公开(公告)号：US07343801B2

公开(公告)日：2008-03-18

申请号：US10471296

申请日：2002-03-07

申请人： Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfred Weinacht

发明人： Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfred Weinacht

IPC分类号： G01P15/125

CPC分类号： F16N11/08 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0845 ,  G01P2015/0857 ,  G01P2015/086

摘要： A micromechanical capacitive acceleration sensor is described for picking up the acceleration of an object in at least one direction. The sensor includes a frame structure (110), a sensor inertia mass (101) made of a wafer and movably mounted relative to the frame structure (110) about a rotation axis, and a capacitive pick-up unit (120) for producing at least one capacitive output signal representing the position of the sensor mass (101) relative to the frame structure (110). The sensor inertia mass (101) has a center of gravity which offset relative to the rotation axis in a direction perpendicularly to a wafer plane for measuring accelerations laterally to the wafer plane. The sensor mass (101) and the frame structure (110) are made monolithically of one single crystal silicon wafer. A cover section (112) forms a common connector plane (150) for the connection of capacitor electrodes (125,126). Torqueable elements (105) form an electrically conducting bearing device for the sensor mass (101).

摘要翻译： 描述了一种微机电容加速度传感器，用于拾取至少一个方向的物体的加速度。 该传感器包括框架结构（110），由晶片制成的传感器惯性质量块（101），并围绕旋转轴线相对于框架结构（110）可移动地安装;以及电容式拾取单元（120） 表示传感器质量块（101）相对于框架结构（110）的位置的至少一个电容式输出信号。 传感器惯性质量（101）具有垂直于晶片平面的方向相对于旋转轴偏移的重心，用于测量横向于晶片平面的加速度。 传感器质量（101）和框架结构（110）由一个单晶硅晶片制成一体。 盖部分（112）形成用于连接电容器电极（125,126）的公共连接器平面（150）。 扭矩元件（105）形成用于传感器质量块（101）的导电轴承装置。

公开(公告)号：US6029497A

公开(公告)日：2000-02-29

申请号：US33069

申请日：1998-03-02

申请人： Gerald Brinks ,  Manfred Weinacht

发明人： Gerald Brinks ,  Manfred Weinacht

IPC分类号： G01P21/00 ,  G01D3/032 ,  G01P1/00 ,  G01P15/08 ,  G01P15/12

CPC分类号： G01D3/032 ,  G01P1/006 ,  G01P15/123

摘要： The invention concerns a process for driving a sensor with offset control. Such processes for driving are required, for example, to be used in acceleration transducers in motor vehicles for triggering, e.g., airbags or belt-tensioning devices. However, with existing processes the output nominal signal was repeatedly corrupted, e.g., by temperature-related interference signals, also known as the offset. In addition, existing systems are unreliable during turn-on. However, with the process according to this invention, the sign and the value of the difference between the output signal and a reference voltage is detected at a fixed or variable time pulse, with the sign changing the measuring voltage at the output and the difference value determining the clock frequency for this control process. Also, during turn-on a significantly increased clock frequency will be reduced in stages until the operating frequency is reached. The process according to this invention, therefore, allows reliable and low cost acceleration transducers to be realized.

摘要翻译： 本发明涉及用于驱动具有偏移控制的传感器的过程。 需要这种驱动方法，例如，用于机动车辆中的加速度传感器，用于触发例如安全气囊或皮带张紧装置。 然而，对于现有的处理，输出标称信号被重复地损坏，例如通过温度相关的干扰信号，也称为偏移。 此外，现有系统在开机时不可靠。 然而，根据本发明的方法，在固定或可变时间脉冲下检测输出信号和参考电压之间的差异的符号和值，其中符号改变输出端的测量电压和差值 确定此控制过程的时钟频率。 此外，在导通期间，显着增加的时钟频率将逐级降低，直到达到工作频率。 因此，根据本发明的方法允许实现可靠和低成本的加速换能器。

公开(公告)号：US5453638A

公开(公告)日：1995-09-26

申请号：US102146

申请日：1993-08-04

申请人： Dieter Nagele ,  Manfred Weinacht ,  Klaus Farber

发明人： Dieter Nagele ,  Manfred Weinacht ,  Klaus Farber

IPC分类号： H01L21/60 ,  G01P1/02 ,  G01P15/18 ,  H01L25/16 ,  H01L29/161 ,  H01L23/02 ,  H01L33/00

CPC分类号： G01P15/18 ,  G01P1/023 ,  H01L25/162 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/4823 ,  H01L2924/14 ,  H01L2924/16152

摘要： System for packaging integrated circuits, especially sensors, in a housing, which also comprises multicontact bondings, especially hybrid ICs for three-dimensional arrangement of modules, wherein sensors (4, 5) are arranged at an angle in relation to one another on the base plate or the substrate (1). The sensors are contained in the single housing together with contact pins (pins) (2), and are connected in one plane by automatic bonding.

摘要翻译： 用于在壳体中封装集成电路，特别是传感器的系统，其还包括多触点接合，特别是用于模块的三维布置的混合IC，其中传感器（4,5）在底座上彼此成角度地布置 板或基板（1）。 传感器与接触销（销）（2）一起包含在单个外壳中，并通过自动接合连接在一个平面中。

公开(公告)号：US5631421A

公开(公告)日：1997-05-20

申请号：US554825

申请日：1995-11-07

申请人： Thomas Ohgke ,  Dieter Nagele ,  Gerald Brinks ,  Manfred Weinacht ,  Viktor Tiederle

发明人： Thomas Ohgke ,  Dieter Nagele ,  Gerald Brinks ,  Manfred Weinacht ,  Viktor Tiederle

IPC分类号： G01P15/08 ,  G01P15/09

CPC分类号： G01P15/0922

摘要： A piezoelectric acceleration transducer characterized by a flexible element formed of a piezoelectric material with two external electrodes, a support member having two plate-type supporting components between which the flexible member is arranged, and a carrier plate to which the support member is mechanically and electrically connected such that the principal axis of sensitivity of the flexible element lies in the same plane as the carrier plate. The supporting components may be formed of a nonconducting material with a electrically conductive coating on the side facing the flexible element and at a point of contact with the carrier base. Alternatively, the supporting components may be made from an electrically conductive material.

摘要翻译： 一种压电加速度传感器，其特征在于由具有两个外部电极的压电材料形成的柔性元件，具有布置有柔性构件的两个板状支撑部件的支撑构件和支撑构件机械和电气 连接使得柔性元件的主要灵敏度轴位于与载板相同的平面中。 支撑部件可以由不导电材料形成，在面向柔性元件的一侧和与载体基体接触的点处具有导电涂层。 或者，支撑部件可以由导电材料制成。