-
公开(公告)号：US20130171919A1
公开(公告)日：2013-07-04
申请号：US13813850
申请日：2011-07-25
IPC分类号： F24F7/00
CPC分类号： F24F7/00 , B01D53/005 , B01D53/78 , B01D2258/0216 , F04B37/14 , F04B49/06 , F04B2201/1201
摘要： An exhaust system (2) is used for evacuating a chamber of a manufacturing apparatus (1) for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells. The exhaust system (2) includes a vacuum pump apparatus (3) for evacuating the chamber, an exhaust gas treatment apparatus (5) for treating an exhaust gas discharged from the chamber, and a controller (6) for controlling the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5). Information of operation process of the manufacturing apparatus (1), and the kind of gas and the flow rate of the gas supplied to the manufacturing apparatus (1) is inputted into the controller (6) to control the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5).
摘要翻译： 排气系统（2）用于对用于制造半导体器件，液晶面板，LED或太阳能电池的制造设备（1）的室进行抽真空。 排气系统（2）包括用于抽空室的真空泵装置（3），用于处理从室排出的废气的废气处理装置（5），以及用于控制真空泵装置的控制器（6） 3）和/或废气处理装置（5）。 制造设备（1）的操作过程信息，以及供应给制造设备（1）的气体的种类和气体的流量被输入到控制器（6）中以控制真空泵设备（3）和 /或废气处理装置（5）。
-
公开(公告)号：US20070160946A1
公开(公告)日：2007-07-12
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US20050271988A1
公开(公告)日：2005-12-08
申请号：US11206104
申请日：2005-08-18
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US06797045B2
公开(公告)日：2004-09-28
申请号：US10290315
申请日：2002-11-08
申请人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
发明人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
IPC分类号： B01D4716
CPC分类号： B01D53/78 , B01D47/08 , B01D47/18 , B01D2257/204 , B01D2257/2066 , F23J15/022
摘要： A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.
摘要翻译： 一种洗涤器，包括具有排气入口和排气出口的壳体。 叶轮安装在壳体中，叶轮可以围绕其自身的轴线旋转。 可以通过壳体的废气入口将废气引入叶轮的中心。 清洁液体排放喷嘴位于叶轮的中心，用于将清洁液体喷射在叶轮中。 此外，挡板构件与叶轮间隔开并围绕叶轮。 排出的废气和离开叶轮的清洗液的混合物撞击挡板部件。 清洗液排出喷嘴设置在内部并刚性地连接到叶轮，以便与叶轮一起旋转。 喷嘴具有多个清洁液体排出孔，其径向延伸穿过其圆柱形壁，以将清洁液体排放到叶轮中。
-
公开(公告)号：US06682342B2
公开(公告)日：2004-01-27
申请号：US10284236
申请日：2002-10-31
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.
摘要翻译： 用于废气处理的燃烧器具有由周壁13围绕并被底壁14封闭的火焰稳定区15.火焰稳定区15设置成面向燃烧室11.用于辅助可燃气体的燃烧器端口23设置在 外周壁13将辅助可燃性气体B注入火焰稳定区15，以产生回旋流。 用于废气的燃烧器端口22设置在底壁14中，以将废气A注入到火焰稳定区15中。
-
公开(公告)号：US06796794B2
公开(公告)日：2004-09-28
申请号：US10214773
申请日：2002-08-09
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a gas into the flame stabilizing zone.
摘要翻译： 一种用于废气处理的燃烧器，具有由周壁包围并用底壁封闭的火焰稳定区。 火焰稳定区被设置为面对燃烧室。 用于辅助可燃气体的燃烧器端口设置在周壁中，以将辅助可燃气体喷射到火焰稳定区域中，以产生旋流。 用于废气的燃烧器端口设置在底壁中，以将气体注入到火焰稳定区域中。
-
公开(公告)号：US06494711B1
公开(公告)日：2002-12-17
申请号：US09509995
申请日：2000-04-05
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.
摘要翻译： 用于废气处理的燃烧器具有由周壁13围绕并被底壁14封闭的火焰稳定区15.火焰稳定区15设置成面对燃烧室11.用于辅助可燃气体的燃烧器端口23设置在 外周壁13将辅助可燃性气体B注入火焰稳定区15，以产生回旋流。 用于废气的燃烧器端口22设置在底壁14中，以将废气A注入到火焰稳定区15中。
-
公开(公告)号：US06948929B2
公开(公告)日：2005-09-27
申请号：US09962117
申请日：2001-09-26
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 燃烧式废气处理系统能够在使废气与辅助燃烧气体混合的结构有效地加热的同时，有效地分解危险的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
公开(公告)号：US09625168B2
公开(公告)日：2017-04-18
申请号：US13813850
申请日：2011-07-25
IPC分类号： F24F7/00 , F04B37/16 , B01D53/46 , F04B49/10 , H01L21/205 , F04B51/00 , G01M13/00 , B01D53/00 , F04B37/14 , F04B49/06 , B01D53/78
CPC分类号： F24F7/00 , B01D53/005 , B01D53/78 , B01D2258/0216 , F04B37/14 , F04B49/06 , F04B2201/1201
摘要： An exhaust system (2) is used for evacuating a chamber of a manufacturing apparatus (1) for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells. The exhaust system (2) includes a vacuum pump apparatus (3) for evacuating the chamber, an exhaust gas treatment apparatus (5) for treating an exhaust gas discharged from the chamber, and a controller (6) for controlling the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5). Information of operation process of the manufacturing apparatus (1), and the kind of gas and the flow rate of the gas supplied to the manufacturing apparatus (1) is inputted into the controller (6) to control the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5).
-
公开(公告)号：US07607914B2
公开(公告)日：2009-10-27
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
-
-
-
-
-
-
-
-
-
搜索结果
11 条记录 (耗时 0.016 秒)
