和第二物体之间的位置关系的改变而改变。 第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态 在预定方向上的物体与第一光不同。 基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受其倾斜的影响。

    Position detecting method and apparatus including Fraunhofer diffraction detector
    4.
    发明授权
    Position detecting method and apparatus including Fraunhofer diffraction detector 失效
    位置检测方法和装置，包括弗劳恩霍夫衍射检测器

    公开(公告)号：US5325176A

    公开(公告)日：1994-06-28

    申请号：US875601

    申请日：1992-04-28

    申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

    发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

    IPC分类号： G03F9/00 ,  G01B11/02

    CPC分类号： G03F9/7076

    摘要： A device usable with a first object and a second object at least one of which is provided with a diffraction grating, for detecting the position of the second object relative to the first object, is disclosed. The device includes a light source for projecting a position detecting beam upon the first object; a beam detecting portion for receiving the position detecting beam after it is directed from the first object and being incident on the second object, the beam detecting portion receiving the position detecting beam to detect the position of the second object relative to the first object; wherein at least one diffraction grating is disposed in the path of the position detecting beam to be received by the beam detecting portion, which diffraction grating is effective to diffract the position detecting beam at least twice and wherein the beam detecting portion is disposed at a site effective not to receive unwanted diffraction light produced from the or at least one diffraction grating.

    摘要翻译： 公开了一种可用于第一物体和第二物体的装置，其中至少一个具有用于检测第二物体相对于第一物体的位置的衍射光栅。 该装置包括用于将位置检测光束投射到第一物体上的光源; 光束检测部分，用于在从第一物体引导之后接收位置检测光束并入射到第二物体上，光束检测部分接收位置检测光束以检测第二物体相对于第一物体的位置; 其中至少一个衍射光栅设置在所述位置检测光束的路径中，以由所述光束检测部分接收，所述衍射光栅有效地将所述位置检测光束衍射至少两次，并且其中所述光束检测部分设置在位置 有效地不接收由该至少一个衍射光栅产生的不想要的衍射光。

    Position detecting method and apparatus
    5.
    发明授权
    Position detecting method and apparatus 失效
    位置检测方法和装置

    公开(公告)号：US5200800A

    公开(公告)日：1993-04-06

    申请号：US892732

    申请日：1992-05-29

    申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Minoru Yoshii ,  Noriyuki Nose

    发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Minoru Yoshii ,  Noriyuki Nose

    IPC分类号： G03F9/00

    CPC分类号： G03F9/7076

    摘要： A method of detecting a position of a substrate having an alignment mark includes the steps of projecting a radiation beam from an optical head to the alignment mark such that the alignment mark produces a signal beam on the basis of which the position of the substrate is detected, forming a reference mark on the substrate at a position different from that of the alignment mark, projecting a radiation beam from the optical head to the reference mark, such that the reference mark produces a reference beam, detecting the relative positional deviation of the optical head relative to the reference mark on the basis of the produced reference beam, and adjusting the relative position of the optical head and the alignment mark on the basis of the detected relative positional deviation and, after the adjustment, detecting the position of the substrate on the basis of the produced signal beam.

    摘要翻译： 检测具有对准标记的基板的位置的方法包括以下步骤：将来自光学头的辐射束投射到对准标记，使得对准标记产生信号光束，基于该信号光束检测基板的位置 在与所述对准标记不同的位置的基板上形成参考标记，将来自所述光学头的辐射束投射到所述基准标记，使得所述基准标记产生参考光束，检测所述光学器件的相对位置偏差 基于所生成的参考光束相对于参考标记的头部，并且基于检测到的相对位置偏差来调整光学头和对准标记的相对位置，并且在调整之后，检测基板的位置 产生信号光束的基础。

    Distance measuring system
    6.
    发明授权
    Distance measuring system 失效
    距离测量系统

    公开(公告)号：US5000572A

    公开(公告)日：1991-03-19

    申请号：US542656

    申请日：1990-06-25

    申请人： Noriyuki Nose ,  Minoru Yoshii ,  Yukichi Niwa ,  Ryo Kuroda

    发明人： Noriyuki Nose ,  Minoru Yoshii ,  Yukichi Niwa ,  Ryo Kuroda

    IPC分类号： G01D5/38

    CPC分类号： G01D5/38

    摘要： A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.

