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1.发明授权公开(公告)号：US06773784B2
公开(公告)日：2004-08-10
申请号：US10364501
申请日：2003-02-12
IPC分类号： G11B5725
CPC分类号： C03C17/40 , G11B5/725 , G11B5/732 , G11B5/7325 , Y10T428/24942 , Y10T428/265
摘要： The object of this invention is to provide a magnetic disk which has an excellent durability even with a protective film having a small film thickness of 4 nm or less. The magnetic disk of this invention is a magnetic disk comprising a non-magnetic substrate and, provided thereon, a magnetic metal film, carbon protective film and fluorine-containing lubricant film, wherein the carbon protective film is a DLC film having a film thickness of 4 nm or less and the ratio of infrared absorption intensity resulting from the C—H bond near 2,920 cm−1 determined by FT-IR using ATR to infrared absorption intensity resulting from the C—F bond of the lubricant film is 0.035-0.060.
摘要翻译： 本发明的目的是提供一种即使是具有4nm或更小的薄膜厚度的保护膜也具有优异的耐久性的磁盘。 本发明的磁盘是包含非磁性基片的磁盘，其上设置有磁性金属膜，碳保护膜和含氟润滑剂膜，其中碳保护膜是DLC膜，其膜厚度为 4nm以下，由FT-IR使用ATR测定的CH键附近的2,920cm -1处的红外吸收强度与由润滑剂膜的CF键导致的红外吸收强度的比率为0.035〜0.060。
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2.发明授权公开(公告)号：US07147943B2
公开(公告)日：2006-12-12
申请号：US10429704
申请日：2003-05-06
申请人： Toshinori Ono , Yuuichi Kokaku , Hiroyuki Matsumoto , Hiroshi Tani , Mitsuhiro Shoda , Tomonori Kozaki , Hiroshi Ishikawa , Toru Yatsue , Yoshinori Honda , Shigehiko Fujimaki
发明人： Toshinori Ono , Yuuichi Kokaku , Hiroyuki Matsumoto , Hiroshi Tani , Mitsuhiro Shoda , Tomonori Kozaki , Hiroshi Ishikawa , Toru Yatsue , Yoshinori Honda , Shigehiko Fujimaki
CPC分类号： G11B5/8408 , G11B5/72
摘要： This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic layer on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective layer mainly composed of carbon for protecting the magnetic layer exceeds 20%. The bonding force between the protective layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.
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3.发明申请公开(公告)号：US20080113224A1
公开(公告)日：2008-05-15
申请号：US11985279
申请日：2007-11-13
CPC分类号： G11B5/72 , C23C16/26 , C23C16/45523 , C23C28/321 , C23C28/322 , C23C28/343 , G11B5/1278 , G11B5/667 , G11B5/82 , G11B5/8408
摘要： Embodiments of the present invention help to improve corrosion resistance and durability by providing a functional diamond like carbon (DLC) protective layer for a perpendicular magnetic recording medium using a granular magnetic layer. According to one embodiment, when a DLC protective layer that protects a granular magnetic layer of a perpendicular magnetic recording medium is formed using a CVD method, the thickness of a first layer on the granular magnetic layer is set to 7.5 to 25% of the total thickness of the protective layer and a hydrogen content of the first layer is set to 33 to 38%, the thickness of a second layer is set to 50 to 85% of the total thickness of the protective layer and a nitrogen content of the second layer is set to 3 to 7%, and the thickness of a third layer located at the outermost side of the protective layer is set to 7.5 to 25% of the total thickness of the protective layer and a hydrogen content of the third layer is set to 25% or less.
摘要翻译： 本发明的实施方式通过为使用粒状磁性层的垂直磁记录介质提供功能性金刚石碳（DLC）保护层，有助于提高耐腐蚀性和耐久性。 根据一个实施例，当使用CVD方法形成保护垂直磁记录介质的粒状磁性层的DLC保护层时，粒状磁性层上的第一层的厚度设定为总体的7.5〜25％ 保护层的厚度和第一层的氢含量设定为33〜38％，第二层的厚度设定为保护层的总厚度的50〜85％，第二层的氮含量 设定为3〜7％，将位于保护层最外侧的第3层的厚度设定为保护层的总厚度的7.5〜25％，将第3层的氢含量设定为 25％以下。
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4.发明授权公开(公告)号：US07875372B2
公开(公告)日：2011-01-25
申请号：US11985279
申请日：2007-11-13
IPC分类号： G11B5/66
CPC分类号： G11B5/72 , C23C16/26 , C23C16/45523 , C23C28/321 , C23C28/322 , C23C28/343 , G11B5/1278 , G11B5/667 , G11B5/82 , G11B5/8408
摘要： Embodiments of the present invention help to improve corrosion resistance and durability by providing a functional diamond like carbon (DLC) protective layer for a perpendicular magnetic recording medium using a granular magnetic layer. According to one embodiment, when a DLC protective layer that protects a granular magnetic layer of a perpendicular magnetic recording medium is formed using a CVD method, the thickness of a first layer on the granular magnetic layer is set to 7.5 to 25% of the total thickness of the protective layer and a hydrogen content of the first layer is set to 33 to 38%, the thickness of a second layer is set to 50 to 85% of the total thickness of the protective layer and a nitrogen content of the second layer is set to 3 to 7%, and the thickness of a third layer located at the outermost side of the protective layer is set to 7.5 to 25% of the total thickness of the protective layer and a hydrogen content of the third layer is set to 25% or less.
