公开(公告)号：US20170051393A1

公开(公告)日：2017-02-23

申请号：US15240253

申请日：2016-08-18

Applicant: Korea Institute of Science and Technology

Inventor： Seung Hee HAN ,  Se Hoon AN ,  Geun Hyuk LEE ,  In Seol SONG ,  Seong Woo JANG

IPC: C23C14/16 ,  C23C14/35 ,  H01J37/34 ,  C23C14/34

CPC classification number: C23C14/165 ,  C23C14/046 ,  C23C14/3485 ,  C23C14/35 ,  C23C14/351 ,  H01J37/32394 ,  H01J37/32669 ,  H01J37/3405 ,  H01J37/3423 ,  H01J37/3426 ,  H01J37/3467

Abstract: An apparatus and a method for coating an inner wall of a metal tube are provided. The apparatus for coating an inner wall of a metal tube includes mounting posts on which both end openings of a metal tube are mounted and configured to block the inside of the metal tube from the ambient air so that a pressure in the metal tube is adjustable by the vacuum exhaust and inflow of process gases, a sputtering target metal tube installed inside the metal tube coaxially with the metal tube, a pulse electromagnet installed around an outside perimeter of the metal tube coaxially with the metal tube to apply a pulse magnetic field in an axial direction of the metal tube, an electromagnetic pulse power supply unit configured to apply pulse power to the pulse electromagnet, and a sputtering pulse power supply unit configured to synchronize a negative high-voltage pulse with the pulse power applied to the pulse electromagnet and apply to the sputtering target metal tube.

Abstract translation: 提供一种用于涂覆金属管内壁的装置和方法。 用于涂覆金属管的内壁的装置包括安装柱，其上安装金属管的两个端部开口并且构造成将金属管的内部与周围空气阻挡，使得金属管中的压力可由 真空排气和工艺气体的流入，与金属管同轴地安装在金属管内的溅射靶金属管，安装在与金属管同轴的金属管的外周周围的脉冲电磁体，以将脉冲磁场施加到 所述电磁脉冲电源单元被配置为向所述脉冲电磁体施加脉冲电力;以及溅射脉冲电源单元，被配置为使负高压脉冲与施加到所述脉冲电磁体的脉冲功率同步并应用 到溅射靶金属管。