CHEMICAL SENSOR WITH AIR VIA
    1.
    发明申请

    公开(公告)号:US20220196595A1

    公开(公告)日:2022-06-23

    申请号:US17570273

    申请日:2022-01-06

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

    CHEMICAL SENSOR WITH AIR VIA
    3.
    发明申请

    公开(公告)号:US20200049655A1

    公开(公告)日:2020-02-13

    申请号:US16544106

    申请日:2019-08-19

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

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