公开(公告)号：US09601683B2

公开(公告)日：2017-03-21

申请号：US14015315

申请日：2013-08-30

申请人： TDK Corporation

发明人： Satoshi Ozawa ,  Shuto Ono ,  Akio Abe ,  Kohsuke Shimazaki

IPC分类号： H01L41/047 ,  H01L41/053 ,  G02B7/08 ,  H01L41/083 ,  H02N2/02

CPC分类号： G02B7/02 ,  G02B7/08 ,  H01L41/0471 ,  H01L41/0472 ,  H01L41/0475 ,  H01L41/0533 ,  H01L41/083 ,  H01L41/09 ,  H02N2/021 ,  H02N2/025

摘要： In object to provide a unit of piezoelectric element having a preferable bending strength and preferably used as a part of a driving unit, a unit of piezoelectric element comprising: a multilayer piezoelectric element, having internal electrodes laminated having a piezoelectric body layer in-between and a pair of external electrodes formed on side surfaces extending along laminating direction and electrically connected to the internal electrodes, a wiring part connected to the external electrodes via a solder part, wherein a solder is solidified, a resin part, joining one end surface in the laminating direction of the multilayer piezoelectric element and a mounting surface of a connection member placed to face the one end surface, wherein the resin part is continuous from the one end surface and the mounting surface to the solder part; and the resin part covers the solder part, is provided.

公开(公告)号：US09110388B2

公开(公告)日：2015-08-18

申请号：US13589313

申请日：2012-08-20

申请人： Sascha Bleidistel ,  Bernhard Geuppert

发明人： Sascha Bleidistel ,  Bernhard Geuppert

IPC分类号： G02B7/02 ,  G03F7/20 ,  H01L41/09 ,  H02N2/00 ,  H02N2/02

CPC分类号： G03F7/70833 ,  G02B7/023 ,  G03F7/70258 ,  G03F7/70825 ,  H01L41/0913 ,  H02N2/0095 ,  H02N2/021 ,  H02N2/028

摘要： The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.

摘要翻译： 本发明涉及投影曝光装置和光学系统，例如用于微光刻的投影曝光装置中的投影物镜或照明系统，其包括至少一个光学元件和至少一个具有用于光学元件的驱动装置的操纵器 。 驱动装置可以具有至少一个可移动部分元件和至少一个可在至少一个运动方向上相对于彼此移动的固定部分元件。

公开(公告)号：US08912708B2

公开(公告)日：2014-12-16

申请号：US13379415

申请日：2009-06-22

申请人： Stefan Johansson

发明人： Stefan Johansson

IPC分类号： H02N2/00 ,  H01L41/09 ,  H01L41/083 ,  H02N2/02

CPC分类号： H01L41/0913 ,  H01L41/094 ,  H02N2/021

摘要： An electromechanical motor includes an actuator assembly and a body to be driven in a driving direction. The actuator assembly has an actuator backing, a first actuator and a second actuator. The actuators are mechanically attached by a respective single attachment to the actuator backing at a first end of the actuators. The actuators have a respective interaction portion constituting a second end opposite to the first end in an actuator direction transverse to the driving direction. The interaction portions are arranged for interaction with an interaction surface of the body by a respective contact area. The actuators include a respective unimorph member arranged for causing a movement of the respective contact area as a response of a respective electrical signal. The respective movements are transverse to the actuator direction, to the driving direction, and to each other.

摘要翻译： 机电马达包括致动器组件和驱动方向的主体。 致动器组件具有致动器背衬，第一致动器和第二致动器。 致动器在致动器的第一端处通过相应的单个附件机械地附接到致动器背衬。 致动器具有各自的相互作用部分，该相互作用部分构成在与驱动方向横切的致动器方向上与第一端相对的第二端。 相互作用部分布置成通过相应的接触区域与身体的相互作用表面相互作用。 这些致动器包括相应的单成型构件，其被布置成作为各个电信号的响应引起各个接触区域的移动。 相应的运动横向于致动器方向，驱动方向和彼此。

公开(公告)号：US08675295B2

公开(公告)日：2014-03-18

申请号：US13248431

申请日：2011-09-29

申请人： Kunihiro Kuwano ,  Masamitsu Kimura

发明人： Kunihiro Kuwano ,  Masamitsu Kimura

IPC分类号： G02B7/02

CPC分类号： G02B7/04 ,  G02B7/08 ,  H02N2/021 ,  H02N2/101

摘要： A piezoelectric actuator comprises a first piezoelectric element, a second piezoelectric element, a first set of a first member that is mounted with the first piezoelectric element which is deformed in a first direction with an application of a first voltage, and a second set of a second member that is mounted with the second piezoelectric element which is deformed in the opposite direction of the first direction with the application of the first voltage.

