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公开(公告)号:US06410359B1
公开(公告)日:2002-06-25
申请号:US09817639
申请日:2001-03-26
申请人: Kevin M. Connolly , Jung S. Kang , Berni W. Landau , James E. Breisch , Akira Kakizawa , Joseph W. Parks, Jr. , Mark A. Beiley , Zong-Fu Li , Cory E. Weber , Shaofeng Yu
发明人: Kevin M. Connolly , Jung S. Kang , Berni W. Landau , James E. Breisch , Akira Kakizawa , Joseph W. Parks, Jr. , Mark A. Beiley , Zong-Fu Li , Cory E. Weber , Shaofeng Yu
IPC分类号: H01L2100
摘要: Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area. For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
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公开(公告)号:US06215165B1
公开(公告)日:2001-04-10
申请号:US09310423
申请日:1999-05-12
申请人: Kevin M. Connolly , Jung S. Kang , Berni W. Landau , James E. Breisch , Akira Kakizawa , Joseph W. Parks, Jr. , Mark A. Beiley , Zong-Fu Li , Cory E. Weber , Shaofeng Yu
发明人: Kevin M. Connolly , Jung S. Kang , Berni W. Landau , James E. Breisch , Akira Kakizawa , Joseph W. Parks, Jr. , Mark A. Beiley , Zong-Fu Li , Cory E. Weber , Shaofeng Yu
IPC分类号: H01L310232
CPC分类号: H01L31/103 , H01L27/1463
摘要: Leakage current may be reduced in trench isolated semiconductor devices by providing a buffer between the trench isolation and an active area. For example, with a trench isolated photodiode, a buffer of opposite conductivity type may be provided between the trench and the diffusion that forms the p-n junction of the photodiode.
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