公开(公告)号：US20100008564A1

公开(公告)日：2010-01-14

申请号：US12564567

申请日：2009-09-22

申请人： Koichi HAYAKAWA ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

发明人： Koichi HAYAKAWA ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

摘要翻译： 图案检查装置具有不同的单元比较间距的多个单元区域A和B的设置单元，并且根据设置单元的设置检查不同单元比较间距的多个单元区域。 作为用于从图像存储器读出检查图像和参考图像的图像数据的信息，除了缺陷图像的位置信息之外，还可以显示小区比较或者模具比较的标识信息以及参考图像的相对位置信息 被设置。 该设备还具有用于在每个检查区域设置多个检查阈值的单元，并且通过多个检查阈值检查多个检查区域。

公开(公告)号：US08036447B2

公开(公告)日：2011-10-11

申请号：US12564567

申请日：2009-09-22

申请人： Koichi Hayakawa ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

发明人： Koichi Hayakawa ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

摘要翻译： 图案检查装置具有不同的单元比较间距的多个单元区域A和B的设置单元，并且根据设置单元的设置来检查不同单元比较间距的多个单元区域。 作为用于从图像存储器读出检查图像和参考图像的图像数据的信息，除了缺陷图像的位置信息之外，还可以显示小区比较或者模具比较的标识信息以及参考图像的相对位置信息 被设置。 该设备还具有用于在每个检查区域设置多个检查阈值的单元，并且通过多个检查阈值检查多个检查区域。

公开(公告)号：US20060171593A1

公开(公告)日：2006-08-03

申请号：US11344101

申请日：2006-02-01

申请人： Koichi Hayakawa ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

发明人： Koichi Hayakawa ,  Hiroshi Miyai ,  Masaaki Nojiri ,  Michio Nakano ,  Takako Fujisawa ,  Dai Fujii

IPC分类号： G06K9/62 ,  G06K9/64 ,  G06K9/68

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

摘要翻译： 图案检查装置具有不同的单元比较间距的多个单元区域A和B的设置单元，并且根据设置单元的设置检查不同单元比较间距的多个单元区域。 作为用于从图像存储器读出检查图像和参考图像的图像数据的信息，除了缺陷图像的位置信息之外，还可以显示小区比较或者模具比较的标识信息以及参考图像的相对位置信息 被设置。 该设备还具有用于在每个检查区域设置多个检查阈值的单元，并且通过多个检查阈值检查多个检查区域。

公开(公告)号：US08421010B2

公开(公告)日：2013-04-16

申请号：US13061031

申请日：2009-08-28

申请人： Takashi Hiroi ,  Yasuhiro Gunji ,  Hiroshi Miyai ,  Masaaki Nojiri

发明人： Takashi Hiroi ,  Yasuhiro Gunji ,  Hiroshi Miyai ,  Masaaki Nojiri

IPC分类号： A61N5/00 ,  G21K5/04

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/20285 ,  H01J2237/2817

摘要： There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate inspection device is such that a substrate having a circuit pattern is irradiated with a primary charged particle beam, the substrate is moved at a constant speed or at an increasing or a decreasing speed, a position resulting from the movement is monitored, the position of irradiation with the primary charged particle beam is controlled according to the coordinates of the substrate, an image in a partial region on the substrate is captured at a speed lower than the velocity of the movement, a defect candidate is detected based on the captured image, and the detected defect candidate is displayed in a map format.

摘要翻译： 提供了一种使用带电粒子束的衬底检查装置，并且能够比以前更快地提取缺陷候选物。 基板检查装置的结构使得具有电路图案的基板被初级带电粒子束照射，基板以恒定速度或增加或降低的速度移动，监视由运动产生的位置 ，根据基板的坐标来控制与初级带电粒子束的照射位置，以低于移动速度的速度捕获基板上的部分区域中的图像，基于 捕获的图像和检测到的缺陷候选以地图格式显示。

公开(公告)号：US20110163230A1

公开(公告)日：2011-07-07

申请号：US13061031

申请日：2009-08-28

申请人： Takashi Hiroi ,  Yasuhiro Gunji ,  Hiroshi Miyai ,  Masaaki Nojiri

发明人： Takashi Hiroi ,  Yasuhiro Gunji ,  Hiroshi Miyai ,  Masaaki Nojiri

IPC分类号： G01N23/04

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/20285 ,  H01J2237/2817

摘要： There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate inspection device is such that a substrate having a circuit pattern is irradiated with a primary charged particle beam, the substrate is moved at a constant speed or at an increasing or a decreasing speed, a position resulting from the movement is monitored, the position of irradiation with the primary charged particle beam is controlled according to the coordinates of the substrate, an image in a partial region on the substrate is captured at a speed lower than the velocity of the movement, a defect candidate is detected based on the captured image, and the detected defect candidate is displayed in a map format.

