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    ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    3.
    发明申请
    ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    照明光学装置，曝光装置和装置制造方法

    公开(公告)号：US20090135396A1

    公开(公告)日：2009-05-28

    申请号：US12244868

    申请日：2008-10-03

    申请人： Yasushi Mizuno ,  Koji Shigematsu ,  Kouji Muramatsu ,  Hirohisa Tanaka ,  Osamu Tanitsu

    发明人： Yasushi Mizuno ,  Koji Shigematsu ,  Kouji Muramatsu ,  Hirohisa Tanaka ,  Osamu Tanitsu

    IPC分类号： G03B27/72

    CPC分类号： G03F7/70283 ,  G03F1/70 ,  G03F7/70108 ,  G03F7/70208

    摘要： An illumination optical apparatus is able to individually illuminate two regions separate from each other, under required illumination conditions. The illumination optical apparatus comprises a first illumination system to illuminate a illumination region and a second illumination region to illuminate a second illumination region. The first illumination system includes a first variable system which varies a shape or size of a light intensity distribution on an illumination pupil of the first illumination system and the second illumination system includes a second variable system which varies a shape or size of a light intensity distribution on an illumination pupil of the second illumination system. The first variable system and the second variable system vary the light intensity distribution on the illumination pupil of the first illumination system and the light intensity distribution on the illumination pupil of the second illumination system independently of each other.

    摘要翻译： 照明光学装置能够在所需的照明条件下单独照亮彼此分离的两个区域。 照明光学装置包括照明照明区域的第一照明系统和照射第二照明区域的第二照明区域。 第一照明系统包括第一可变系统，其改变第一照明系统的照明光瞳上的光强度分布的形状或尺寸，并且第二照明系统包括改变光强度分布的形状或尺寸的第二可变系统 在第二照明系统的照明光瞳上。 第一可变系统和第二可变系统彼此独立地改变第一照明系统的照明光瞳上的光强度分布和第二照明系统的照明光瞳上的光强度分布。

    Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device
    4.
    发明授权
    Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device 失效
    照明光学系统，曝光装置和具有极化状态波动校正装置的曝光方法

    公开(公告)号：US07515247B2

    公开(公告)日：2009-04-07

    申请号：US11979516

    申请日：2007-11-05

    申请人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    发明人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    IPC分类号： G03B27/72

    CPC分类号： G03F7/70566 ,  G03B27/42 ,  G03F7/70091

    摘要： An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.

    摘要翻译： 一种照明光学系统，当安装在曝光系统中时，通过根据掩模的图案特性改变照明光的偏振状态，同时抑制光的强度损失，实现合适的照明条件。 照明光学系统具有用于提供用于照射被照射的面的线偏振光的光源单元和用于将照明光的偏振状态从预定极化状态改变为非极化状态的偏振状态改变装置，反之亦然 。 偏光状态改变装置配置在光源单元与被照射面之间的光路中。 可以从照明光路去除偏振状态改变装置，并且具有去偏振器，用于选择性地使入射的线偏振光去极化。

    Illuminating optical system, exposure system and exposure method
    5.
    发明申请
    Illuminating optical system, exposure system and exposure method 审中-公开
    照明光学系统，曝光系统和曝光方法

    公开(公告)号：US20060171138A1

    公开(公告)日：2006-08-03

    申请号：US10565412

    申请日：2004-06-29

    申请人： Kenichi Muramatsu ,  Norio Komine ,  Osamu Tanitsu ,  Hirohisa Tanaka

    发明人： Kenichi Muramatsu ,  Norio Komine ,  Osamu Tanitsu ,  Hirohisa Tanaka

    IPC分类号： G01D11/28

    CPC分类号： G03F7/70566

    摘要： An illuminating optical system capable of preventing a change in the polarized status of a linearly polarized light passing through a light transmitting member formed of a cubic-system crystal material such as fluorite. An illuminating optical system comprising a light source unit (1) for suppling a linearly polarized light to illuminate surfaces (M, W) to be illuminated with a light from the light source unit. The system is provided with a polarized status switching means (10, 20) disposed on a light path between the light source unit and the surfaces to be illuminated, for switching the polarized status of a light, that illuminates the surfaces to be illuminated, between a linearly polarized status and a non-linearly polarized status. The polarized status switching means has a phase member (10) for changing the polarization surface of an incident linearly polarized light as needed, and a depolarizer (20) for depolarizing an incident linearly polarized light as needed. A phase advancing axis direction in association with the double refraction variation of a light transmitting member formed of fluorite is so set as to almost agree with or cross almost perpendicularly to the field vibration direction of a linearly polarized light incident to a light transmitting member.

