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    Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
    1.
    发明授权
    Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field 有权
    具有零电场的法布里 - 珀罗干涉MEMS电磁波调制器

    公开(公告)号：US07760197B2

    公开(公告)日：2010-07-20

    申请号：US11263313

    申请日：2005-10-31

    申请人： Kenneth J. Faase ,  James McKinnell ,  Arthur R. Piehl ,  Murali Chaparala ,  James R. Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

    发明人： Kenneth J. Faase ,  James McKinnell ,  Arthur R. Piehl ,  Murali Chaparala ,  James R. Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

    IPC分类号： G06F3/038 ,  G02B26/10

    CPC分类号： G02B26/001 ,  G01J3/26

    摘要： Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

    摘要翻译： 描述了与微机电系统（MEMS）法布里 - 珀罗干涉仪（FPID）相关联的系统，方法和其它实施例。 制造MEMS FPID可以包括制造像素板和反射板，从而在其间限定法布里 - 珀罗腔。 制造可以包括制造有助于静电移动像素板的电容器板。 制造可以包括在板之间产生电连接并产生电路以控制板电压以便于在板之间产生静电力。 MEMS FPID可以包括由导电材料制成的止动件和用于将止动器和板保持在将产生零电场接触事件的电势的电路。

    Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
    3.
    发明申请
    Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field 有权
    具有零电场的法布里 - 珀罗干涉MEMS电磁波调制器

    公开(公告)号：US20070097694A1

    公开(公告)日：2007-05-03

    申请号：US11263313

    申请日：2005-10-31

    申请人： Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

    发明人： Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

    IPC分类号： F21V17/02

    CPC分类号： G02B26/001 ,  G01J3/26

    摘要： Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

    摘要翻译： 描述了与微机电系统（MEMS）法布里 - 珀罗干涉仪（FPID）相关联的系统，方法和其它实施例。 制造MEMS FPID可以包括制造像素板和反射板，从而在其间限定法布里 - 珀罗腔。 制造可以包括制造有助于静电移动像素板的电容器板。 制造可以包括在板之间产生电连接并产生电路以控制板电压以便于在板之间产生静电力。 MEMS FPID可以包括由导电材料制成的止动件和用于将止动器和板保持在将产生零电场接触事件的电势的电路。

    MEMS device having distance stops
    5.
    发明授权
    MEMS device having distance stops 失效
    具有距离停止的MEMS装置

    公开(公告)号：US07741751B2

    公开(公告)日：2010-06-22

    申请号：US11479271

    申请日：2006-06-30

    申请人： Kenneth J. Faase ,  Tony S. Cruz-Uribe ,  Eric L. Nikkei ,  Adel Jilani ,  Bao Yeh

    发明人： Kenneth J. Faase ,  Tony S. Cruz-Uribe ,  Eric L. Nikkei ,  Adel Jilani ,  Bao Yeh

    IPC分类号： H02N1/00 ,  H01H57/00

    CPC分类号： B81B3/0051 ,  B81B2201/047 ,  B81B2203/053 ,  G02B26/0841 ,  G09G3/3433

    摘要： A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

    摘要翻译： 微机电系统（MEMS）装置包括底部和顶部电容板，使得它们之间可以定义电容器。 静电可移动地设置在底部和顶部电容板之间的机构。 一个或多个挠曲件可移动地设置在底部电容板和机构之间，并且在底部电容板和与最大向下移动相对应的机构之间具有距离停止。 MEMS器件包括对应于挠曲件的底部电容板的一个或多个电极。 激励不同的电极导致弯曲部移动到不同的距离挡块，导致机构移动到底部和顶部电容板之间的不同位置。

    MEMS device having distance stops
    6.
    发明申请
    MEMS device having distance stops 失效
    具有距离停止的MEMS装置

    公开(公告)号：US20080001913A1

    公开(公告)日：2008-01-03

    申请号：US11479271

    申请日：2006-06-30

    申请人： Kenneth J. Faase ,  Tony S. Cruz-Uribe ,  Eric L. Nikkel ,  Adel Jilani ,  Bao Yeh

    发明人： Kenneth J. Faase ,  Tony S. Cruz-Uribe ,  Eric L. Nikkel ,  Adel Jilani ,  Bao Yeh

    IPC分类号： G09G3/34

    CPC分类号： B81B3/0051 ,  B81B2201/047 ,  B81B2203/053 ,  G02B26/0841 ,  G09G3/3433

    摘要： A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

    摘要翻译： 微机电系统（MEMS）装置包括底部和顶部电容板，使得它们之间可以定义电容器。 静电可移动地设置在底部和顶部电容板之间的机构。 一个或多个挠曲件可移动地设置在底部电容板和机构之间，并且在底部电容板和与最大向下移动相对应的机构之间具有距离停止。 MEMS器件包括对应于挠曲件的底部电容板的一个或多个电极。 激励不同的电极导致弯曲部移动到不同的距离挡块，导致机构移动到底部和顶部电容板之间的不同位置。

    Light modulator with tunable optical state
    7.
    发明申请
    Light modulator with tunable optical state 失效
    具有可调谐光学状态的光调制器

    公开(公告)号：US20070064295A1

    公开(公告)日：2007-03-22

    申请号：US11233225

    申请日：2005-09-21

    申请人： Kenneth Faase ,  Adel Jilani ,  James McKinnell ,  Eric Nikkel ,  Arthur Piehl ,  James Przybyla ,  Bao-Sung Yeh

    发明人： Kenneth Faase ,  Adel Jilani ,  James McKinnell ,  Eric Nikkel ,  Arthur Piehl ,  James Przybyla ,  Bao-Sung Yeh

    IPC分类号： G02F1/03

    CPC分类号： G02B26/001

    摘要： An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, at least one of the optical states being tunable and the other not tunable.

    摘要翻译： 一种用于至少部分地显示图像的像素的电子光调制器装置，所述装置包括在其间限定光腔的第一和第二反射器，所述光腔具有通过光学干涉的强度的电磁波长的选择性，所述装置至少具有 第一和第二光学状态，光学状态中的至少一个是可调谐的，另一个不可调谐。