公开(公告)号：US09640673B2

公开(公告)日：2017-05-02

申请号：US14295662

申请日：2014-06-04

Applicant: LG ELECTRONICS INC.

Inventor： Hayan Baek ,  Junghoon Choi ,  Goohwan Shim

IPC: H01L31/18 ,  H01L31/0224 ,  H01L31/068 ,  H01L31/072

CPC classification number: H01L31/022425 ,  H01L31/02167 ,  H01L31/022441 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/072 ,  H01L31/18 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: The manufacturing method of a solar cell includes forming a photoelectric conversion unit and forming an electrode connected to the photoelectric conversion unit. The step of forming the electrode includes forming a seed formation layer connected to the photoelectric conversion unit, forming an anti-oxidation layer on the seed formation layer, performing a thermal process such that a material of the seed formation layer and a material of the photoelectric conversion unit react with each other to form a chemical bonding layer at a portion at which the seed formation layer and the photoelectric conversion unit are adjacent to each other, forming a conductive layer and a capping layer on the seed formation layer in a state in which a mask is used on the seed formation layer, and patterning the seed formation layer using either the conductive layer or the capping layer as a mask.