公开(公告)号：US20110284981A1

公开(公告)日：2011-11-24

申请号：US13133940

申请日：2009-11-04

申请人： Ki Soo Chang ,  Geon Hee Kim ,  Sun Cheol Yang ,  Ilyo Sik Kim

发明人： Ki Soo Chang ,  Geon Hee Kim ,  Sun Cheol Yang ,  Ilyo Sik Kim

IPC分类号： H01L31/0232

CPC分类号： H01L31/0232 ,  B29D11/00365 ,  B29D11/00807 ,  H01L27/14627 ,  H01L27/14685 ,  H01L31/02327 ,  H01L31/18

摘要： The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention includes gradually increasing the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and making the oxidation rate of the region adjacent to the substrate slower and the oxidation rate of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.

摘要翻译： 本发明涉及一种包括微透镜阵列的图像传感器及其制造方法。 本发明的方法包括逐渐增加化合物半导体的铝组成比，随着后者从衬底逐渐变得越远，以使微透镜形成层生长，并且使与邻近衬底的区域的氧化速率变慢 并且距离衬底更远的区域的氧化速率更快，使氧化区域和未氧化区域之间的界面在氧化完成后成为透镜形状。 这样制成的镜头被集成到图像传感器中。 本发明降低了其中集成微透镜的图像传感器的制造成本，增加了图像传感器的信噪比和分辨率，并且实现了改进的灵敏度。