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    Distributed feedback semiconductor laser
    1.
    发明授权
    Distributed feedback semiconductor laser 失效
    分布式反馈半导体激光器

    公开(公告)号：US5289494A

    公开(公告)日：1994-02-22

    申请号：US899860

    申请日：1992-06-17

    申请人： Kunio Tada ,  Yoshiaki Nakano ,  Takeshi Inoue ,  Yi Luo ,  Takeshi Irita ,  Shin-ichi Nakajima ,  Hideto Iwaoka

    发明人： Kunio Tada ,  Yoshiaki Nakano ,  Takeshi Inoue ,  Yi Luo ,  Takeshi Irita ,  Shin-ichi Nakajima ,  Hideto Iwaoka

    IPC分类号： H01S5/12 ,  H01S5/323 ,  H01S3/08

    CPC分类号： H01S5/1228 ,  H01S5/32391

    摘要： This invention relates to a distributed feedback semiconductor laser which achieves distributed feedback by gain coupling by providing periodical changes in the thickness of the active layer (5) or the absorptive layer, and aims to achieve light distributed feedback mainly of periodical perturbation of the gain factor by diminishing the periodical perturbation of refractive index caused by the changes in the thickness of the active layer (5) or the absorptive layer. This invention is characterized by a refractive index canceling structure comprising a combination of layers (6) and (7) of different refractive indices to cancel periodical changes in refractive index caused by the periodical structure of the active layer (5) or the absorptive layer.

    摘要翻译： PCT No.PCT / JP91 / 01418 Sec。 371日期：1992年6月17日 102（e）日期1992年6月17日PCT 1991年10月17日PCT公布。 公开号WO92 / 07401 本发明涉及一种分布式反馈半导体激光器，其通过增加耦合实现分布式反馈，通过提供有源层（5）或吸收层的厚度的周期性变化，目的是实现主要的光分布反馈 通过减少由活性层（5）或吸收层的厚度变化引起的折射率的周期性扰动来增益因子的周期性扰动。 本发明的特征在于包括具有不同折射率的层（6）和（7）的组合的折射率消除结构，以消除由有源层（5）或吸收层的周期性结构引起的折射率的周期性变化。

    Optical switch
    2.
    发明授权
    Optical switch 失效
    光开关

    公开(公告)号：US07317848B2

    公开(公告)日：2008-01-08

    申请号：US10898927

    申请日：2004-07-27

    申请人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    发明人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    IPC分类号： G02B6/26

    CPC分类号： G02F1/3138 ,  G02F2201/12 ,  G02F2203/60

    摘要： An optical switch in which the adverse effect of heating can be restrained is realized. An optical switch for switching a transmission path of an optical signal by a change in refractive index due to carrier injection comprises: a semiconductor substrate; an optical waveguide layer which is formed on the semiconductor substrate and in which an optical waveguide is formed, the optical signal being incident on the optical waveguide from one side, then branched into two at a halfway part and emitted from the optical waveguide; a first electrode formed on the optical waveguide layer and at a branching part of the optical waveguide; a second electrode formed on the optical waveguide layer and near the branching part of the optical waveguide; and a third electrode formed on the optical waveguide layer and on a side opposite to the first electrode as viewed from the second electrode; wherein when the optical switch is on, carriers are injected from the first and second electrodes, and when the optical switch is off, carriers are injected from the second and third electrodes.

    摘要翻译： 实现了可以抑制加热的不利影响的光开关。 用于通过载流子注入引起的折射率变化来切换光信号的传输路径的光开关包括：半导体衬底; 形成在半导体基板上并形成有光波导的光波导层，光信号从一侧入射到光波导上，然后中途分支成两个，并从光波导发射; 形成在所述光波导层上和所述光波导的分支部的第一电极; 形成在光波导层上且靠近光波导的分支部分的第二电极; 以及第三电极，其形成在所述光波导层上并且与所述第一电极相反的一侧从所述第二电极观察; 其中当所述光开关导通时，从所述第一和第二电极注入载流子，并且当所述光开关断开时，载流子从所述第二和第三电极注入。

    Mark detection method, exposure method, device manufacturing method, mark detection apparatus, exposure apparatus, and device
    3.
    发明授权
    Mark detection method, exposure method, device manufacturing method, mark detection apparatus, exposure apparatus, and device 失效
    标记检测方法，曝光方法，装置制造方法，标记检测装置，曝光装置和装置

