摘要:
A ratcheting micromotor includes a ratchet bar defining ratchet teeth along an edge thereof, and first and second ends in opposition to one another. The first end is adapted to be coupled to an object to be moved. A spring is coupled on one end thereof to the second end of the ratchet bar and adapted to be fixed at another end thereof to a base. A bi-directional actuator configured for linear movement in one of a first direction and a second direction, and when energized has a common yoke coupled to a central portion thereof for movement in correspondence therewith. The common yoke includes teeth formed along an edge and positioned such that its teeth engage a portion of the ratchet teeth. A control system energizes the bi-directional actuator to move, alternately, in the first direction and the second direction.
摘要:
A method of sealing an optical fiber in a microchip includes providing a device microchip, a top microchip and an optical fiber; forming a groove in at least one of the device microchip and the top microchip; coating metal on the optical fiber; depositing metal on the groove and top surfaces of the device microchip and the top microchip; depositing solder on the top surface of at least one of the device microchip and the top microchip; placing the optical fiber in the groove; placing the top microchip on the device microchip; and reflowing the solder to form a hermetic seal.
摘要:
A MEMS type optical switch includes a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers; a thermal actuator disposed adjacent one of the first and second optical fibers, the thermal actuator comprising at least one v-beam, a pair of anchors connected to ends of the v-beam, and a yoke disposed in a central portion of the v-beam.
摘要:
A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm.
摘要:
Systems and methods for a self-regulating power supply for MEMS thermal actuators to achieve maximum actuator displacement while preventing over powering. The present invention includes a power supply configured to regulate electrical input power to a MEMS thermal actuator in order to provide the maximum possible electrical input power. Accordingly, the present invention provides a maximum actuator displacement while preventing device failure from over powering. The present invention utilizes resistivity versus temperature properties for silicon or the like to provide a self-regulating power supply that can be utilized to power a variety of MEMS components without requiring custom actuator control circuits for each type of component.