公开(公告)号：US06588268B1

公开(公告)日：2003-07-08

申请号：US09554917

申请日：2000-05-22

申请人： Kiyoshi Yamagishi ,  Toshiaki Kawanishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Atsushi Koike

发明人： Kiyoshi Yamagishi ,  Toshiaki Kawanishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Atsushi Koike

IPC分类号： G01F168

CPC分类号： G01F1/69 ,  G01F1/68 ,  G01F1/692 ,  G01F1/699

摘要： A flow rate sensor for performing a flow rate detection of fluid with high accuracy without suffering adverse effect of the environmental temperature condition even when the fluid is viscous fluid having relatively high viscosity or the flow rate is relatively small is provided. The flow rate sensor includes a flow rate detector having a heating function and a temperature sensing function, and a pipe line for fluid to be detected which is formed so that heat from the flow rate detector is transferred to and absorbed by the fluid. The temperature sensing which is affected by a heat absorption effect of the fluid due to the heat is executed in the flow rate detector, and the flow rate of the fluid in the pipe line is detected on the basis of the temperature sensing result. Unit retaining portions formed on a casing in which the pipe line is formed, the unit retaining portions being disposed adjacent to the pipe line. A flow rate detecting unit comprising the flow rate detector is retained by the unit retaining portion, and a temperature detecting unit comprising a fluid temperature detector is retained by the unit retaining portion.

摘要翻译： 提供了一种流量传感器，用于即使当流体是具有相对高的粘度或流量相对较小的粘性流体时，也能够高精度地进行流体的流量检测而不会受到环境温度条件的不利影响。 流量传感器包括具有加热功能和温度检测功能的流量检测器，以及形成为使得来自流量检测器的热量被传送到流体并被流体吸收的被检测流体的管线。 在流量检测器中执行受流体的热吸收效应影响的温度感测，并且基于温度感测结果来检测管路中的流体的流量。 形成在其上形成有管线的壳体上的单元保持部分，单元保持部分邻近管道设置。 包括流量检测器的流量检测单元由单元保持部保持，并且包括流体温度检测器的温度检测单元由单元保持部保持。

公开(公告)号：US06647777B1

公开(公告)日：2003-11-18

申请号：US09529594

申请日：2000-04-13

申请人： Hirofumi Kotaka ,  Atsushi Koike ,  Kiyoshi Yamagishi ,  Toshiaki Kawanishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Yukihiro Tochio ,  Hiromitsu Miyajima

发明人： Hirofumi Kotaka ,  Atsushi Koike ,  Kiyoshi Yamagishi ,  Toshiaki Kawanishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Yukihiro Tochio ,  Hiromitsu Miyajima

IPC分类号： G01F168

CPC分类号： G01F1/696 ,  F23D11/28 ,  F23K5/04 ,  F23K2900/05001 ,  F23N5/184 ,  F23N2005/185 ,  F23N2039/06 ,  G01F1/692 ,  G01F1/6965

摘要： A pipe line for fluid to be detected is formed so that heat from a flow rate detector in which a thin-film heating element and a thin-film temperature sensing element are laminated on a first surface of a substrate through an insulating layer is transferred to and absorbed by the fluid. In the flow rate detector, the temperature sensing which is affected by the heat absorption of the fluid due to the heating of the thin-film heating element is executed by the thin-film temperature sensing element, and the flow rate of the fluid in the pipe line is detected on the basis of the temperature sensing result. A fin plate extending into the pipe line is joined to a second surface of the substrate of the flow rate detector by a joint member, and the fin plate extends so as to pass through the central portion on the circular section of the pipe line. The dimension of the fin plate in the direction of the pipe line is larger than the dimension L2 of the thickness. Accordingly, even when the fluid is viscous fluid having relatively high viscosity, and further even when the flow rate is relatively small or under a broad environmental temperature condition, the flow rate of the fluid-flowing in the pipe line can be accurately measured.