摘要翻译： 压电致动器包括第一压电元件，第二压电元件，第一组件，其安装有第一压电元件，第一压电元件在施加第一电压时沿第一方向变形，第二组 第二构件，其安装有第二压电元件，该第二压电元件在施加第一电压时沿与第一方向相反的方向变形。

公开(公告)号：US08415860B2

公开(公告)日：2013-04-09

申请号：US12792151

申请日：2010-06-02

申请人： Matthew C. Malkin ,  Gerardo Pena

发明人： Matthew C. Malkin ,  Gerardo Pena

IPC分类号： H01L41/00 ,  H02N2/00

CPC分类号： H02N2/22 ,  H01L41/053 ,  H01L41/0536 ,  H01L41/25 ,  H02N2/021 ,  H02N2/186 ,  Y10T29/42

摘要： An energy harvesting apparatus and method that is especially well suited for harvesting low frequency broadband vibration energy from a vibrating structure is presented. The apparatus includes a pair of disc springs that are arranged in an opposing relationship. A threaded fastening member and a threaded nut extend through apertures in each of the disc springs and enable a predetermined preload force to be applied to the disc springs. The preload effectively “softens” the disc springs, thus heightening the sensitivity of the disc springs to low frequency, low amplitude vibration energy. A piezoelectric material ring is secured to each of the disc springs. Each piezoelectric material ring experiences changes in strain as its associated disc spring deflects in response to vibration energy experienced from a vibrating structure. The electrical output from each piezoelectric material ring can be used to power or activate various forms of electronic sensors and devices, or it can be conditioned and stored in a circuit for later use.

摘要翻译： 提出了一种特别适用于从振动结构中收获低频宽带振动能的能量收集装置和方法。 该装置包括以相对关系布置的一对碟形弹簧。 螺纹紧固构件和螺纹螺母延伸穿过每个碟形弹簧中的孔，并且能够将预定的预加载力施加到盘形弹簧。 预压力有效地使碟形弹簧软化，从而将碟形弹簧的灵敏度提高到低频，低振幅的振动能量。 压电材料环被固定到每个盘形弹簧。 每个压电材料环响应于由振动结构所经受的振动能量而相应的弹簧偏转，经历应变变化。 来自每个压电材料环的电输出可用于对各种形式的电子传感器和设备供电或激活，或者可将其调节并存储在电路中供以后使用。

公开(公告)号：US20120087023A1

公开(公告)日：2012-04-12

申请号：US13375951

申请日：2010-06-04

申请人： Takatoshi Ashizawa

发明人： Takatoshi Ashizawa

IPC分类号： G02B7/04 ,  H02N2/00

CPC分类号： G02B7/08 ,  H01L41/0913 ,  H02N2/021 ,  H02N2/06 ,  H02N2/101

摘要： Disclosed is a piezoelectric actuator which has an improved driving force or drive efficiency. Specifically disclosed is a piezoelectric actuator which is provided with: a plurality of piezoelectric members which have a first piezoelectric element capable of being displaced in a first direction and a second piezoelectric element capable of being displaced in a second direction intersecting the first direction, and which are divided into a plurality of groups; a relative movement member which has a contact surface that is in contact with the piezoelectric members, and which moves relatively to the piezoelectric members in the first direction; and a drive unit which, when piezoelectric members of one group among the plurality of groups are in contact with the contact surface, drives the first piezoelectric element of the piezoelectric members.

摘要翻译： 公开了一种具有改进的驱动力或驱动效率的压电致动器。 具体公开了一种压电致动器，其具备：多个压电部件，具有能够沿第一方向位移的第一压电元件和能够沿与第一方向相交的第二方向位移的第二压电元件， 被分成多个组; 相对运动构件，其具有与压电构件接触的接触表面，并且在第一方向上相对于压电构件移动; 以及驱动单元，当所述多个组中的一组的压电构件与所述接触表面接触时，驱动所述压电构件的所述第一压电元件。

公开(公告)号：US20120025669A1

公开(公告)日：2012-02-02

申请号：US13189665

申请日：2011-07-25

申请人： Hiroshi Takahashi

发明人： Hiroshi Takahashi

IPC分类号： H02N2/04

CPC分类号： H02N2/0055 ,  H02N2/021 ,  H02N2/101

摘要： A drive apparatus according to an embodiment includes: a movable unit configured to include a first sliding surface, and slide along the first sliding surface; a vibration generating unit configured to generate vibrations; a vibration transmitting unit configured to include a second sliding surface in contact with the first sliding surface of the movable unit, and transmit the vibrations generated by the vibration generating unit to the movable unit via the first and second sliding surfaces; a pre-pressure applying unit configured to apply pre-pressure to the movable unit via the vibration transmitting unit; and a driving force generating unit configure to generate a driving force for driving the movable unit in a predetermined direction, the driving force being greater than a friction force between the first sliding surface and the second sliding surface when the vibrations are being transmitted to the vibration transmitting unit, the driving force being smaller than the friction force when the vibrations are not being transmitted to the vibration transmitting unit.