摘要翻译： 提供了一种使用带电粒子束的衬底检查装置，并且能够比以前更快地提取缺陷候选物。 基板检查装置的结构使得具有电路图案的基板被初级带电粒子束照射，基板以恒定速度或增加或降低的速度移动，监视由运动产生的位置 ，根据基板的坐标来控制与初级带电粒子束的照射位置，以低于移动速度的速度捕获基板上的部分区域中的图像，基于 捕获的图像和检测到的缺陷候选以地图格式显示。

公开(公告)号：US20080099675A1

公开(公告)日：2008-05-01

申请号：US11976965

申请日：2007-10-30

申请人： Takashi Hiroi ,  Hiroshi Miyai ,  Hirokazu Ito ,  Michio Nakano

发明人： Takashi Hiroi ,  Hiroshi Miyai ,  Hirokazu Ito ,  Michio Nakano

IPC分类号： G21K5/04

CPC分类号： G06T7/001 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J2237/2817

摘要： An inspection apparatus includes an irradiation optical system for irradiating an inspection target with an electron beam, a scanning unit for scanning an irradiation position in the X direction and the Y direction, an electrification control electrode for controlling secondary electrons or reflected electrons generated on the inspection target by the irradiation with the electron beam, a sensor for detecting the secondary electrons or the reflected electrons, an A/D converter for sequentially converting the signals into digital image signals from an irradiation start point-in-time of the electron beam, an addition circuit for creating a detection image by adding the digital image signals from a first set point-in-time to a second set point-in-time on each pixel basis, and an image processing circuit for judging a defect by comparing the detection image with a reference image of a circuit pattern formed on the inspection target.

摘要翻译： 一种检查装置，包括：用于用电子束照射检查对象的照射光学系统，用于扫描X方向和Y方向的照射位置的扫描单元，用于控制在检查中产生的二次电子或反射电子的带电控制电极 通过用电子束照射的目标，用于检测二次电子或反射电子的传感器，用于从电子束的照射开始时间点将信号顺序地转换成数字图像信号的A / D转换器， 用于通过在每个像素的基础上将来自第一设定时刻的数字图像信号与第二设定时间点相加来创建检测图像的加法电路，以及用于通过比较检测图像来判断缺陷的图像处理电路 具有形成在检查对象上的电路图案的参照图像。

公开(公告)号：US20120262556A1

公开(公告)日：2012-10-18

申请号：US13531929

申请日：2012-06-25

申请人： Yasuhiro KUWAHARA ,  Masahiro Kawashima ,  Hiroshi Miyai

发明人： Yasuhiro KUWAHARA ,  Masahiro Kawashima ,  Hiroshi Miyai

IPC分类号： H04N13/04

CPC分类号： H04N17/04 ,  H04N13/144 ,  H04N13/207 ,  H04N13/324 ,  H04N13/327

摘要： The instant application describes a method for detecting crosstalk on a display surface compartmentalized into display regions by image patterns that are contained in an input image signal to a display device. The method includes steps of: displaying a first image and a second image on a display surface, the first image including first pattern images having main regions depicted with different brightness from each other and the second image including second pattern images having the main regions and sub regions depicted with different brightness from the main regions; taking an image of the display surface to obtain image data; and comparing at least one of the first and second images with the image data to detect the crosstalk. The first and second pattern images are displayed in a center region at a center of the display surface and adjacent regions adjacent to the center region.

摘要翻译： 本申请描述了一种用于通过包含在输入图像信号中的显示装置的图像图案来检测在显示区域上划分为显示区域的串扰的方法。 该方法包括以下步骤：在显示表面上显示第一图像和第二图像，第一图像包括具有彼此不同亮度的不同亮度的主区域的第一图案图像，第二图像包括具有主区域和子区域的第二图案图像 以与主要区域不同的亮度描绘的区域; 拍摄显示表面的图像以获得图像数据; 以及将所述第一和第二图像中的至少一个与所述图像数据进行比较以检测所述串扰。 第一和第二图案图像显示在显示表面的中心和邻近中心区域的邻近区域的中心区域中。

公开(公告)号：US20110234777A1

公开(公告)日：2011-09-29

申请号：US13132037

申请日：2010-11-01

申请人： Takahiro Kobayashi ,  Hiroshi Miyai ,  Seiji Hamada ,  Katsuo Saigo ,  Yoshio Umeda

发明人： Takahiro Kobayashi ,  Hiroshi Miyai ,  Seiji Hamada ,  Katsuo Saigo ,  Yoshio Umeda

IPC分类号： H04N13/04

CPC分类号： G02B27/2264 ,  H04N13/341 ,  H04N13/398

摘要： A stereoscopic display apparatus and a stereoscopic display system capable of reducing flicker due to the influence of a fluorescent lamp while preventing an increase in crosstalk. The stereoscopic display apparatus includes a display controller that causes a display section to display left-eye video and right-eye video based on an input left-eye video signal and right-eye video signal and a shutter control section that controls an open/closed state of left and right shutters of stereoscopic image observation glasses in an opening/closing cycle in accordance with a display cycle of the left-eye video and the right-eye video, wherein the shutter control section controls a duty ratio of an Open period of each of the left and right shutters to a greater value than 50% and the display controller causes the display section to display video on a side whose shutter is in the open state of the left-eye video and the right-eye video only while the shutter control section exercises control so that one of the left and right shutters is in the closed state.

