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公开(公告)号：US06835415B2
公开(公告)日：2004-12-28
申请号：US10338266
申请日：2003-01-07
IPC分类号： C23C1600
CPC分类号： H01L21/02
摘要： A method and apparatus are described wherein a thin layer of complaint material is deposited on the surface of a chuck to mitigate the deformation that an entrapped particle might cause in the part, such as a mask or a wafer, that is clamped to the chuck. The harder particle will embed into the softer layer as the clamping pressure is applied. The material composing the thin layer could be a metal or a polymer for vacuum or electrostatic chucks. It may be deposited in various patterns to affect an interrupted surface, such as that of a “pin” chuck, thereby reducing the probability of entrapping a particle.
摘要翻译： 描述了一种方法和装置，其中在卡盘的表面上沉积薄层的投诉材料，以减轻被卡住的颗粒在被夹紧到卡盘的部分（例如掩模或晶片）中可能引起的变形。 当施加夹紧压力时，较硬的颗粒将嵌入较软的层中。 构成薄层的材料可以是用于真空或静电卡盘的金属或聚合物。 它可以以各种图案沉积以影响诸如“针”卡盘的中断表面，从而降低捕获颗粒的可能性。
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公开(公告)号：US5762660A
公开(公告)日：1998-06-09
申请号：US627166
申请日：1996-04-03
申请人： Daniel M. Makowiecki , John A. Kerns , Kenneth L. Blaedel , Nicholas J. Colella , Pete J. Davis , Robert S. Juntz
发明人： Daniel M. Makowiecki , John A. Kerns , Kenneth L. Blaedel , Nicholas J. Colella , Pete J. Davis , Robert S. Juntz
摘要： A reusable grinding tool consisting of a replaceable single layer of abrasive particles intimately bonded to a precisely configured tool substrate, and a process for manufacturing the grinding tool. The tool substrate may be ceramic or metal and the abrasive particles are preferably diamond, but may be cubic boron nitride. The manufacturing process involves: coating a configured tool substrate with layers of metals, such as titanium, copper and titanium, by physical vapor deposition (PVD); applying the abrasive particles to the coated surface by a slurry technique; and brazing the abrasive particles to the tool substrate by alloying the metal layers. The precision control of the composition and thickness of the metal layers enables the bonding of a single layer or several layers of micron size abrasive particles to the tool surface. By the incorporation of an easily dissolved metal layer in the composition such allows the removal and replacement of the abrasive particles, thereby providing a process for replenishing a precisely machined grinding tool with fine abrasive particles, thus greatly reducing costs as compared to replacing expensive grinding tools.
摘要翻译： 可重复使用的研磨工具由紧密结合到精确配置的工具基底上的可更换单层研磨颗粒组成，以及用于制造研磨工具的方法。 工具衬底可以是陶瓷或金属，并且磨料颗粒优选是金刚石，但是可以是立方氮化硼。 制造过程包括：通过物理气相沉积（PVD）将配置有金属层（例如钛，铜和钛）的工具衬底涂覆; 通过浆料技术将磨料颗粒施加到涂覆表面; 并通过使金属层合金化将磨料颗粒钎焊到工具基底上。 金属层的组成和厚度的精确控制使得能够将单层或几层微米级磨料颗粒结合到工具表面。 通过在组合物中引入容易溶解的金属层可以使磨料颗粒的移除和更换，从而提供了用精细磨料颗粒补充精密加工的磨削工具的方法，从而与替代昂贵的磨具相比大大降低了成本 。
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公开(公告)号：US4505287A
公开(公告)日：1985-03-19
申请号：US548280
申请日：1983-11-03
申请人： Kenneth L. Blaedel
发明人： Kenneth L. Blaedel
CPC分类号： F17C13/028 , F16K21/00 , F17C2205/0323 , F17C2205/0394 , F17C2221/017 , F17C2223/036 , F17C2250/0443 , F17C2250/0636 , Y10T137/0379 , Y10T137/7834 , Y10T137/7835 , Y10T137/7836 , Y10T137/7895
摘要： An apparatus for metering fluids at high pressures of about 20,000 to 60,000 psi is disclosed. The apparatus includes first and second plates which are positioned adjacent each other to form a valve chamber. The plates are made of materials which have substantially equal elastic properties. One plate has a planar surface area, and the other a recessed surface area defined by periphery and central lips. When the two plates are positioned in adjacent contacting relationship, a valve chamber is formed between the planar surface area and the recessed surface area. Fluid is introduced into the chamber and exits therefrom when a deformation occurs at positions where they no longer form a valve seat. This permits the metering of fluids at high pressures and at slow variable rates. Fluid then exits from the chamber until an applied external force becomes large enough to bring the valve seats back into contact.