    摘要翻译： 一种照明光学系统，其能够防止通过由诸如萤石的立方晶系晶体材料形成的透光构件的线偏振光的偏振状态的变化。 一种照明光学系统，包括用于提供线性偏振光以照射要被来自光源单元的光照射的表面（M，W）的光源单元（1）。 该系统设置有偏光状态切换装置（10,20），该偏振状态切换装置设置在光源单元和被照射表面之间的光路上，用于将照亮被照射的表面的光的偏振状态 线性极化状态和非线性极化状态。 极化状态切换装置具有用于根据需要改变入射的线偏振光的偏振面的相位构件（10）和根据需要对入射的线偏振光进行去偏振的消偏振器（20）。 与萤石形成的透光构件的双折射变化相关的相位推进轴方向设定为几乎与入射到透光构件的线偏振光的场振动方向一致或几乎垂直。

    Illumination optical system, exposure apparatus, and exposure method
    6.
    发明申请
    Illumination optical system, exposure apparatus, and exposure method 有权
    照明光学系统，曝光装置和曝光方法

    公开(公告)号：US20060055834A1

    公开(公告)日：2006-03-16

    申请号：US11140103

    申请日：2005-05-31

    申请人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    发明人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    IPC分类号： G02F1/1335

    CPC分类号： G03F7/70566 ,  G03B27/42 ,  G03F7/70091

    摘要： An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.

    摘要翻译： 一种照明光学系统，当安装在曝光系统中时，通过根据掩模的图案特性改变照明光的偏振状态，同时抑制光的强度损失，实现合适的照明条件。 照明光学系统具有用于提供用于照射被照射的面的线偏振光的光源单元和用于将照明光的偏振状态从预定极化状态改变为非极化状态的偏振状态改变装置，反之亦然 。 偏光状态改变装置配置在光源单元与被照射面之间的光路中。 可以从照明光路去除偏振状态改变装置，并且具有去偏振器，用于选择性地使入射的线偏振光去极化。

    Illumination optical apparatus, exposure apparatus, and device manufacturing method
    7.
    发明授权
    Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
    照明光学装置，曝光装置和装置的制造方法

    公开(公告)号：US08094290B2

    公开(公告)日：2012-01-10

    申请号：US12266321

    申请日：2008-11-06

    申请人： Soichi Owa ,  Osamu Tanitsu ,  Hirohisa Tanaka

    发明人： Soichi Owa ,  Osamu Tanitsu ,  Hirohisa Tanaka

    IPC分类号： G03B27/54 ,  G03B27/72 ,  G03B27/32

    CPC分类号： G02B27/0905 ,  G02B26/0833 ,  G02B27/0927 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70583 ,  Y10T29/49826

    摘要： An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.

    摘要翻译： 具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响，同时保持以脉冲发射的照明光的高使用效率。 照明光学系统用脉冲发射的照明光照射被照射的平面，并且包括空间光调制器，其包括多个反射镜元件，每个反射镜元件根据照明光的入射位置对照明光进行空间调制。 每当发射照明光的至少一个脉冲时，调制控制单元控制镜元件，使得光学元件彼此空间地调制照明光的脉冲，并且形成基本相同的强度分布，用于脉冲的 在预定平面上的照明光。

    Illumination optical system, exposure apparatus, and exposure method
    9.
    发明申请
    Illumination optical system, exposure apparatus, and exposure method 失效
    照明光学系统，曝光装置和曝光方法

    公开(公告)号：US20080074632A1

    公开(公告)日：2008-03-27

    申请号：US11979517

    申请日：2007-11-05

    申请人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    发明人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    IPC分类号： G03B27/72

    CPC分类号： G03F7/70566 ,  G03B27/42 ,  G03F7/70091

    摘要： An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.

    摘要翻译： 一种照明光学系统，当安装在曝光系统中时，通过根据掩模的图案特性改变照明光的偏振状态，同时抑制光的强度损失，实现合适的照明条件。 照明光学系统具有用于提供用于照射被照射的面的线偏振光的光源单元和用于将照明光的偏振状态从预定极化状态改变为非极化状态的偏振状态改变装置，反之亦然 。 偏光状态改变装置配置在光源单元与被照射面之间的光路中。 可以从照明光路去除偏振状态改变装置，并且具有去偏振器，用于选择性地使入射的线偏振光去极化。