摘要翻译： 本发明的实施方式通过为使用粒状磁性层的垂直磁记录介质提供功能性金刚石碳（DLC）保护层，有助于提高耐腐蚀性和耐久性。 根据一个实施例，当使用CVD方法形成保护垂直磁记录介质的粒状磁性层的DLC保护层时，粒状磁性层上的第一层的厚度设定为总体的7.5〜25％ 保护层的厚度和第一层的氢含量设定为33〜38％，第二层的厚度设定为保护层的总厚度的50〜85％，第二层的氮含量 设定为3〜7％，将位于保护层最外侧的第3层的厚度设定为保护层的总厚度的7.5〜25％，将第3层的氢含量设定为 25％以下。
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5.发明授权Apparatus for cleaning magnetic disks and methods for manufacturing magnetic disks 有权用于清洁磁盘的设备和用于制造磁盘的方法公开(公告)号：US08388414B2
公开(公告)日：2013-03-05
申请号：US12568437
申请日：2009-09-28
IPC分类号： B08B1/02
CPC分类号： G11B5/8408
摘要： A method, according to one embodiment, includes forming a lubricant film on a magnetic disk having at least a magnetic recording film above a substrate, and a protective film above the magnetic recording film, and wiping the lubricant film while rotating the substrate, e.g., at about 3.0 m/s to about 3.5 m/s by pressing a pad against a wiping cloth e.g., at a loading speed of about 12 mm/min to about 36 mm/min e.g., under a pressure of about 3 gf/mm2 to about 9 gf/mm2. The pad has a convexly curved surface in contact with the wiping cloth, and the wiping cloth is disposed so as to oppose the lubricant film. The method also includes pressing a cleaning tape which includes abrasive grains against the substrate on which the protective film and lubricant film are formed while rotating the substrate to remove protrusions. Apparatuses and forming the layers are also described.
摘要翻译： 根据一个实施例的方法包括在至少在基底上方具有磁记录膜的磁盘上形成润滑膜，以及在磁记录膜上方形成保护膜，并且在旋转衬底的同时擦拭润滑剂膜， 通过将垫压在擦拭布上，例如以约12mm / min至约36mm / min的加载速度例如在约3gf / mm 2的压力下压到约3.0m / s至约3.5m / s， 约9 gf / mm2。 垫具有与擦拭布接触的凸曲面，并且擦拭布布置成与润滑剂膜相对。 该方法还包括在旋转衬底以移除突起的同时将包括磨粒的清洁带压在其上形成保护膜和润滑剂膜的基底上。 还描述了设备和形成层。
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6.发明申请Apparatus for Cleaning Magnetic Disks and Methods for Manufacturing Magnetic Disks 有权用于清洁磁盘的设备和制造磁盘的方法公开(公告)号：US20100086676A1
公开(公告)日：2010-04-08
申请号：US12568437
申请日：2009-09-28
CPC分类号： G11B5/8408
摘要： A method, according to one embodiment, includes forming a lubricant film on a magnetic disk having at least a magnetic recording film above a substrate, and a protective film above the magnetic recording film, and wiping the lubricant film while rotating the substrate, e.g., at about 3.0 m/s to about 3.5 m/s by pressing a pad against a wiping cloth e.g., at a loading speed of about 12 mm/min to about 36 mm/min e.g., under a pressure of about 3 gf/mm2 to about 9 gf/mm2. The pad has a convexly curved surface in contact with the wiping cloth, and the wiping cloth is disposed so as to oppose the lubricant film. The method also includes pressing a cleaning tape which includes abrasive grains against the substrate on which the protective film and lubricant film are formed while rotating the substrate to remove protrusions. Apparatuses and forming the layers are also described.
