公开(公告)号：US4595291A

公开(公告)日：1986-06-17

申请号：US541023

申请日：1983-10-12

Applicant: Kyoichi Tatsuno

Inventor： Kyoichi Tatsuno

IPC: G01N15/02

CPC classification number: G01N15/0211 ,  G01N2021/4711 ,  G01N2021/4716

Abstract: A particle diameter measuring device for measuring the particle diameter distribution of a number of particles to be measured, wherein a laser beam guided through a radiating optical fiber is re-formed by collimator lenses into parallel beams having an adequate diameter and is then irradiated onto the particles to be measured; a plurality of optical fibers are arranged along a circle whose center is a point P located in the particles, the receiving end of any of the optical fibers being directed toward point P. The optical fibers receiving the scattered light are arranged close to one another in the range of small scattering angles, while they are roughly arranged in the range of large scattering angles. A transmitted light enters into that optical fiber which is so arranged as to coincide with the laser beam incident direction, the intensity of this transmitted light being detected by a photodetector. Light scattered at various angles, which angles are formed with reference to the laser beam incident direction, is received by the other optical fibers, their intensities being detected by the other photo-detectors. The transmission factor t=Iout/Iin in calculated from the intensity of the transmitted light. The particle diameter distribution n(D) is calculated in the form of relative values, using the angular distribution I(.theta.) of the scattered light intensity. The particle diameter distribution N(D) is calculated in the form of absolute values, using t, n(D) and light pass length L. On the while, particle diameter distribution N(D) or n(D) can be measured with high accuracy, independently of the diameter of the particles. Since it is easy to measure the scattered light intensities in a range of scattering angles from 0.degree. to 30.degree., the particle diameter distribution of particles, the diameter thereof are smaller than 0.1 .mu.m, can be obtained.

Abstract translation: 一种用于测量待测量的多个颗粒的粒径分布的粒径测量装置，其中通过辐射光纤引导的激光束由准直透镜重新形成具有足够直径的平行光束，然后照射到 要测量的颗粒; 多个光纤沿着其中心是位于颗粒中的点P的圆布置，任何光纤的接收端指向点P.接收散射光的光纤被布置成彼此靠近 小散射角的范围，而它们大致布置在大散射角的范围内。 透射光入射到被配置为与激光束入射方向一致的光纤中，该透射光的强度由光检测器检测。 相对于激光束入射方向形成的角度以各种角度散射的光被其他光纤接收，其强度由其他光检测器检测。 从透射光的强度计算的透射因子t = Iout / Iin。 使用散射光强度的角度分布I（theta），以相对值的形式计算粒径分布n（D）。 使用t，n（D）和光通过长度L，以绝对值的形式计算粒径分布N（D）。同时，可以用（D）或n（D）测量粒径分布N 高精度，独立于颗粒的直径。 由于容易在0〜30°的散射角度范围内测定散射光强度，所以可以得到粒径分布小于0.1μm的粒子。

公开(公告)号：US5021647A

公开(公告)日：1991-06-04

申请号：US360889

申请日：1989-05-30

Applicant: Kyoichi Tatsuno ,  Toshiya Umeda

Inventor： Kyoichi Tatsuno ,  Toshiya Umeda

IPC: G01D5/26 ,  G01D5/34 ,  G01L1/24 ,  G01R15/24

CPC classification number: G01R15/24 ,  G01D5/344 ,  G01L1/241

Abstract: An optical fiber sensor, which has a detector section connected in a single optical path made of an optical-fiber cable and having a light-modulating element and an optical element connected in series. The light-modulating element has its birefringence degree changed in accordance with the physical quantity to be sensed, thereby to modulate the polarization state of the physical quantity. The optical element converts the polarization state of the physical quantity into the intensity of light. The sensor further comprises two light sources, which apply two light beams having different wavelengths .lambda..sub.1 and .lambda..sub.2 to one end of the optical path. The intensities P.sub.1 and P.sub.2 of the beams of the wavelengths .lambda..sub.1 and .lambda..sub.2, both emitted from the other end of the optical path, are detected. The intensities .lambda..sub.1 and .lambda..sub.2 vary in accordance with the changes in the intensity of the light emitted from the light sources, in the loss at the optical-fiber cable and the optical connector, and in the physical quantity to be detected. To obtain data free of the changes in the intensity of the light emitted from the light sources, in the loss at the optical-fiber cable and the optical connector, one type of the sensor has means for controlling one of the light sources such that the intensities P.sub.1 and P.sub.2 are at the same level, and means for detecting the intensities P.sub.01 and P.sub.02 of the light beams emitted from the two light sources and performing the calculation of (P.sub.01 -P.sub.02)/(P.sub.01 +P.sub.02).