摘要翻译： 形成用于待检测流体的管线，使得来自其中通过绝缘层将薄膜加热元件和薄膜温度感测元件层压在基板的第一表面上的流量检测器的热量转移到 并被流体吸收。 在流量检测器中，由于薄膜加热元件的加热而受到流体的吸热影响的温度感测由薄膜温度检测元件执行，并且流体在 根据温度检测结果检测出管路。 延伸到管线的翅片板通过接头构件连接到流量检测器的基板的第二表面，并且翅片板延伸以穿过管线的圆形部分上的中心部分。 翅片在管线方向的尺寸大于厚度的尺寸L2。 因此，即使当流体是具有相对高粘度的粘性流体，并且即使当流量相对较小或在宽的环境温度条件下，也可以精确地测量流体在管路中的流量。

公开(公告)号：US07377185B2

公开(公告)日：2008-05-27

申请号：US10564331

申请日：2004-07-09

申请人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

发明人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

IPC分类号： G01F1/708

CPC分类号： G01F1/6842 ,  G01F1/6965 ,  G01F5/00 ,  G01F7/00

摘要： A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that: by using a flow rate/liquid type detecting apparatus comprising a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid to be detected and the detection of the concentration of the fluid to be detected, an auxiliary passage opening/closing valve is closed, and the fluid to be detected is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid to be detected, the auxiliary passage opening/closing valve is opened to allow the fluid to be detected to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.

摘要翻译： 一种流量/液体型检测方法，用于检测流体的流速，同时检测流体的类型和流体的浓度中的任一种或两者，其特征在于：通过使用流量 液体型检测装置，包括被检测流体流过的主通路，从主通道分支的辅助通道和设置在辅助通路中的流量/液体型检测传感器装置，并且进行任何 要检测的流体的类型的检测和要检测的流体的浓度的检测中的一个或两个，辅助通道打开/关闭阀关闭，并且允许待检测的流体暂时停留在内部 流量/液体型检测传感器装置进行液体检测和浓度检测中的任一种或两者，并且在检测待检测流体的流量时，辅助通过 打开开闭阀，使流体被检测流入流量/液体型检测传感器装置，以检测流量。

公开(公告)号：US20060213263A1

公开(公告)日：2006-09-28

申请号：US10564331

申请日：2004-07-09

申请人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-Ichi Inoue

发明人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-Ichi Inoue

IPC分类号： G01F1/68

CPC分类号： G01F1/6842 ,  G01F1/6965 ,  G01F5/00 ,  G01F7/00

摘要： A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that: by using a flow rate/liquid type detecting apparatus comprising; a main passage through which a fluid to be detected flows, an auxiliary passage branched from said main passage, and a flow rate/liquid type detecting sensor device provided in said auxiliary passage, is provided, and in conducting any one of or both the detection of the type of said fluid to be detected and the detection of the concentration of said fluid to be detected, said auxiliary passage opening/closing valve is closed, and said fluid to be detected is allowed to temporarily stay within said flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid to be detected, said auxiliary passage opening/closing valve is opened to allow the fluid to be detected to flow into said flow rate/liquid type detecting sensor device to detect the flow rate.

摘要翻译： 一种流量/液体型检测方法，用于检测流体的流速，同时检测流体的类型和流体的浓度中的任一种或两者，其特征在于：通过使用流量 液体检测装置， 待检测流体流过的主通道，从所述主通道分支的辅助通道，以及设置在所述辅助通道中的流量/液体型检测传感器装置，并且进行检测中的任一个或两者 所述待检测流体的类型和检测到的所述待检测流体的浓度的检测，所述辅助通道打开/关闭阀关闭，并且所述被检测流体被允许暂时保持在所述流量/液体类型内 检测传感器装置进行液体类型的检测和浓度检测中的任一种或两者，并且在检测待检测流体的流量时，打开所述辅助通道打开/关闭阀，以允许流体 被检测流入所述流量/液体型检测传感器装置以检测流量。

公开(公告)号：US07647844B2

公开(公告)日：2010-01-19

申请号：US11956650

申请日：2007-12-14

申请人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

发明人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

IPC分类号： G01F1/708 ,  G01F1/68

CPC分类号： G01F1/6842 ,  G01F1/684 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/6986 ,  G01F5/00 ,  G01N25/18

摘要： A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that, by using a flow rate/liquid type detecting apparatus comprising: a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid and the detection of the concentration of the fluid, the auxiliary passage opening/closing valve is closed, and the fluid is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid detected, the auxiliary passage opening/closing valve is opened to allow the fluid to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.

