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    MEMS capacitive cantilever strain sensor, devices, and formation methods
    1.
    发明申请
    MEMS capacitive cantilever strain sensor, devices, and formation methods 有权
    MEMS电容式悬臂应变传感器，器件和形成方法

    公开(公告)号：US20060070451A1

    公开(公告)日：2006-04-06

    申请号：US10949723

    申请日：2004-09-24

    申请人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    发明人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    IPC分类号： G01B7/16

    CPC分类号： A61B5/103 ,  A61B5/076 ,  A61B2562/0261 ,  A61B2562/028 ,  G01B7/22

    摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.

    摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。

    MEMS capacitive cantilever strain sensor, devices, and formation methods
    2.
    发明授权
    MEMS capacitive cantilever strain sensor, devices, and formation methods 有权
    MEMS电容式悬臂应变传感器，器件和形成方法

    公开(公告)号：US07302858B2

    公开(公告)日：2007-12-04

    申请号：US10949723

    申请日：2004-09-24

    申请人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    发明人： Kevin Walsh ,  Mark Crain ,  William Hnat ,  Douglas Jackson ,  Ji-Tzuoh Lin ,  John Naber

    IPC分类号： G01B7/16

    CPC分类号： A61B5/103 ,  A61B5/076 ,  A61B2562/0261 ,  A61B2562/028 ,  G01B7/22

    摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.

    摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。

    Interchangeable preconcentrator connector assembly
    4.
    发明申请
    Interchangeable preconcentrator connector assembly 有权
    可互换的预浓缩器连接器组件

    公开(公告)号：US20090249958A1

    公开(公告)日：2009-10-08

    申请号：US12337449

    申请日：2008-12-17

    申请人： Scott Cambron ,  Thomas Roussel ,  Robert Keynton ,  Michael Martin ,  Kevin Walsh ,  Doug Jackson ,  John Naber

    发明人： Scott Cambron ,  Thomas Roussel ,  Robert Keynton ,  Michael Martin ,  Kevin Walsh ,  Doug Jackson ,  John Naber

    IPC分类号： B01D50/00

    CPC分类号： G01N1/405 ,  G01N30/08 ,  G01N35/1095

    摘要： An interchangeable preconcentrator assembly comprises an outer housing and an inner housing defining a chamber. A biased urging member is held at least partially within the outer housing and slidably biased toward a surface of the inner housing. When the biased urging member is at least partially retracted, a space is defined between the urging member and the surface of the inner housing for accommodating at least one preconcentrator chip. A continuous fluid flow path is defined through the outer housing and through the space. The interchangeable preconcentrator assembly may further comprise at least one modular preconcentrator carriage.

    摘要翻译： 可互换的预浓缩器组件包括外壳体和限定腔室的内壳体。 偏压推动构件至少部分地保持在外壳体内并且可滑动地偏压到内壳体的表面。 当偏压推动构件至少部分地缩回时，在推动构件和内壳体的表面之间限定一个空间，用于容纳至少一个预浓缩器芯片。 连续的流体流动路径通过外部壳体并通过该空间来限定。 可互换的预浓缩器组件还可以包括至少一个模块化预浓缩器托架。

    Interchangeable preconcentrator connector assembly
    5.
    发明授权
    Interchangeable preconcentrator connector assembly 有权
    可互换的预浓缩器连接器组件

    公开(公告)号：US08178045B2

    公开(公告)日：2012-05-15

    申请号：US12337449

    申请日：2008-12-17

    申请人： Scott Cambron ,  Thomas Roussel ,  Robert Keynton ,  Michael Martin ,  Kevin Walsh ,  Doug Jackson ,  John Naber

    发明人： Scott Cambron ,  Thomas Roussel ,  Robert Keynton ,  Michael Martin ,  Kevin Walsh ,  Doug Jackson ,  John Naber

    IPC分类号： G01N30/00 ,  G01N30/08

    CPC分类号： G01N1/405 ,  G01N30/08 ,  G01N35/1095

    摘要： An interchangeable preconcentrator assembly comprises an outer housing and an inner housing defining a chamber. A biased urging member is held at least partially within the outer housing and slidably biased toward a surface of the inner housing. When the biased urging member is at least partially retracted, a space is defined between the urging member and the surface of the inner housing for accommodating at least one preconcentrator chip. A continuous fluid flow path is defined through the outer housing and through the space. The interchangeable preconcentrator assembly may further comprise at least one modular preconcentrator carriage.

    摘要翻译： 可互换的预浓缩器组件包括外壳体和限定腔室的内壳体。 偏压推动构件至少部分地保持在外壳体内并且可滑动地偏压到内壳体的表面。 当偏压推动构件至少部分地缩回时，在推动构件和内壳体的表面之间限定一个空间，用于容纳至少一个预浓缩器芯片。 连续的流体流动路径通过外部壳体并通过该空间来限定。 可互换的预浓缩器组件还可以包括至少一个模块化预浓缩器托架。

    MEMS Capacitive Bending and Axial Strain Sensor
    6.
    发明申请
    MEMS Capacitive Bending and Axial Strain Sensor 有权
    MEMS电容弯曲和轴向应变传感器

    公开(公告)号：US20090188325A1

    公开(公告)日：2009-07-30

    申请号：US12393294

    申请日：2009-02-26

    申请人： Julia W. Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    发明人： Julia W. Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    IPC分类号： G01L1/14

    CPC分类号： G01L1/148

    摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.

    摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。

    MEMS Capacitive Bending and Axial Strain Sensor
    8.
    发明申请
    MEMS Capacitive Bending and Axial Strain Sensor 有权
    MEMS电容弯曲和轴向应变传感器

    公开(公告)号：US20070256502A1

    公开(公告)日：2007-11-08

    申请号：US11552547

    申请日：2006-10-25

    申请人： Julia Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    发明人： Julia Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    IPC分类号： G01N3/00

    CPC分类号： G01L1/148

    摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.

    摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。

    MEMS capacitive bending and axial strain sensor
    10.
    发明授权
    MEMS capacitive bending and axial strain sensor 有权
    MEMS电容弯曲和轴向应变传感器

    公开(公告)号：US07854174B2

    公开(公告)日：2010-12-21

    申请号：US12393294

    申请日：2009-02-26

    申请人： Julia W. Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    发明人： Julia W. Aebersold ,  Kevin Walsh ,  Mark Crain ,  Michael Voor

    IPC分类号： G01L1/14

    CPC分类号： G01L1/148

    摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.

    摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。