    公开(公告)号：US06693713B1

    公开(公告)日：2004-02-17

    申请号：US09743989

    申请日：2001-01-18

    申请人： Shin-ichi Nakajima

    发明人： Shin-ichi Nakajima

    IPC分类号： G01B1100

    CPC分类号： G03F9/7092 ,  G03F9/70 ,  G03F9/7088

    摘要： The object of the present invention is to provide a mark detection method, an exposure method, a device manufacturing method, a mark detection apparatus, an exposure apparatus, and a device manufactured by the use of the exposure apparatus, which are capable of reducing a position measurement error in a short time even in the case where a sampling interval must be set to about 0.2 times or more of a lower limit of a minimum periodic component. In the present invention, a mark formed on an object is irradiated with a detection beam, an image of the mark is picked up through an image-forming system, the image of the mark formed on an image pickup device is converted into an electrical image signal, a signal related to the image signal is output at predetermined sampling intervals, and a signal related to the image signal is interpolated in a cycle equal to or less than the predetermined sampling interval.

    摘要翻译： 本发明的目的是提供一种标记检测方法，曝光方法，装置制造方法，标记检测装置，曝光装置和使用曝光装置制造的装置，其能够减少 即使在将采样间隔设定为最小周期分量的下限的约0.2倍以上的情况下，也能够在短时间内进行位置测量误差。 在本发明中，在物体上形成的标记用检测光束照射，通过图像形成系统拾取标记的图像，将形成在图像拾取装置上的标记的图像转换为电图像 信号，以预定的采样间隔输出与图像信号相关的信号，并且以等于或小于预定采样间隔的周期内插与图像信号相关的信号。

    Optical signal processing system
    5.
    发明授权
    Optical signal processing system 失效
    光信号处理系统

    公开(公告)号：US06930623B2

    公开(公告)日：2005-08-16

    申请号：US10761372

    申请日：2004-01-22

    申请人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Hiroyuki Matsuura ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka ,  Hirotoshi Kodaka

    发明人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Hiroyuki Matsuura ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka ,  Hirotoshi Kodaka

    IPC分类号： H04B10/07 ,  H04B10/27 ,  H04B10/29 ,  H04B10/524 ,  H04B10/556 ,  H04J14/08 ,  H03M9/00

    CPC分类号： H04J14/08

    摘要： The present invention aims at achieving an optical signal processing system which converts a higher speed optical signal to electrical signals by time-demultiplexing the signal with low-speed electrical signals.The present invention offers an improved optical signal processing system that converts a serial pulse train optical signal with transmission speed N to parallel pulse train electrical signals. This system is characterized by providing a serial-parallel converter in which at least two optical switches are cascaded, each of which outputs optical signals with transmission speed M (N>M) to one of the two output terminals and outputs the remaining optical signals to the alternative one of said two output terminals by switching connection to said output terminal, receiving parts which convert optical signals from one of the two output terminals of each of the above optical switches to electrical signals, a synchronizing circuit which outputs timing signals in synchronization with electrical signals output from these receiving parts, and drivers which cause the above described optical switches to switch their connections based on timing signals output from the above synchronizing circuit.

    摘要翻译： 本发明旨在实现一种光信号处理系统，其通过用低速电信号对信号进行时分解，将高速光信号转换成电信号。 本发明提供一种改进的光信号处理系统，其将具有传输速度N的串行脉冲序列光信号转换为并行脉冲串电信号。 该系统的特征在于提供一种串并联转换器，其中至少两个光开关级联，其中每一个将传输速度M（N> M）的光信号输出到两个输出端之一，并将剩余的光信号输出到 所述两个输出端子中的另一个通过切换到所述输出端子的连接;接收部件，其将来自上述每个光开关的两个输出端之一的光信号转换成电信号;同步电路，其与 从这些接收部输出的电信号，以及使上述光开关根据从上述同步电路输出的定时信号切换连接的驱动器。

    Optical switch matrix
    6.
    发明申请
    Optical switch matrix 失效
    光开关矩阵

    公开(公告)号：US20050041913A1

    公开(公告)日：2005-02-24

    申请号：US10901173

    申请日：2004-07-29

    申请人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    发明人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    IPC分类号： G02B6/12 ,  G02F1/29 ,  G02F1/313 ,  G02B6/26

    CPC分类号： G02F1/3138 ,  G02B2006/12173 ,  G02F1/293

    摘要： A matrix optical switch that can switch the transmission path of an optical signal without requiring a driving unit for each optical switch is realized. A matrix optical switch for switching a transmission path of an optical signal by connecting plural input sides and plural output sides, respectively, comprises: a semiconductor optical waveguide substrate; a photo mask choosing system for selecting and arranging one photo mask from plural photo masks each of which has printed thereon a pattern connecting plural input sides to plural output sides; and a light source for casting output light having larger energy than a band gap of the semiconductor optical waveguide substrate onto a photon injection area between the plural input sides and the plural output sides on the semiconductor optical waveguide substrate via the selected photo mask.

