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    DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME
    2.
    发明申请
    DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME 有权

    公开(公告)号：US20210102917A1

    公开(公告)日：2021-04-08

    申请号：US17088347

    申请日：2020-11-03

    Applicant: Life Technologies Corporation

    Inventor： Jeremy GRAY ,  Jordan OWENS ,  James BUSTILLO

    IPC: G01N27/414 ,  H01L29/423

    Abstract: An apparatus includes a substrate; a gate structure disposed over the substrate and having an upper surface; a well structure disposed over the substrate and defining a well over the upper surface of the gate structure; a conductive layer disposed on the upper surface of the gate structure and at least partially extending along a wall of the well in the well structure; and a dielectric structure disposed over the well structure and defining an opening to the well.

    DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME
    5.
    发明申请
    DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME 审中-公开
    DEEP MICROWELL设计及其制造方法

    公开(公告)号：US20170059517A1

    公开(公告)日：2017-03-02

    申请号：US15247288

    申请日：2016-08-25

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： James BUSTILLO ,  Jeremy GRAY ,  Jordan OWENS

    IPC: G01N27/414 ,  H01L29/423

    CPC classification number: G01N27/4148 ,  G01N27/4145 ,  H01L29/42324

    Abstract: An apparatus includes a substrate; a gate structure disposed over the substrate and having an upper surface; a well structure disposed over the substrate and defining a well over the upper surface of the gate structure; a conductive layer disposed on the upper surface of the gate structure and at least partially extending along a wall of the well in the well structure; and a dielectric structure disposed over the well structure and defining an opening to the well.

    Abstract translation: 一种装置包括：基板; 栅极结构，设置在所述衬底上并具有上表面; 设置在所述衬底上并且在所述栅极结构的上表面上限定阱的阱结构; 导电层，其设置在所述栅极结构的上表面上，并且至少部分地沿所述阱在所述阱结构中的壁延伸; 以及设置在所述阱结构上并且限定到所述阱的开口的电介质结构。

    CHEMICALLY-SENSITIVE SAMPLE AND HOLD SENSORS
    6.
    发明申请
    CHEMICALLY-SENSITIVE SAMPLE AND HOLD SENSORS 有权
    化学敏感样品和保持传感器

    公开(公告)号：US20130292743A1

    公开(公告)日：2013-11-07

    申请号：US13923282

    申请日：2013-06-20

    Applicant: Life Technologies Corporation

    Inventor： Jonathan M. ROTHBERG ,  Wolfgang HINZ ,  Kim L. JOHNSON ,  James BUSTILLO

    IPC: H01L27/088

    CPC classification number: G01N27/4148 ,  C12Q1/6818 ,  C12Q1/6874 ,  G01N27/4145 ,  G01N33/54373 ,  G01N33/5438 ,  H01L27/088 ,  H01L29/42324 ,  H01L29/78 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01073 ,  H01L2924/14 ,  H01L2924/1433 ,  Y10T436/22 ,  C12Q2565/607 ,  C12Q2565/301 ,  C12Q2533/101

    Abstract: Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.

    Abstract translation: 与用于分析物测量的非常大规模的FET阵列相关的方法和装置。 可以使用基于提高测量灵敏度和精度的改进的FET像素和阵列设计的传统CMOS处理技术来制造ChemFET（例如，ISFET）阵列，并且同时促进显着小的像素尺寸和致密阵列。 改进的阵列控制技术提供了从大型和密集阵列的快速数据采集。 可以使用这样的阵列来检测各种化学和/或生物过程中各种分析物类型的存在和/或浓度变化。 在一个实例中，chemFET阵列基于监测氢离子浓度（pH），其他分析物浓度变化和/或与DNA合成相关的化学过程相关联的结合事件的变化来促进DNA测序技术。

    CHEMICAL SENSOR WITH AIR VIA
    7.
    发明申请
    CHEMICAL SENSOR WITH AIR VIA 审中-公开

    公开(公告)号：US20200049655A1

    公开(公告)日：2020-02-13

    申请号：US16544106

    申请日：2019-08-19

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： James LI ,  Jordan OWENS ,  James BUSTILLO