摘要翻译： 一种立体显示装置和立体显示系统，能够在防止串扰增加的同时降低由于荧光灯的影响引起的闪烁。 立体显示装置包括显示控制器，其使得显示部分基于输入的左眼视频信号和右眼视频信号显示左眼视频和右眼视频;以及快门控制部分，其控制打开/关闭 根据左眼视频和右眼视频的显示周期，在开/关周期中的立体图像观察眼镜的左右快门的状态，其中，快门控制部分控制开窗周期的占空比 左和右快门中的每一个都具有比50％更大的值，并且显示控制器使得显示部分在仅在左眼视频和右眼视频的打开状态的一侧上显示视频，而 快门控制部分执行控制，使得左和右快门之一处于关闭状态。

公开(公告)号：US07855363B2

公开(公告)日：2010-12-21

申请号：US12222606

申请日：2008-08-12

申请人： Hiroshi Miyai ,  Ryuichi Funatsu ,  Taku Ninomiya ,  Yasuhiko Nara

发明人： Hiroshi Miyai ,  Ryuichi Funatsu ,  Taku Ninomiya ,  Yasuhiko Nara

IPC分类号： G01N23/225

CPC分类号： H01J37/28 ,  H01J37/265 ,  H01J2237/2817

摘要： An inspection method and apparatus irradiates a sample on which a pattern is formed with an electron beam, so that an inspection image and a reference image can be generated on the basis of a secondary electron or a reflected electron emitted by the sample. An abnormal pattern is determined based on a difference in halftone values of each pixel between the inspection image and the reference image. A plurality of feature quantities of the abnormal pattern are obtained from an image of the abnormal pattern, and, based on the distribution of the plurality of feature quantities of the abnormal pattern, a range for classifying the type of the abnormal pattern is designated. Thus, a desired defect can be extracted from many defects extracted by inspection.

摘要翻译： 检查方法和装置用电子束照射其上形成有图案的样品，使得可以基于样品发射的二次电子或反射电子产生检查图像和参考图像。 基于检查图像和参考图像之间的每个像素的半色调值的差异来确定异常图案。 从异常图案的图像获得异常图案的多个特征量，并且基于异常图案的多个特征量的分布，指定用于对异常图案的类型进行分类的范围。 因此，可以从通过检查提取的许多缺陷中提取期望的缺陷。

公开(公告)号：US07847805B2

公开(公告)日：2010-12-07

申请号：US10577373

申请日：2004-10-29

申请人： Masakazu Ogasawara ,  Akira Ueda ,  Hiroshi Miyai

发明人： Masakazu Ogasawara ,  Akira Ueda ,  Hiroshi Miyai

IPC分类号： G09G5/02

CPC分类号： G09G3/2003 ,  G09G3/2051 ,  G09G3/3607 ,  G09G5/02 ,  G09G2300/0452 ,  G09G2320/0242 ,  G09G2340/06 ,  H04N9/3114

摘要： A display apparatus, which makes one pixel displayable in four colors, that is, three primary colors and a white color, and inputs and displays chrominance signals corresponding to a mixing ratio of the four colors, includes a color correction instrument which performs first color correction of increasing the saturation of chrominance signals, and a second color correction of decreasing at least the saturation of the chrominance signals, when a predetermined color component exists in the chrominance signals corresponding to a pixel, selection instrument which switches temporally and selects either of first chrominance signals obtained by the first color correction, and second chrominance signals obtained by the second color correction, and a display instrument which displays the chrominance signals, which are selected, in the pixel.

摘要翻译： 一种显示装置，其使得一个像素可以四种颜色显示，即三原色和白色，并且输入和显示与四种颜色的混合比相对应的色度信号，包括执行第一颜色校正的颜色校正装置 增加色度信号的饱和度，以及当在与像素相对应的色度信号中存在预定颜色分量时，至少降低色度信号的饱和度的第二颜色校正，其在时间上切换并选择第一色度 通过第一颜色校正获得的信号和通过第二颜色校正获得的第二色度信号，以及在像素中显示被选择的色度信号的显示装置。