Mems friction drive linear motor
    4.
    发明授权

    公开(公告)号:US10727765B1

    公开(公告)日:2020-07-28

    申请号:US15731539

    申请日:2017-06-27

    IPC分类号: H02N10/00 F03G7/06

    摘要: The friction driven linear motor includes a slide element with a portion with a pair of parallel straight sides. The slide element is contiguous with a zig-zag spring-like element, which is contiguous with an anchor block, which is contiguous with a MEMS substrate. The zig-zag spring-like element deforms as the slide element moves away from the anchor block. There are opposing pairs of v-beam thermal actuators. Each actuator includes a projecting cantilever beam with an end tip cycled to impinge, angularly, the slide element and extend, therein frictionally pushing the slide. A modulating current ohmically cycles the actuator from retraction to braking to pushing. At high frequencies the cantilever beam never fully retracts. The entire linear motor is composed of and is etched on a MEMS substrate.

    Racheting micromotor using bi-directional actuator
    5.
    发明授权
    Racheting micromotor using bi-directional actuator 有权
    使用双向执行机构的Racheting微电机

    公开(公告)号:US09531302B1

    公开(公告)日:2016-12-27

    申请号:US13998722

    申请日:2013-11-27

    CPC分类号: H02N2/021 F03G7/06 H02N2/043

    摘要: A ratcheting micromotor includes a ratchet bar defining ratchet teeth along an edge thereof, and first and second ends in opposition to one another. The first end is adapted to be coupled to an object to be moved. A spring is coupled on one end thereof to the second end of the ratchet bar and adapted to be fixed at another end thereof to a base. A bi-directional actuator configured for linear movement in one of a first direction and a second direction, and when energized has a common yoke coupled to a central portion thereof for movement in correspondence therewith. The common yoke includes teeth formed along an edge and positioned such that its teeth engage a portion of the ratchet teeth. A control system energizes the bi-directional actuator to move, alternately, in the first direction and the second direction.

    摘要翻译: 棘轮式微型电动机包括沿其边缘限定棘轮齿的棘轮杆,并且第一和第二端部彼此相对。 第一端适于联接到要移动的物体。 弹簧在其一端连接到棘轮杆的第二端,并且适于在另一端固定到基座。 一种双向致动器,其构造成用于在第一方向和第二方向中的一个方向上线性运动,并且当被激励时具有联接到其中心部分的公共轭,用于与其对应地运动。 公共轭包括沿着边缘形成的齿并且定位成使得其齿接合棘轮齿的一部分。 控制系统激励双向致动器,以交替地在第一方向和第二方向上移动。

    Hermetically packaged MEMS G-switch
    6.
    发明授权
    Hermetically packaged MEMS G-switch 失效
    封装MEMS G开关

    公开(公告)号:US07956302B1

    公开(公告)日:2011-06-07

    申请号:US12069001

    申请日:2008-01-16

    申请人: Daniel Jean Ezra Chen

    发明人: Daniel Jean Ezra Chen

    摘要: A hermetically packaged G-switch includes a MEMS structure having a bottom substrate layer, a top device layer and an intermediate oxide layer. A mass disposed in the top device layer is connected to one, two or three anchor portions using spring arms. One end of a spring arm is connected to the mass and another end to an anchor portion. The connection to the anchor portion includes a T shaped arrangement, which has a torsional spring cross piece connected to the spring arm. A cap containing a conductive pad is hermetically sealed to the MEMS structure. When a predetermined acceleration is attained, the mass makes electrical contact with the conductive pad to close the G-switch.

    摘要翻译: 气密封装的G型开关包括具有底部基底层,顶部器件层和中间氧化物层的MEMS结构。 设置在顶部装置层中的质量使用弹簧臂连接到一个,两个或三个锚定部分。 弹簧臂的一端连接到质量块,另一端连接到锚定部分。 与锚定部分的连接包括T形布置,其具有连接到弹簧臂的扭转弹簧横梁。 包含导电垫的盖子密封到MEMS结构。 当达到预定的加速度时,质量块与导电焊盘电接触以闭合G开关。

    MEMS linear thermoelectric motor apparatus
    7.
    发明授权
    MEMS linear thermoelectric motor apparatus 失效
    MEMS线性热电电机装置

    公开(公告)号:US07567011B1

    公开(公告)日:2009-07-28

    申请号:US11701208

    申请日:2007-02-01

    IPC分类号: H02N10/00

    CPC分类号: H01L35/00 F03G7/06

    摘要: A thermoelectric actuator moves in a first direction and an opposite direction upon the application and removal of a current. An actuator means is driven by the thermoelectric actuator and includes a set of drive teeth. The drive teeth engage with a first set of teeth on a slider member to move it to a desired position. A spring biases the slider back to an initial position. A keeper arrangement, having teeth that engage a second set of teeth on the slider, maintains the slider in its advanced position and prevents it from going back to its initial position.

    摘要翻译: 在施加和去除电流时,热电致动器在第一方向和相反方向上移动。 致动器装置由热电致动器驱动并且包括一组驱动齿。 驱动齿与滑块构件上的第一组齿接合以将其移动到期望的位置。 弹簧将滑块偏置回初始位置。 具有啮合滑块上的第二组齿的齿的保持器装置将滑块保持在其前进位置并防止其回到其初始位置。