公开(公告)号：US4970385A

公开(公告)日：1990-11-13

申请号：US360882

申请日：1989-05-11

Applicant: Kyoichi Tatsuno ,  Ikuo Watanabe

Inventor： Kyoichi Tatsuno ,  Ikuo Watanabe

IPC: G01K11/12 ,  G01K5/48 ,  G01K5/52 ,  G01L1/24

CPC classification number: G01K5/52

Abstract: A temperature measuring device intended to use the photoelastic effect of a transparent element. The present invention employs as the temperature sensing element a thermal expansion photoelastic cell comprising a photoelastic element and a stress generating element which are closely contacted with each other for yielding stress of anisotropy in the photoelastic element, which changes in response to changing ambient temperature, as the stress generating element is quite remarkably different in thermal expansion coefficient from the photoelastic element. An element is further provided to detect phase difference between two orthogonal light components passed through the photoelastic element which are one polarized component in a stress direction and the other component polarized in a direction perpendicular to the above stress direction when linearly polarized light is passed through the photoelastic element of the thermal expansion photoelastic cell. The detected phase difference is converted into a temperature, which is then displayed on a display device.

Abstract translation: PCT No.PCT / JP88 / 00908 Sec。 371日期1989年5月11日 102（e）日期1989年5月11日PCT提交1988年9月9日PCT公布。 出版物WO89 / 02586 日期：1989年3月23日。一种旨在使用透明元件的光弹效应的温度测量装置。 本发明将温度感应元件用作包括光弹性元件和应力产生元件的热膨胀光弹性单元，它们彼此紧密接触以产生响应于环境温度变化而变化的光弹性元件中各向异性的应力，如 应力产生元件与光弹性元件的热膨胀系数相差很大。 进一步提供一种元件，用于检测通过光弹性元件的两个正交光分量之间的相位差，所述光弹性元件是应力方向上的一个偏振分量，而另一个分量在垂直于上述应力方向的方向上偏振时，当线偏振光通过 热弹性单元的光弹性元件。 将检测到的相位差转换成显示在显示装置上的温度。

公开(公告)号：US5442445A

公开(公告)日：1995-08-15

申请号：US173879

申请日：1993-12-27

Applicant: Kyoichi Tatsuno ,  Toshiya Umeda ,  Ryoichi Hirano

Inventor： Kyoichi Tatsuno ,  Toshiya Umeda ,  Ryoichi Hirano

IPC: G02B27/42 ,  B23Q15/24 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B11/00

CPC classification number: G03F9/7088 ,  B23Q15/24

Abstract: A registration system for registering a target registration object with respect to a predetermined reference position by using a registration mark formed on the target registration object includes the intensity measurement step of receiving a mark image for a predetermined period of time by a storage type sensor while an area of the target registration object which includes the mark is illuminated, the storage type sensor having elements whose positional relationship is known with respect to the mark image, the process of obtaining a center position of the mark image on the storage type sensor in a positioning direction in accordance with outputs from the elements of the storage type sensor obtained in the intensity measurement step, the distance calculation step of calculating a distance between the reference position and the center position obtained by the process, and the moving step of moving the target registration object by a distance corresponding to the distance obtained in the distance calculation step.

Abstract translation: 用于通过使用形成在目标登记对象上的登记标记来登记目标登记对象的登录系统包括：强度测量步骤，通过存储型传感器接收一段时间的标记图像; 包含标记的目标登记对象的区域被照亮，存储型传感器具有相对于标记图像的位置关系已知的元素，在定位中获取存储型传感器上的标记图像的中心位置的处理 根据在强度测量步骤中获得的存储型传感器的元件的输出，计算基准位置与通过处理获得的中心位置之间的距离的距离计算步骤，以及移动目标登记 对象距离对应于获得的距离 距离计算步骤

公开(公告)号：US4940326A

公开(公告)日：1990-07-10

申请号：US355827

申请日：1989-05-22

Applicant: Kyoichi Tatsuno

Inventor： Kyoichi Tatsuno

IPC: G01B11/10 ,  G01N15/02 ,  G01N15/14

CPC classification number: G01N15/0205 ,  G01N15/14 ,  G01N2015/0238

Abstract: An optical system for irradiation comprising a light source, a lens, an optical fiber, a rectangular waveguide, an objective lens and a prism and an optical system for receiving light comprising an objective lens, an aperture and an optical fiber are arranged with their optical axes intersecting one another at a point P in a measuring volume. In the optical system for irradiation, the light emitted from the optical fiber and having an intensity distribution expressed by a normal distribution curve is changed to a light having a uniform intensity distribution and a rectangular cross section, which is irradiated through the prism to the point p in the measuring volume. A light scattered at an angle of 90.degree. by a particle flowing through the measuring volume is guided through the optical system for receiving light to a photodetector which converts the scattered light to an electric signal (current) called a scattered light pulse. An arithmetic unit calculates the particle size from the height of this scatterd light pulse and the flow speed from the pulse width.

