公开(公告)号：US20250144677A1

公开(公告)日：2025-05-08

申请号：US19017085

申请日：2025-01-10

Applicant: Kioxia Corporation

Inventor： Minako INUKAI ,  Hideaki SAKURAI ,  Kyo OTSUBO ,  Tetsuo TAKEMOTO

IPC: B08B7/00 ,  H01L21/02 ,  H01L21/67

Abstract: According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.

公开(公告)号：US20230260780A1

公开(公告)日：2023-08-17

申请号：US18296816

申请日：2023-04-06

Applicant: Kioxia Corporation

Inventor： Minako INUKAI ,  Hideaki SAKURAI ,  Kyo OTSUBO ,  Tetsuo TAKEMOTO

IPC: H01L21/02 ,  B08B3/04 ,  B08B3/08 ,  B08B3/12 ,  B08B7/00 ,  H01L21/67 ,  H01L21/66

CPC classification number: H01L21/02101 ,  B08B3/08 ,  B08B3/041 ,  B08B3/123 ,  B08B7/0014 ,  H01L21/67051 ,  H01L21/67248 ,  H01L22/12 ,  H01L21/02082

Abstract: According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.