摘要翻译： 一种流量/液体型检测方法，用于检测流体的流量，同时检测流体的类型和流体的浓度中的任何一种或两者，其特征在于，通过使用流量 液体型检测装置，包括：被检测流体流过的主通路，从主通道分支的辅助通道，以及设置在辅助通路中的流量/液体型检测传感器装置，并且在导通 流体类型的检测和流体浓度的检测中的任何一个或两者关闭，辅助通道开闭阀被关闭，并且允许流体暂时停留在流量/液体型检测传感器内 用于进行液体类型的检测和浓度检测中的任何一种或两者的装置，并且在检测检测到的流体的流量时，打开辅助通道打开/关闭阀，以允许 流体流入流量/液体型检测传感器装置以检测流量。

公开(公告)号：US20090000396A1

公开(公告)日：2009-01-01

申请号：US11956650

申请日：2007-12-14

申请人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

发明人： Toshiaki Kawanishi ,  Takayuki Takahata ,  Kenji Tomonari ,  Kiyoshi Yamagishi ,  Atsushi Koike ,  Akiko Kubota ,  Shin-ichi Inoue

IPC分类号： G01F1/708

CPC分类号： G01F1/6842 ,  G01F1/684 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/6986 ,  G01F5/00 ,  G01N25/18

摘要： A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that, by using a flow rate/liquid type detecting apparatus comprising: a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid and the detection of the concentration of the fluid, the auxiliary passage opening/closing valve is closed, and the fluid is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid detected, the auxiliary passage opening/closing valve is opened to allow the fluid to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.

摘要翻译： 一种流量/液体型检测方法，用于检测流体的流量，同时检测流体的类型和流体的浓度中的任何一种或两者，其特征在于，通过使用流量 液体型检测装置，包括：被检测流体流过的主通路，从主通道分支的辅助通道，以及设置在辅助通路中的流量/液体型检测传感器装置，并且在导通 流体类型的检测和流体浓度的检测中的任何一个或两者关闭，辅助通道开闭阀被关闭，并且允许流体暂时停留在流量/液体型检测传感器内 用于进行液体类型的检测和浓度检测中的任何一种或两者的装置，并且在检测检测到的流体的流量时，打开辅助通道打开/关闭阀，以允许 流体流入流量/液体型检测传感器装置以检测流量。

公开(公告)号：US06672154B1

公开(公告)日：2004-01-06

申请号：US10019620

申请日：2001-12-20

申请人： Kiyoshi Yamagishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Takayuki Takahata

发明人： Kiyoshi Yamagishi ,  Kenji Tomonari ,  Shinichi Inoue ,  Takayuki Takahata

IPC分类号： G01F168

CPC分类号： G01F1/6965 ,  G01F1/684

摘要： A flow rate detector (5) including a heater and a temperature sensor is connected to a thermal conductor (6), and a fluid temperature detector (9) including a temperature sensor is connected to a thermal conductor (10). A housing (2) encloses the flow rate detector (5), the fluid temperature detector (9) and parts of thermal conductors (6, 10). The housing (2) also encloses a memory (1) that stores individual information of a flow rate sensor unit used for determining flow rates by using signals from a detector circuit containing the heater, the temperature sensor of the flow rate detector and the temperature sensor of the fluid temperature detector. The flow rate detector (5), the fluid temperature detector (9) and the memory (1) are connected to a plurality of leads (4) in the housing (2). The housing (2) is connected to a fluid channel (13), into which the thermal conductors (6, 10) extended. The flow rate sensor unit reduces the difference in measurment between the different sensor units.

摘要翻译： 包括加热器和温度传感器的流量检测器（5）连接到热导体（6），并且包括温度传感器的流体温度检测器（9）连接到热导体（10）。 壳体（2）包围流量检测器（5），流体温度检测器（9）和部分热导体（6,10）。 壳体（2）还包含存储器（1），其存储用于通过使用来自包含加热器的检测器电路，流量检测器的温度传感器和温度传感器的信号来确定流量的流量传感器单元的单独信息 的流体温度检测器。 流量检测器（5），流体温度检测器（9）和存储器（1）连接到壳体（2）中的多个引线（4）。 壳体（2）连接到热导体（6,10）延伸到的流体通道（13）中。 流量传感器单元减少不同传感器单元之间的测量差异。

公开(公告)号：US07934868B2

公开(公告)日：2011-05-03

申请号：US11632366

申请日：2005-06-28

申请人： Akiko Kubota ,  Kenji Tomonari ,  Toshiaki Kawanishi

发明人： Akiko Kubota ,  Kenji Tomonari ,  Toshiaki Kawanishi

IPC分类号： G01K17/20 ,  G01N25/00 ,  G01N25/28 ,  G01N25/40

CPC分类号： G01N27/18 ,  B01D53/56 ,  B01D2251/2067 ,  B01D2257/404 ,  F01N2610/02 ,  G01F1/6842 ,  G01F1/692 ,  G01F1/699 ,  G01N25/18

摘要： A thermal sensor in which, when an object to be measured is a water-based liquid, attachment of air bubbles to the external surface of the sensor is reduced to improve measurement accuracy. The thermal sensor has a sensing element (21a) including a heat producing body and a temperature sensing body, a resin mold (23) for sealing the sensing element (21a), and a heat transmission member (21c) for transmitting heat between the sensing element (21a) and a water-based object to be measured. A part of the heat transmission member (21c) is exposed from the resin mold (23) to form an exposed surface section. A hydrophilic film (50) formed of a silicon oxide film is applied to the exposed surface section and to that part of the surface of the resin mold which is positioned around the exposed surface section.

