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公开(公告)号：US08591819B2
公开(公告)日：2013-11-26
申请号：US11987764
申请日：2007-12-04
申请人： Kotaro Kawamura , Hiroyuki Arai , Yasutaka Muroga
发明人： Kotaro Kawamura , Hiroyuki Arai , Yasutaka Muroga
IPC分类号： B01D50/00
CPC分类号： F23G7/065 , F23G5/24 , F23G2209/142 , F23M5/00
摘要： A combustion-type exhaust gas treatment apparatus is used to treat a harmful exhaust gas by combustion to render the gas harmless. The treatment apparatus includes a combustion treatment section, a cooling section, and a washing section. The combustion treatment section includes an exhaust-gas treatment combustor, a body made from metal and having a roughened inner surface, and a water-film formation mechanism adapted to form a water film on the inner surface of the body. The combustion treatment of the exhaust gas is performed in the body.
摘要翻译： 燃烧式废气处理装置用于通过燃烧来处理有害排气，使气体无害化。 处理装置包括燃烧处理部，冷却部和洗涤部。 燃烧处理部包括排气处理用燃烧器，金属制的体，内表面粗糙化的水膜形成机构，适于在主体的内表面形成水膜。 废气的燃烧处理在体内进行。
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公开(公告)号：US20080131334A1
公开(公告)日：2008-06-05
申请号：US11987764
申请日：2007-12-04
申请人： Kotaro Kawamura , Hiroyuki Arai , Yasutaka Muroga
发明人： Kotaro Kawamura , Hiroyuki Arai , Yasutaka Muroga
IPC分类号： B01D53/74
CPC分类号： F23G7/065 , F23G5/24 , F23G2209/142 , F23M5/00
摘要： A combustion-type exhaust gas treatment apparatus is used to treat a harmful exhaust gas by combustion to render the gas harmless. The present invention provides such a combustion-type exhaust gas treatment apparatus. This treatment apparatus includes a combustion treatment section, a cooling section, and a washing section. The combustion treatment section includes an exhaust-gas treatment combustor, a body made from metal and having a roughened inner surface, and a water-film formation mechanism adapted to form a water film on the inner surface of the body. The combustion treatment of the exhaust gas is performed in the body.
摘要翻译： 燃烧式废气处理装置用于通过燃烧来处理有害排气，使气体无害化。 本发明提供这种燃烧型废气处理装置。 该处理装置包括燃烧处理部，冷却部和洗涤部。 燃烧处理部包括排气处理用燃烧器，金属制的体，内表面粗糙化的水膜形成机构，适于在主体的内表面形成水膜。 废气的燃烧处理在体内进行。
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公开(公告)号：US07112060B2
公开(公告)日：2006-09-26
申请号：US10821980
申请日：2004-04-12
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于燃烧由半导体制造系统排出的废气，特别是含有SiH 4和沉积气体的卤素基气体 在高效率的破坏下，使SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全等级。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
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公开(公告)号：US06736635B1
公开(公告)日：2004-05-18
申请号：US10111382
申请日：2002-05-01
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
IPC分类号： F23G706
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于以高效率的破坏同时燃烧从半导体制造系统排出的废气，特别是含有SiH 4和卤素基气体的沉积气体， SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全水平。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
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公开(公告)号：US06948929B2
公开(公告)日：2005-09-27
申请号：US09962117
申请日：2001-09-26
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 燃烧式废气处理系统能够在使废气与辅助燃烧气体混合的结构有效地加热的同时，有效地分解危险的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US07607914B2
公开(公告)日：2009-10-27
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US20070160946A1
公开(公告)日：2007-07-12
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US20050271988A1
公开(公告)日：2005-12-08
申请号：US11206104
申请日：2005-08-18
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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