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    Method of improving on-chip power inductor performance in DC-DC regulators
    4.
    发明授权
    Method of improving on-chip power inductor performance in DC-DC regulators 有权
    提高DC-DC调节器片上功率电感性能的方法

    公开(公告)号：US07351593B1

    公开(公告)日：2008-04-01

    申请号：US11137767

    申请日：2005-05-25

    申请人： Peter Johnson ,  Peter J. Hopper ,  Kyuwoon Hwang ,  Robert Drury

    发明人： Peter Johnson ,  Peter J. Hopper ,  Kyuwoon Hwang ,  Robert Drury

    IPC分类号： H01L21/00 ,  H01L29/76

    CPC分类号： H02M7/003

    摘要： A method is provided for forming the ferromagnetic core of an on-chip inductor structure. In accordance with the method, a static, permanent magnet is placed in proximity to a semiconductor wafer upon which the ferromagnetic core is being electroplated. The permanent magnet is place such that the magnetic field is orthogonal to the wafer. The “easy” axis material is that plated parallel parallel to the magnet's field and saturates at a lower applied field. The “hard” axis is that plated perpendicular to the applied magnetic filed and saturates later, at a higher current level. This plating approach results in optimum magnetic alignment of the ferromagnetic core so as to maximize both the field strength/magnetic flux slope and magnitude before magnetic material saturation occurs.

    摘要翻译： 提供一种用于形成片上电感器结构的铁磁芯的方法。 根据该方法，将静电永磁体放置在电磁铁芯的半导体晶片附近。 永磁体的位置使得磁场与晶片正交。 “易”轴材料是平行于磁体的磁场平行并在较低的应用场饱和。 “硬”轴垂直于所施加的磁场进行电镀，并在较高的电流水平下饱和。 这种电镀方法导致铁磁芯的最佳磁对准，以便在磁性材料饱和发生之前使场强/磁通斜率和幅度最大化。

    Patterned magnetic layer on-chip inductor
    7.
    发明授权
    Patterned magnetic layer on-chip inductor 有权
    图案磁性层片上电感

    公开(公告)号：US07463131B1

    公开(公告)日：2008-12-09

    申请号：US11111660

    申请日：2005-04-21

    申请人： Kyuwoon Hwang ,  Peter J. Hopper ,  Robert Drury ,  Peter Johnson

    发明人： Kyuwoon Hwang ,  Peter J. Hopper ,  Robert Drury ,  Peter Johnson

    IPC分类号： H01F5/00

    CPC分类号： H02M7/003 ,  H01F1/14708 ,  H01F17/0006 ,  H01F17/04 ,  H01F2017/0066 ,  H01F2017/008 ,  H01L23/5227 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An on-chip inductor structure includes top and bottom metal plates that are formed to surround a conductor coil formed between the top and bottom plates, but is separated therefrom by intervening dielectric material. The top and bottom plates are preferably formed from a ferromagnetic alloy, e.g. Permalloy, and are subdivided into a plurality of space-apart segments, thereby reducing eddy currents. The number of segments is optimized based upon the process technology utilized to fabricate the structure. Preferably, a finite gap is formed between the top plate and the bottom plate, the height of the gap being chosen to adjust the total inductance of the structure.

    摘要翻译： 片上电感器结构包括顶部和底部金属板，其形成为围绕形成在顶板和底板之间的导体线圈，但是通过介入材料与其分离。 顶板和底板优选地由铁磁合金形成，例如， 坡莫合金，并且被细分为多个间隔开的段，从而减少涡流。 基于用于制造结构的工艺技术来优化段的数量。 优选地，在顶板和底板之间形成有限的间隙，选择间隙的高度来调节结构的总电感。