摘要翻译： 一种热传感器，其中当待测物体是水基液体时，气泡附着到传感器的外表面被降低以提高测量精度。 热传感器具有包括发热体和温度检测体的传感元件（21a），用于密封传感元件（21a）的树脂模具（23）和用于在传感器之间传递热量的传热部件 元件（21a）和待测量的水基物体。 传热部件（21c）的一部分从树脂模具（23）露出，形成露出面部。 将由氧化硅膜形成的亲水膜（50）施加到暴露的表面部分和位于暴露表面部分周围的树脂模具的表面的那部分。

公开(公告)号：US20070237206A1

公开(公告)日：2007-10-11

申请号：US11632366

申请日：2005-06-28

申请人： Akiko Kubota ,  Kenji Tomonari ,  Toshiaki Kawanishi

发明人： Akiko Kubota ,  Kenji Tomonari ,  Toshiaki Kawanishi

IPC分类号： G01K1/08 ,  G01K7/00 ,  G01N33/48

CPC分类号： G01N27/18 ,  B01D53/56 ,  B01D2251/2067 ,  B01D2257/404 ,  F01N2610/02 ,  G01F1/6842 ,  G01F1/692 ,  G01F1/699 ,  G01N25/18

摘要： A thermal sensor in which, when an object to be measured is a water-based liquid, attachment of air bubbles to the external surface of the sensor is reduced to improve measurement accuracy. The thermal sensor has a sensing element (21a) including a heat producing body and a temperature sensing body, a resin mold (23) for sealing the sensing element (21a), and a heat transmission member (21c) for transmitting heat between the sensing element (21a) and a water-based object to be measured. A part of the heat transmission member (21c) is exposed from the resin mold (23) to form an exposed surface section. A hydrophilic film (50) formed of a silicon oxide film is applied to the exposed surface section and to that part of the surface of the resin mold which is positioned around the exposed surface section.

摘要翻译： 一种热传感器，其中当待测物体是水基液体时，气泡附着到传感器的外表面被降低以提高测量精度。 热传感器具有包括发热体和感温体的检测元件（21a），用于密封感测元件（21a）的树脂模具（23）和用于传递热量的传热构件（21c） 在传感元件（21a）和待测量的水基物体之间。 传热部件（21c）的一部分从树脂模具（23）露出，形成暴露的表面部分。 将由氧化硅膜形成的亲水膜（50）施加到暴露的表面部分和位于暴露表面部分周围的树脂模具的表面的那部分。

公开(公告)号：US20090174520A1

公开(公告)日：2009-07-09

申请号：US12278682

申请日：2007-02-09

申请人： Mitsuhiro Wada ,  Makoto Ikeda ,  Kenji Tomonari ,  Shinichi Inoue ,  Hideshi Sekimori

发明人： Mitsuhiro Wada ,  Makoto Ikeda ,  Kenji Tomonari ,  Shinichi Inoue ,  Hideshi Sekimori

IPC分类号： H01C7/00 ,  C23C14/34 ,  B32B37/00

CPC分类号： G01K7/183 ,  H01C7/006 ,  H01C17/075 ,  Y10T156/10

摘要： A laminate includes an insulating substrate, and a temperature-sensitive resistor made of crystals of a metal based on a platinum group element and laminated on the insulating substrate; and has a percentage of (111) planes of crystals oriented at 10° or less from the normal direction (ND direction) in a layer of the temperature-sensitive resistor being 90% or more. By controlling the orientation of crystals forming the temperature-sensitive resistor, laminates suitable as a thin-film sensor, thin-film sensors including the laminate, thin-film sensor modules including the thin-film sensor, and methods for producing the thin-film sensors are provided.

摘要翻译： 层压体包括绝缘基板和由基于铂族元素的金属晶体制成并层压在绝缘基板上的温度敏感电阻器; 并且在温度敏感电阻器的层中具有从法线方向（ND方向）的10°以下的（111）晶面的百分比为90％以上。 通过控制形成温敏电阻的晶体的取向，适合作为薄膜传感器的层叠体，包括层压体的薄膜传感器，包括薄膜传感器的薄膜传感器模块以及薄膜传感器的制造方法 提供传感器。