    IPC: G01N27/414 ,  G01N27/12

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

    METHODS FOR MANUFACTURING WELL STRUCTURES FOR LOW-NOISE CHEMICAL SENSORS
    8.
    发明申请
    METHODS FOR MANUFACTURING WELL STRUCTURES FOR LOW-NOISE CHEMICAL SENSORS 审中-公开

    公开(公告)号：US20180217091A1

    公开(公告)日：2018-08-02

    申请号：US15826627

    申请日：2017-11-29

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Shifeng LI ,  James BUSTILLO

    IPC: G01N27/414

    CPC classification number: G01N27/414 ,  G01N27/4145 ,  G01N27/4148

    Abstract: In one implementation, a method for manufacturing a chemical detection device is described. The method includes forming a chemical sensor having a sensing surface. A dielectric material is deposited on the sensing surface. A first etch process is performed to partially etch the dielectric material to define an opening over the sensing surface and leave remaining dielectric material on the sensing surface. An etch protect material is formed on a sidewall of the opening. A second etch process is then performed to selectively etch the remaining dielectric material using the etch protect material as an etch mask, thereby exposing the sensing surface.

    CHEMICAL DEVICE WITH THIN CONDUCTIVE ELEMENT
    9.
    发明申请
    CHEMICAL DEVICE WITH THIN CONDUCTIVE ELEMENT 有权
    具有薄导电元件的化学器件

    公开(公告)号：US20160153930A1

    公开(公告)日：2016-06-02

    申请号：US15014802

    申请日：2016-02-03

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

    IPC: G01N27/414

    CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

    Abstract: In one implementation, a chemical device is described. The sensor includes a chemically-sensitive field effect transistor including a floating gate structure having a plurality of floating gate conductors electrically coupled to one another. A conductive element overlies and is in communication with an uppermost floating gate conductor in the plurality of floating gate conductors. The conductive element is wider and thinner than the uppermost floating gate conductor. A dielectric material defines an opening extending to an upper surface of the conductive element.

    Abstract translation: 在一个实施方式中，描述了化学装置。 传感器包括化学敏感的场效应晶体管，其包括具有彼此电耦合的多个浮置栅极导体的浮动栅极结构。 导电元件覆盖并与多个浮置栅极导体中的最上面的浮动栅极导体连通。 导电元件比最上面的浮栅导体更宽和更薄。 介电材料限定了延伸到导电元件的上表面的开口。

    INTEGRATED SENSOR ARRAYS FOR BIOLOGICAL AND CHEMICAL ANALYSIS
    10.
    发明申请
    INTEGRATED SENSOR ARRAYS FOR BIOLOGICAL AND CHEMICAL ANALYSIS 审中-公开

    公开(公告)号：US20160011145A1

    公开(公告)日：2016-01-14

    申请号：US14863718

    申请日：2015-09-24

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Jonathan M. ROTHBERG ,  James BUSTILLO ,  Mark James MILGREW ,  Jonathan SCHULTZ ,  David MARRAN ,  Todd REARICK ,  Kim L. JOHNSON

    IPC: G01N27/414 ,  C12Q1/68

    CPC classification number: G01N27/4145 ,  C12Q1/6869 ,  C12Q1/6874 ,  G01N27/4148 ,  H01L21/82 ,  C12Q2565/607

    Abstract: The invention is directed to apparatus and chips comprising a large scale chemical field effect transistor arrays that include an array of sample-retaining regions capable of retaining a chemical or biological sample from a sample fluid for analysis. In one aspect such transistor arrays have a pitch of 10 μm or less and each sample-retaining region is positioned on at least one chemical field effect transistor which is configured to generate at least one output signal related to a characteristic of a chemical or biological sample in such sample-retaining region. In one embodiment, the characteristic of said chemical or biological sample is a concentration of a charged species and wherein each of said chemical field effect transistors is an ion-sensitive field effect transistor having a floating gate with a dielectric layer on a surface thereof, the dielectric layer contacting said sample fluid and being capable of accumulating charge in proportion to a concentration of the charged species in said sample fluid. In one embodiment such charged species is a hydrogen ion such that the sensors measure changes in pH of the sample fluid in or adjacent to the sample-retaining region thereof. Apparatus and chips of the invention may be adapted for large scale pH-based DNA sequencing and other bioscience and biomedical applications.

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