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    MEMS capacitive cantilever strain sensor, devices, and formation methods
    1.
    发明授权
    MEMS capacitive cantilever strain sensor, devices, and formation methods 有权
    MEMS电容式悬臂应变传感器，器件和形成方法

    公开(公告)号：US07302858B2

    公开(公告)日：2007-12-04

    申请号：US10949723

    申请日：2004-09-24

    申请人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    发明人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    IPC分类号： G01B7/16

    CPC分类号： A61B5/103 ,  A61B5/076 ,  A61B2562/0261 ,  A61B2562/028 ,  G01B7/22

    摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.

    摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。

    MEMS capacitive cantilever strain sensor, devices, and formation methods
    2.
    发明申请
    MEMS capacitive cantilever strain sensor, devices, and formation methods 有权
    MEMS电容式悬臂应变传感器，器件和形成方法

    公开(公告)号：US20060070451A1

    公开(公告)日：2006-04-06

    申请号：US10949723

    申请日：2004-09-24

    申请人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    发明人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    IPC分类号： G01B7/16

    CPC分类号： A61B5/103 ,  A61B5/076 ,  A61B2562/0261 ,  A61B2562/028 ,  G01B7/22

    摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.

    摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。