MEMS device having distance stops
    1.
    发明授权
    MEMS device having distance stops 失效
    具有距离停止的MEMS装置

    公开(公告)号:US07741751B2

    公开(公告)日:2010-06-22

    申请号:US11479271

    申请日:2006-06-30

    IPC分类号: H02N1/00 H01H57/00

    摘要: A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

    摘要翻译: 微机电系统(MEMS)装置包括底部和顶部电容板,使得它们之间可以定义电容器。 静电可移动地设置在底部和顶部电容板之间的机构。 一个或多个挠曲件可移动地设置在底部电容板和机构之间,并且在底部电容板和与最大向下移动相对应的机构之间具有距离停止。 MEMS器件包括对应于挠曲件的底部电容板的一个或多个电极。 激励不同的电极导致弯曲部移动到不同的距离挡块,导致机构移动到底部和顶部电容板之间的不同位置。

    MEMS device having distance stops
    2.
    发明申请
    MEMS device having distance stops 失效
    具有距离停止的MEMS装置

    公开(公告)号:US20080001913A1

    公开(公告)日:2008-01-03

    申请号:US11479271

    申请日:2006-06-30

    IPC分类号: G09G3/34

    摘要: A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

    摘要翻译: 微机电系统(MEMS)装置包括底部和顶部电容板,使得它们之间可以定义电容器。 静电可移动地设置在底部和顶部电容板之间的机构。 一个或多个挠曲件可移动地设置在底部电容板和机构之间,并且在底部电容板和与最大向下移动相对应的机构之间具有距离停止。 MEMS器件包括对应于挠曲件的底部电容板的一个或多个电极。 激励不同的电极导致弯曲部移动到不同的距离挡块,导致机构移动到底部和顶部电容板之间的不同位置。

    FLUID EJECTION DEVICE
    3.
    发明申请
    FLUID EJECTION DEVICE 有权
    流体喷射装置

    公开(公告)号:US20090109262A1

    公开(公告)日:2009-04-30

    申请号:US11929161

    申请日:2007-10-30

    CPC分类号: B41J2/14233

    摘要: A fluid ejection device includes a fluid chamber having a first sidewall and a second sidewall, a flexible membrane extended over the fluid chamber and supported at an end of the first sidewall and an end of the second sidewall, an actuator provided on the flexible membrane, a first gap provided between the flexible membrane and the end of the first sidewall, and a second gap provided between the flexible membrane and the end of the second sidewall, and compliant material provided within the first gap and within the second gap. As such, the actuator is adapted to deflect the flexible membrane relative to the fluid chamber.

    摘要翻译: 流体喷射装置包括具有第一侧壁和第二侧壁的流体室,在所述流体室上延伸并被支撑在所述第一侧壁的一端和所述第二侧壁的端部的柔性膜,设置在所述柔性膜上的致动器, 提供在柔性膜和第一侧壁的端部之间的第一间隙,以及设置在柔性膜和第二侧壁的端部之间的第二间隙,以及设置在第一间隙内和第二间隙内的柔顺材料。 因此,致动器适于使柔性膜相对于流体室偏转。

    Fluid ejector structure
    4.
    发明授权
    Fluid ejector structure 有权
    流体喷射器结构

    公开(公告)号:US08651630B2

    公开(公告)日:2014-02-18

    申请号:US13133773

    申请日:2009-01-20

    IPC分类号: B41J2/045

    摘要: In one embodiment, a fluid ejector structure includes: a chamber for containing a fluid; a flexible membrane forming one wall of the chamber; a plurality of piezoelectric elements; a backing operatively connected to the piezoelectric elements such that an expansion and/or contraction of a piezoelectric element causes the piezoelectric element to bend; a rigid plate overlaying a center portion of the membrane; a post coupling the piezoelectric elements to the plate through the backing such that a movement of each piezoelectric element toward the chamber is transmitted to the plate through the post. The plate is configured to transmit movement of the post to the membrane in a rigid, or substantially rigid, piston-like manner.

    摘要翻译: 在一个实施例中,流体喷射器结构包括:用于容纳流体的腔室; 形成室的一个壁的柔性膜; 多个压电元件; 背衬,可操作地连接到压电元件,使得压电元件的膨胀和/或收缩使压电元件弯曲; 覆盖膜的中心部分的刚性板; 通过背衬将压电元件耦合到板的柱,使得每个压电元件朝向室的运动通过柱传递到板。 板被构造成以刚性或基本上刚性的类似活塞的方式将柱的运动传递到膜。

    Electrostatic liquid-ejection actuation mechanism
    8.
    发明授权
    Electrostatic liquid-ejection actuation mechanism 有权
    静电液体喷射致动机构

    公开(公告)号:US08573747B2

    公开(公告)日:2013-11-05

    申请号:US13119601

    申请日:2008-10-31

    IPC分类号: B41J2/04

    CPC分类号: B41J2/14314

    摘要: An electrostatic liquid-ejection actuation mechanism includes a membrane, a frame, and one or more deformable beams. The frame has two sides and a number of cross members that are non-parallel to the two sides. The two sides and the cross members define one or more areas individually corresponding to one or more liquid chambers. The deformable beams are disposed between the membrane and the frame. The deformable beams individually correspond to the liquid chambers, and define a number of slits. Each slit is adjacent to one of the two sides of the frame. The deformable beams have a width that is less than a width of the liquid chambers, due at least to the slits.

    摘要翻译: 静电液体喷射致动机构包括膜,框架和一个或多个可变形梁。 框架具有两侧和与两侧不平行的多个横向构件。 两侧和横向构件限定一个或多个单独对应于一个或多个液体室的区域。 可变形梁设置在膜和框架之间。 可变形梁单独对应于液体室,并且限定许多狭缝。 每个狭缝与框架的两侧之一相邻。 至少对于狭缝,可变形梁的宽度小于液体室的宽度。

    FLUID EJECTOR STRUCTURE
    9.
    发明申请
    FLUID EJECTOR STRUCTURE 有权
    流体喷射器结构

    公开(公告)号:US20110285794A1

    公开(公告)日:2011-11-24

    申请号:US13133773

    申请日:2009-01-20

    IPC分类号: B41J2/045

    摘要: In one embodiment, a fluid ejector structure includes: a chamber for containing a fluid; a flexible membrane forming one wall of the chamber; a plurality of piezoelectric elements; a backing operatively connected to the piezoelectric elements such that an expansion and/or contraction of a piezoelectric element causes the piezoelectric element to bend; a rigid plate overlaying a center portion of the membrane; a post coupling the piezoelectric elements to the plate through the backing such that a movement of each piezoelectric element toward the chamber is transmitted to the plate through the post. The plate is configured to transmit movement of the post to the membrane in a rigid, or substantially rigid, piston-like manner.

    摘要翻译: 在一个实施例中,流体喷射器结构包括:用于容纳流体的腔室; 形成室的一个壁的柔性膜; 多个压电元件; 背衬,可操作地连接到压电元件,使得压电元件的膨胀和/或收缩使压电元件弯曲; 覆盖膜的中心部分的刚性板; 通过背衬将压电元件耦合到板的柱,使得每个压电元件朝向室的运动通过柱传递到板。 板被构造成以刚性或基本上刚性的类似活塞的方式将柱的运动传递到膜。