Abstract translation: 用于照射的光学系统包括光源，透镜，光纤，矩形波导，物镜和棱镜以及用于接收包括物镜，孔径和光纤的光的光学系统，其光学 轴在测量体积中的点P彼此相交。 在用于照射的光学系统中，从光纤发射并具有由正态分布曲线表示的强度分布的光变为具有均匀的强度分布和矩形截面的光，其通过棱镜照射到点 p在测量体积。 通过流过测量体积的颗粒以90°的角度散射的光被引导通过用于将光接收到光电检测器的光学系统，光电检测器将散射光转换成称为散射光脉冲的电信号（电流）。 算术单元根据该散射光脉冲的高度和从脉冲宽度的流速计算粒度。

公开(公告)号：US4801205A

公开(公告)日：1989-01-31

申请号：US739283

申请日：1985-05-30

Applicant: Kyoichi Tatsuno

Inventor： Kyoichi Tatsuno

IPC: G01N15/02 ,  G01B11/08

CPC classification number: G01N15/0211

Abstract: A particle size measuring apparatus irradiates a number of particles to be measured with a laser beam, measures a light intensity pattern scattered by the particles to be measured, and calculates a relative particle size distribution of the particles to be measured from the measured value obtained. The apparatus has a laser unit, a collimator lens for collimating a laser beam from the laser unit into a parallel laser beam and irradiating the particles to be measured with the parallel laser beam, an optical shield, interposed between the collimator lens and the particles to be measured, for shielding scattered light by the collimator lens and allowing passage of only parallel components of the laser beam, a detecting section consisting of a plurality of optical fibers arranged at an equal distance from a measurement region and at predetermined scattering angles and photodetectors connected thereto, and an arithmetic operating circuit for calculating a relative particle size distribution of the particles to be measured from the scattered light intensity pattern detected by the detecting section.

Abstract translation: 粒径测量装置用激光束照射多个测量颗粒，测量被测量颗粒散射的光强度图案，并根据获得的测量值计算待测颗粒的相对粒度分布。 该装置具有：激光单元，准直透镜，用于将来自激光单元的激光束准直成平行的激光束，并用平行的激光束照射被测量的粒子;插入准直透镜与粒子之间的光学屏蔽; 被测量，用于通过准直透镜遮蔽散射光并允许仅激光束的平行部件通过，检测部分由与测量区域等距离并且以预定散射角布置的多个光纤组成，并且光电检测器连接 以及算术运算电路，用于根据由检测部检测的散射光强度图案计算待测颗粒的相对粒度分布。

公开(公告)号：US4779003A

公开(公告)日：1988-10-18

申请号：US29963

申请日：1987-03-25

Applicant: Kyoichi Tatsuno

Inventor： Kyoichi Tatsuno

IPC: G01N15/00 ,  G01N15/02

CPC classification number: G01N15/0211 ,  G01N2015/0026 ,  G01N2021/4719

Abstract: A droplet size measuring apparatus of the forward scattering method, wherein particles to be measured in a scattering zone having a predetermined scattering path length are irradiated with parallel laser beams. The irradiated beams are scattered by the particles and the scattering beams are detected by the photodetectors arranged at predetermined scattering angles. The output of the photodetectors are input to an arithmetic operating unit, thus the intensity distribution I(.theta.) of the scattered beams is measured. The droplet size distribution n(D) is calculated from the intensity distribution I(.theta.) using the following equation:I(.theta.)=.intg.{I.sub.0 exp(-l.intg.c(D)n(D)dD..intg.i(D,.theta.+.theta..sub.l)n(D)d(D)}dl

Abstract translation: 前向散射法的液滴尺寸测量装置，其中在具有预定散射路径长度的散射区域中被测量的颗粒被照射平行激光束。 照射的光束被颗粒散射，并且散射光束以预定散射角布置的光电检测器被检测。 光电检测器的输出被输入到算术运算单元，因此测量散射光束的强度分布I（θ）。 使用以下等式从强度分布I（θ）计算液滴尺寸分布n（D）：I（θ）= INTEGRAL {I0 exp（-l INTEGRAL c（D）n（D）dD。INTEGRAL i ，θ+θl）n（D）d（D）} dl