公开(公告)号：US06674235B2

公开(公告)日：2004-01-06

申请号：US10112888

申请日：2002-04-01

申请人： Keong-Su Lim ,  Duk-Young Jeon ,  Chang-Hyun Lee ,  Sang-Su Kim

发明人： Keong-Su Lim ,  Duk-Young Jeon ,  Chang-Hyun Lee ,  Sang-Su Kim

IPC分类号： H01J4006

CPC分类号： H01J1/34 ,  H01J40/06

摘要： A photocathode structure having a photoelectric face plate protective layer, in order to prevent a photoelectric effect from being deteriorated sharply due to a high reaction of oxygen with respect to most of existing photoelectric face plate materials when the photoelectric face plate used for generating photoelectrons by a photoelectric effect is exposed to the atmosphere, is provided. For example, a diamond-like carbon thin layer is used as a photocathode protective layer, to thereby perform a function of protection of the photoelectric face plate through isolation of the photoelectric face plate from the atmosphere and enable electrons generated from the photoelectric face plate to pass through a diamond-like carbon thin layer, which is deposited thinly, by the tunneling effect so that the performance of the photocathode is not affected. By using the protective layer, the processes subsequent to the photoelectric face plate deposition process can be freely performed in the atmosphere, to thereby simplify the whole process. As a result, a production cost is lowered, and manufacturing of a device or apparatus using a large-are photocathode is facilitated.

摘要翻译： 一种具有光电面板保护层的光电阴极结构，为了防止光电效应由于氧气相对于大多数现有光电面板材料而产生的高反应，当用于通过光电面板产生光电子的光电面板 提供光电效应暴露在大气中。 例如，使用类金刚石碳薄膜作为光电阴极保护层，由此通过将光电面板与大气隔离来实现保护光电面板的功能，并且能够使从光电面板产生的电子 通过通过隧道效应薄沉积的类金刚石碳薄层，使得光电阴极的性能不受影响。 通过使用保护层，可以在大气中自由进行光电面板沉积处理之后的处理，从而简化整个处理。 结果，降低了制造成本，并且促进了使用大的光电阴极的装置或装置的制造。

公开(公告)号：US06866721B2

公开(公告)日：2005-03-15

申请号：US10113750

申请日：2002-04-01

申请人： Keong-Su Lim ,  Sang-Su Kim

发明人： Keong-Su Lim ,  Sang-Su Kim

IPC分类号： H01L21/20 ,  C23C16/48 ,  H01L21/00 ,  C23C16/00 ,  H05H1/00

CPC分类号： H01L21/67115 ,  C23C16/482 ,  C23C16/488

摘要： Apparatus for a photo-induced process are provided, which implement a transparent film (instead of an optical window), to reduce light absorption loss that would result from use of an optical window. A photo-induced process apparatus eliminates problems of conventional systems which use optical windows, such as blurring an optical window and the surface of a light source, photo absorption loss due to the optical window and/or a purge cleaning gas, and dust generation by a moving part such as a flexible curtain. A photo-induced process apparatus efficiently utilizes light emitted from a light source.

摘要翻译： 提供了一种用于光诱导工艺的装置，其实现透明膜（而不是光学窗口），以减少由于使用光学窗口而导致的光吸收损失。 光感应处理装置消除了使用光学窗口的常规系统的问题，例如模糊光学窗口和光源的表面，由于光学窗口和/或吹扫清洁气体引起的光吸收损失，以及通过 诸如柔性窗帘的移动部件。 感光处理装置有效地利用从光源发出的光。