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公开(公告)号:US20180240917A1
公开(公告)日:2018-08-23
申请号:US15794430
申请日:2017-10-26
Applicant: LG ELECTRONICS INC.
Inventor: Hyunjin KIM , Daeyeong GONG , Bokyeom CHOI
IPC: H01L31/0216 , H01L31/028 , H01L21/02
CPC classification number: H01L31/02167 , H01L21/02164 , H01L21/02236 , H01L31/028 , H01L31/1804 , H01L31/1864 , H01L31/1868 , H01L31/1876 , Y02E10/547 , Y02P70/521
Abstract: A method of manufacturing an oxidation layer for a solar cell is disclosed. The method includes exposing a substrate to a wet oxidation atmosphere and forming an oxidation layer on the substrate by maintaining a concentration of an oxidizing agent in the wet oxidation atmosphere for a process time.