公开(公告)号：US20240210334A1

公开(公告)日：2024-06-27

申请号：US18600451

申请日：2024-03-08

Applicant: Kioxia Corporation

Inventor： Yuki ABE ,  Akira HAMAGUCHI ,  Takaki HASHIMOTO ,  Kazuhiro NOJIMA ,  Kaori FUMITA

IPC: G01N23/201 ,  G01N21/47 ,  G01N21/95 ,  G01N23/207

CPC classification number: G01N23/201 ,  G01N21/4788 ,  G01N21/9501 ,  G01N23/207

Abstract: A measurement device includes: an X-ray irradiation section; an X-ray detection section configured to detect scattered X-rays generated from an object; and an analysis section configured to analyze diffraction images obtained through photoelectric conversion of the scattered X-rays and estimate a three-dimensional shape of the object. A recessed portion is formed in a first film from an opening portion in a second film formed on the first film. The analysis section estimates a three-dimensional shape of the object on the basis of the diffraction images acquired while an irradiation angle of the X-rays with respect to the object is changed and shape data obtained by measuring the object in advance. The shape data include a film thickness of the second film, a neck diameter, and a bottom diameter.