    摘要翻译： 用于测量两个相对移动物体的移动距离的装置包括设置在两个物体中的一个物体上并沿两个物体的相对移动方向设置的第一衍射光栅以及设置在另一物体上的测量部分。 测量部分包括第二衍射光栅，光源和光电检测系统，其中光源提供投射在第二衍射光栅上的两个点上的光，使得它们以具有不同的衍射光的形式的两个点发射 衍射指令。 衍射光被引导到第一衍射光栅上的同一点，并被第一衍射光栅再次衍射，使得它们沿相同的方向发射，并且光电检测系统可操作以检测由于 从第一衍射光栅发出的两个光的干涉。 该装置还包括检测系统，用于根据受光检测的检测来检测两个物体的相对移动距离。

    Phase shift measuring apparatus utilizing optical meterodyne techniques
    7.
    发明授权
    Phase shift measuring apparatus utilizing optical meterodyne techniques 失效
    使用光学测距技术的相移测量装置

    公开(公告)号：US4842408A

    公开(公告)日：1989-06-27

    申请号：US47258

    申请日：1987-05-08

    申请人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Yoshimichi Okada

    发明人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Yoshimichi Okada

    IPC分类号： G01J9/04 ,  G01N21/45

    CPC分类号： G01J9/04 ,  G01N21/45

    摘要： A phase shift measuring apparatus for detecting a phase shift of a light wave passing through an object to be measured, including:supplying device for supplying first and second light waves having different frequencies;optical device for directing the first light wave toward the object and combining the first light wave passing through the object and the second light wave to obtain a composite light wave;detecting device for receiving the composite light wave and detecting a measured beat signal; andmeasuring device for comprising the measured beat signal with a predetermined reference beat signal to measure a phase shift of the first light wave.A gradient index, a thickness distribution, and the like of an object can be obtained from the measured phase shift.

    摘要翻译： 一种用于检测通过被测量物体的光波的相移的相移测量装置，包括：用于提供具有不同频率的第一和第二光波的供应装置; 光学装置，用于将第一光波引导到物体并组合通过物体的第一光波和第二光波，以获得复合光波; 用于接收所述复合光波并检测测量的拍频信号的检测装置; 以及测量装置，用于包括具有预定参考节拍信号的所测量的节拍信号，以测量第一光波的相移。 可以从所测量的相移中获得物体的梯度指数，厚度分布等。

    Distance measuring system utilizing an object with at least one inclined surface
    8.
    发明授权
    Distance measuring system utilizing an object with at least one inclined surface 失效
    距离测量系统使用至少一个内置表面的对象

    公开(公告)号：US5122660A

    公开(公告)日：1992-06-16

    申请号：US671657

    申请日：1991-03-19

    申请人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

    发明人： Minoru Yoshii ,  Noriyuki Nose ,  Yukichi Niwa ,  Ryo Kuroda

    IPC分类号： G01D5/38 ,  G02B7/32 ,  G11B7/085

    CPC分类号： G11B7/085 ,  G01D5/38 ,  G02B7/32

    摘要： A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.

    摘要翻译： 公开了一种用于测量两个相对移动的物体的相对移动距离的装置。 该装置包括形成在一个物体上的多个倾斜表面，并且沿相对移动的方向以预定间距排列，每个倾斜表面相对于相对移动的方向倾斜。 测量部分设置在另一物体上，用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离，并且检测部分检测两个物体在相对移动方向上的相对移动的距离 由测量部分测量的基础。