摘要翻译： 公开了一种用于在约20,000至60,000psi的高压下计量流体的装置。 该装置包括彼此相邻定位以形成阀室的第一和第二板。 板由具有基本上相等弹性的材料制成。 一个板具有平坦的表面积，另一个是由周边和中心唇缘限定的凹陷表面区域。 当两个板位于相邻的接触关系中时，在平坦表面区域和凹入表面区域之间形成阀室。 当在不再形成阀座的位置处发生变形时，将流体引入室中并从中离开。 这允许在高压和慢速可变速率下测量流体。 流体然后从腔室离开，直到施加的外力变得足够大以使阀座重新接触。
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公开(公告)号：US06412377B1
公开(公告)日：2002-07-02
申请号：US09568619
申请日：2000-05-10
IPC分类号： B26D154
CPC分类号： B28D5/045 , B23D59/02 , B23D59/04 , B23D61/025 , B23D61/123 , B26D1/0006 , B26D2001/0013 , B26D2001/006 , Y10T83/0443 , Y10T83/263 , Y10T83/7264 , Y10T83/8878 , Y10T83/9317 , Y10T83/9403
摘要： A saw having a self-pumped hydrodynamic blade guide or bearing for retaining the saw blade in a centered position in the saw kerf (width of cut made by the saw). The hydrodynamic blade guide or bearing utilizes pockets or grooves incorporated into the sides of the blade. The saw kerf in the workpiece provides the guide or bearing stator surface. Both sides of the blade entrain cutting fluid as the blade enters the kerf in the workpiece, and the trapped fluid provides pressure between the blade and the workpiece as an inverse function of the gap between the blade surface and the workpiece surface. If the blade wanders from the center of the kerf, then one gap will increase and one gap will decrease and the consequent pressure difference between the two sides of the blade will cause the blade to re-center itself in the kerf. Saws using the hydrodynamic blade guide or bearing have particular application in slicing slabs from boules of single crystal materials, for example, as well as for cutting other difficult to saw materials such as ceramics, glass, and brittle composite materials.
摘要翻译： 锯具有自动泵送的流体动力叶片导向器或轴承，用于将锯片保持在锯切中心位置（由锯切割的宽度）。 流体动力叶片导向件或轴承利用并入叶片侧面的凹槽或凹槽。 工件上的锯切片提供导向或轴承定子表面。 当刀片进入工件中的切口时，刀片的两侧夹带切削液，并且被捕获的流体在刀片和工件之间提供压力，作为刀片表面和工件表面之间的间隙的相反函数。 如果刀片从切口的中心移动，则一个间隙将增加，并且一个间隙将减小，并且叶片两侧之间的随之而来的压力差将导致刀片重新位于切口中。 使用流体动力学叶片导向器或轴承的锯片特别适用于从单晶材料的块体切割板坯，以及用于切割其它困难的锯材料，例如陶瓷，玻璃和脆性复合材料。
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公开(公告)号：US6082239A
公开(公告)日：2000-07-04
申请号：US684164
申请日：1996-07-19
IPC分类号： B23D59/02 , B23D59/04 , B23D61/02 , B23D61/12 , B26D1/00 , B28D5/04 , B26D1/54 , B27B5/29 , B27B13/10
CPC分类号： B28D5/045 , B23D59/02 , B23D59/04 , B23D61/025 , B23D61/123 , B26D1/0006 , B26D2001/0013 , B26D2001/006 , Y10T83/0443 , Y10T83/263 , Y10T83/7264 , Y10T83/8878 , Y10T83/9317 , Y10T83/9403
摘要： A saw having a self-pumped hydrodynamic blade guide or bearing for retaining the saw blade in a centered position in the saw kerf (width of cut made by the saw). The hydrodynamic blade guide or bearing utilizes pockets or grooves incorporated into the sides of the blade. The saw kerf in the workpiece provides the guide or bearing stator surface. Both sides of the blade entrain cutting fluid as the blade enters the kerf in the workpiece, and the trapped fluid provides pressure between the blade and the workpiece as an inverse function of the gap between the blade surface and the workpiece surface. If the blade wanders from the center of the kerf, then one gap will increase and one gap will decrease and the consequent pressure difference between the two sides of the blade will cause the blade to re-center itself in the kerf. Saws using the hydrodynamic blade guide or bearing have particular application in slicing slabs from boules of single crystal materials, for example, as well as for cutting other difficult to saw materials such as ceramics, glass, and brittle composite materials.
摘要翻译： 锯具有自动泵送的流体动力叶片导向器或轴承，用于将锯片保持在锯切中心位置（由锯切割的宽度）。 流体动力叶片导向件或轴承利用并入叶片侧面的凹槽或凹槽。 工件上的锯切片提供导向或轴承定子表面。 当刀片进入工件中的切口时，刀片的两侧夹带切削液，并且被捕获的流体在刀片和工件之间提供压力，作为刀片表面和工件表面之间的间隙的相反函数。 如果刀片从切口的中心移动，则一个间隙将增加，并且一个间隙将减小，并且叶片两侧之间的随之而来的压力差将导致刀片重新位于切口中。 使用流体动力学叶片引导件或轴承的锯片特别适用于从单晶材料的圆柱体切割板坯，以及用于切割其它难以锯切的材料如陶瓷，玻璃和脆性复合材料的应用。
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