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1.发明申请Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system 有权照明光学系统，曝光装置，装置制造方法，补偿滤光片和曝光光学系统公开(公告)号：US20090284727A1
公开(公告)日：2009-11-19
申请号：US12366429
申请日：2009-02-05
申请人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
发明人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
CPC分类号： G02B3/06 , G02B3/08 , G02B19/0014 , G02B19/0047 , G02B27/0927 , G02B27/0988 , G03F7/70141 , G03F7/70191 , G03F7/70308 , G03F7/70825
摘要： An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
摘要翻译： 照明光学系统是用于利用来自光源的光照射被照射的表面的照明光学系统，其具有包括光学积分器的分布形成光学系统并且在位于光学积分器后面的照明光瞳上形成光瞳强度分布，以及光学 衰减器布置在光学积分器后面的光路中的预定表面上，并且具有根据与预定表面的入射角度改变衰减率的衰减特性。
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2.发明授权Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system 有权照明光学系统，曝光装置，装置制造方法，补偿滤光片和曝光光学系统公开(公告)号：US08908151B2
公开(公告)日：2014-12-09
申请号：US12366429
申请日：2009-02-05
申请人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
发明人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
CPC分类号： G02B3/06 , G02B3/08 , G02B19/0014 , G02B19/0047 , G02B27/0927 , G02B27/0988 , G03F7/70141 , G03F7/70191 , G03F7/70308 , G03F7/70825
摘要： An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
摘要翻译： 照明光学系统是用于利用来自光源的光照射被照射的表面的照明光学系统，其具有包括光学积分器的分布形成光学系统并且在位于光学积分器后面的照明光瞳上形成光瞳强度分布，以及光学 衰减器布置在光学积分器后面的光路中的预定表面上，并且具有根据与预定表面的入射角度改变衰减率的衰减特性。
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