    摘要翻译： 实现了可以切换光信号的传输路径而不需要每个光开关的驱动单元的矩阵光开关。 用于通过连接多个输入侧和多个输出侧来切换光信号的传输路径的矩阵光开关包括：半导体光波导基片; 一种光掩模选择系统，用于从多个照相掩模中选择和布置一个照片掩模，每个照片掩模上印有将多个输入侧连接到多个输出侧的图案; 以及用于将具有比半导体光波导基板的带隙更大的能量的输出光通过所选择的光掩模投射到半导体光波导基板上的多个输入侧和多个输出侧之间的光子注入区域上的光源。

    Optical switch
    7.
    发明申请
    Optical switch 失效
    光开关

    公开(公告)号：US20050041903A1

    公开(公告)日：2005-02-24

    申请号：US10898927

    申请日：2004-07-27

    申请人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    发明人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    IPC分类号： G02F1/025 ,  G02F1/313 ,  G02F1/295

    CPC分类号： G02F1/3138 ,  G02F2201/12 ,  G02F2203/60

    摘要： An optical switch in which the adverse effect of heating can be restrained is realized. An optical switch for switching a transmission path of an optical signal by a change in refractive index due to carrier injection comprises: a semiconductor substrate; an optical waveguide layer which is formed on the semiconductor substrate and in which an optical waveguide is formed, the optical signal being incident on the optical waveguide from one side, then branched into two at a halfway part and emitted from the optical waveguide; a first electrode formed on the optical waveguide layer and at a branching part of the optical waveguide; a second electrode formed on the optical waveguide layer and near the branching part of the optical waveguide; and a third electrode formed on the optical waveguide layer and on a side opposite to the first electrode as viewed from the second electrode; wherein when the optical switch is on, carriers are injected from the first and second electrodes, and when the optical switch is off, carriers are injected from the second and third electrodes.

    摘要翻译： 实现了可以抑制加热的不利影响的光开关。 用于通过载流子注入引起的折射率变化来切换光信号的传输路径的光开关包括：半导体衬底; 形成在半导体基板上并形成有光波导的光波导层，光信号从一侧入射到光波导上，然后中途分支成两个，并从光波导发射; 形成在所述光波导层上和所述光波导的分支部的第一电极; 形成在光波导层上且靠近光波导的分支部分的第二电极; 以及第三电极，其形成在所述光波导层上并且与所述第一电极相反的一侧从所述第二电极观察; 其中当所述光开关导通时，从所述第一和第二电极注入载流子，并且当所述光开关断开时，载流子从所述第二和第三电极注入。

    Optical switch matrix
    10.
    发明授权
    Optical switch matrix 失效
    光开关矩阵

    公开(公告)号：US07116856B2

    公开(公告)日：2006-10-03

    申请号：US10901173

    申请日：2004-07-29

    申请人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    发明人： Shinji Iio ,  Masayuki Suehiro ,  Shin-ichi Nakajima ,  Yoshiyuki Asano ,  Chie Sato ,  Akira Miura ,  Tsuyoshi Yakihara ,  Shinji Kobayashi ,  Sadaharu Oka

    IPC分类号： G02B6/26

    CPC分类号： G02F1/3138 ,  G02B2006/12173 ,  G02F1/293

    摘要： A matrix optical switch that can switch the transmission path of an optical signal without requiring a driving unit for each optical switch is realized. A matrix optical switch for switching a transmission path of an optical signal by connecting plural input sides and plural output sides, respectively, comprises: a semiconductor optical waveguide substrate; a photo mask choosing system for selecting and arranging one photo mask from plural photo masks each of which has printed thereon a pattern connecting plural input sides to plural output sides; and a light source for casting output light having larger energy than a band gap of the semiconductor optical waveguide substrate onto a photon injection area between the plural input sides and the plural output sides on the semiconductor optical waveguide substrate via the selected photo mask.

    摘要翻译： 实现了可以切换光信号的传输路径而不需要每个光开关的驱动单元的矩阵光开关。 用于通过连接多个输入侧和多个输出侧来切换光信号的传输路径的矩阵光开关包括：半导体光波导基片; 一种光掩模选择系统，用于从多个照相掩模中选择和布置一个照片掩模，每个照片掩模上印有将多个输入侧连接到多个输出侧的图案; 以及用于将具有比半导体光波导基板的带隙更大的能量的输出光通过所选择的光掩模投射到半导体光波导基板上的多个输入侧和多个输出侧之间的光子注入区域上的光源。