摘要翻译： 根据一个实施例的方法包括在至少在基底上方具有磁记录膜的磁盘上形成润滑膜，以及在磁记录膜上方形成保护膜，并且在旋转衬底的同时擦拭润滑剂膜， 通过将垫压在擦拭布上，例如以约12mm / min至约36mm / min的加载速度例如在约3gf / mm 2的压力下压到约3.0m / s至约3.5m / s， 约9 gf / mm2。 垫具有与擦拭布接触的凸曲面，并且擦拭布布置成与润滑剂膜相对。 该方法还包括在旋转衬底以移除突起的同时将包括磨粒的清洁带压在其上形成保护膜和润滑剂膜的基底上。 还描述了设备和形成层。
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7.发明授权公开(公告)号：US07718282B2
公开(公告)日：2010-05-18
申请号：US11259921
申请日：2005-10-26
IPC分类号： G11B5/66
CPC分类号： G11B5/667 , G11B5/65 , G11B5/8408 , G11B5/851
摘要： A magnetic recording medium with a granular magnetic recording layer excellent in corrosion resistance is provided. In one embodiment, after formation of, on a non-magnetic substrate, an NiTa adhesion layer, a soft magnetic layer, a Ta intermediate layer, an Ru intermediate layer, and a Co alloy granular magnetic recording layer, hydrogen (H2) plasma processing is applied to the surface of the Co alloy granular magnetic recording layer. Then, a DLC protective film layer is formed and a lubricant layer is coated.
摘要翻译： 提供具有耐腐蚀性优良的粒状磁记录层的磁记录介质。 在一个实施例中，在非磁性基板上形成NiTa粘附层，软磁性层，Ta中间层，Ru中间层和Co合金粒状磁记录层之后，形成氢（H 2）等离子体处理 施加到Co合金粒状磁记录层的表面。 然后，形成DLC保护膜层并涂覆润滑剂层。
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8.发明申请公开(公告)号：US20060093864A1
公开(公告)日：2006-05-04
申请号：US11259921
申请日：2005-10-26
CPC分类号： G11B5/667 , G11B5/65 , G11B5/8408 , G11B5/851
摘要： A magnetic recording medium with a granular magnetic recording layer excellent in corrosion resistance is provided. In one embodiment, after formation of, on a non-magnetic substrate, an NiTa adhesion layer, a soft magnetic layer, a Ta intermediate layer, an Ru intermediate layer, and a Co alloy granular magnetic recording layer, hydrogen (H2) plasma processing is applied to the surface of the Co alloy granular magnetic recording layer. Then, a DLC protective film layer is formed and a lubricant layer is coated.
摘要翻译： 提供具有耐腐蚀性优良的粒状磁记录层的磁记录介质。 在一个实施例中，在非磁性基板上形成NiTa粘附层，软磁性层，Ta中间层，Ru中间层和Co合金粒状磁记录层之后，形成氢（H 2 O） 2 Co等离子体处理被施加到Co合金粒状磁记录层的表面。 然后，形成DLC保护膜层并涂覆润滑剂层。
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9.发明授权Magnetic recording media, manufacturing method for thereof and apparatus for using the media 失效磁记录介质，其制造方法和使用该介质的设备公开(公告)号：US06395412B1
公开(公告)日：2002-05-28
申请号：US09399228
申请日：1999-09-20
IPC分类号： G11B566
CPC分类号： G11B5/7315 , G11B5/656 , G11B5/72 , G11B5/7325 , Y10T428/24942
摘要： Surface roughness of the magnetic layer and the protective layer is flatter than the surface roughness of the substrate to decrease medium noise, hereby levitation stability of the magnetic head in the ultra low region and high density recording is obtained, for magnetic recording medium and magnetic disk apparatus of high reliability.
摘要翻译： 磁性层和保护层的表面粗糙度比衬底的表面粗糙度平坦，以降低介质噪声，因此获得磁头在超低区域和高密度记录中的悬浮稳定性，对于磁记录介质和磁盘 高可靠性设备。
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10.发明申请Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof 有权具有类金刚石碳保护膜的磁记录介质及其制造方法公开(公告)号：US20060083952A1
公开(公告)日：2006-04-20
申请号：US11254073
申请日：2005-10-18
CPC分类号： G11B5/667 , C23C16/26 , G11B5/656 , G11B5/7325 , G11B5/8408 , Y10S427/106
摘要： Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.
摘要翻译： 本发明的实施例提供了磁头飞行性能，耐磨性可靠性和耐腐蚀性优异的磁记录介质及其制造方法。 在一个实施方案中，制造磁记录介质的方法包括至少在非磁性基底上形成粘合层，软磁层，粒状磁性膜和类金刚石碳（DLC）保护膜。 虽然形成了用于保护磁记录介质的粒状磁性层的DLC保护膜层，但是烃气体与氢气混合并且向基板施加偏置电压。
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