摘要翻译： 根据实施例的驱动装置包括：可移动单元，被配置为包括第一滑动表面，并沿着第一滑动表面滑动; 构造成产生振动的振动产生单元; 振动传递单元，其构造成包括与所述可移动单元的所述第一滑动面接触的第二滑动面，并且经由所述第一和第二滑动面将所述振动产生单元产生的振动传递到所述可动单元; 预压施加单元，被配置为经由所述振动传递单元向所述可移动单元施加预压力; 以及驱动力产生单元，其构造成产生用于沿预定方向驱动所述可移动单元的驱动力，所述驱动力大于当所述振动被传递到所述振动时所述第一滑动表面和所述第二滑动表面之间的摩擦力 所述驱动力小于当所述振动没有传递到所述振动传递单元时的摩擦力。

公开(公告)号：US08072302B2

公开(公告)日：2011-12-06

申请号：US12205307

申请日：2008-09-05

申请人： Yuanchang Liang ,  Minoru Taya

发明人： Yuanchang Liang ,  Minoru Taya

IPC分类号： H01F7/00

CPC分类号： H01L41/12 ,  H02N2/021 ,  H02N2/023

摘要： Linear actuators (also known as inchworm actuators) including a magnetically actuatable member with a plurality of wings or blades made from a shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. The actuator assembly includes a housing, a magnetic trigger including an electromagnet and a permanent magnet, and the magnetically actuatable SMA member. Significantly, the wings/blades of the magnetically actuatable SMA member are coupled to the housing. Activation of the magnetic trigger causes the magnetically actuatable SMA member to move toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with a SMA (i.e., a ferromagnetic SMA composite).

摘要翻译： 描述了包括具有由形状记忆合金（SMA）制成的多个翼或叶片的可磁致动构件的线性致动器（也称为蚯蚓致动器）。 线性致动器包括杆和致动器组件，构造成实现致动器组件相对于杆的线性位移。 致动器组件包括壳体，包括电磁体和永磁体的磁触发器以及可磁致动SMA构件。 重要的是，可磁致动SMA构件的翼/叶片联接到壳体。 磁触发器的激活导致可磁致动SMA部件朝向磁触发器移动。 磁致动SMA的运动可以转换为线性位移。 可磁致动SMA可以使用表现出铁磁性和SMA性质的SMA，或通过与SMA（即铁磁性SMA复合材料）耦合的铁磁性质量来实现。

公开(公告)号：US07915787B2

公开(公告)日：2011-03-29

申请号：US12169575

申请日：2008-07-08

申请人： Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

发明人： Mahito Negishi ,  Takao Yokomatsu ,  Ken Meisho ,  Seiichi Hata ,  Akira Shimokohbe ,  Dongming Sun ,  Sheng Wang

IPC分类号： H01L41/08

CPC分类号： H02N2/009 ,  H02N2/021 ,  H02N2/08

摘要： A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.

摘要翻译： 圆柱形压电元件被布置成与中心部分和端部具有不同直径的圆柱形振动器共轴以固定在中心部分形成间隙的振动器。 在压电元件和振动器（即第二电极）上的第一电极上施加振动电压，以使振动器振动并使行波的波前与管状构件（即，安装到振动器的支撑构件）接触 。 在振动器的接触部分的摩擦使包括振动器和压电元件在内的动子在管状构件的轴向上移动。 通过使用与压电元件分开设置的振动器放大振动振幅，实现了能够进行高速驱动的小型致动器。

公开(公告)号：US07688168B2

公开(公告)日：2010-03-30

申请号：US11222022

申请日：2005-09-08

申请人： Minoru Taya ,  Victor Cheng ,  Harry Sugandi ,  Yuanchang Liang ,  Hsiuhung Chen ,  Chi-Yuan Wang

发明人： Minoru Taya ,  Victor Cheng ,  Harry Sugandi ,  Yuanchang Liang ,  Hsiuhung Chen ,  Chi-Yuan Wang

IPC分类号： H01H55/00

CPC分类号： H01L41/12 ,  F04B9/06 ,  F04B15/02 ,  F05C2201/0412 ,  F05C2201/0466 ,  H02N2/021 ,  H02N2/023

摘要： Linear actuators (also known as an inchworm actuator) including a magnetically actuatable shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. A hybrid magnetic trigger including an electromagnet and a permanent magnet is used to selectively attract the magnetically actuatable SMA toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with an SMA (i.e., a ferromagnetic SMA composite). Linear actuators including bars incorporating a ratchet mechanism, and featureless bars are described. A hydraulic system incorporating actuators including magnetically actuatable SMA membranes is also disclosed.

摘要翻译： 描述了包括可磁致动形状记忆合金（SMA）的线性致动器（也称为蚯蚓致动器）。 线性致动器包括杆和致动器组件，构造成实现致动器组件相对于杆的线性位移。 使用包括电磁体和永磁体的混合磁触发器来选择性地将磁致动SMA吸引到磁触发器。 磁致动SMA的运动可以转换为线性位移。 可磁致动SMA可以使用表现出铁磁性和SMA性质的SMA，或通过与SMA（即铁磁SMA复合材料）耦合的铁磁性质量来实现。 描述了包括具有棘轮机构的杆的线性致动器和无特征杆。 还公开了一种包括具有可磁致动SMA膜的致动器的液压系统。