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公开(公告)号:US20170278739A1
公开(公告)日:2017-09-28
申请号:US15466369
申请日:2017-03-22
Applicant: LINTEC Corporation
Inventor: Takashi AKUTSU , Takuo NISHIDA
IPC: H01L21/683 , B32B27/06 , B32B7/12 , C09J7/02 , C09J133/08
CPC classification number: H01L21/6836 , B32B7/06 , B32B7/12 , B32B23/08 , B32B25/08 , B32B27/06 , B32B27/08 , B32B27/16 , B32B27/286 , B32B27/302 , B32B27/304 , B32B27/308 , B32B27/32 , B32B27/325 , B32B27/36 , B32B27/365 , B32B27/40 , B32B2250/02 , B32B2250/24 , B32B2255/10 , B32B2255/26 , B32B2255/28 , B32B2307/732 , B32B2307/748 , B32B2457/14 , C08L33/08 , C09J5/00 , C09J7/22 , C09J7/38 , C09J133/064 , C09J133/08 , C09J133/26 , C09J2201/606 , C09J2201/622 , C09J2203/326 , C09J2205/302 , C09J2205/31 , C09J2433/00 , H01L2221/68327 , H01L2221/6834
Abstract: The semiconductor processing sheet of the present invention is a semiconductor processing sheet including a base material and a pressure sensitive adhesive layer provided on one surface of the base material, wherein the pressure sensitive adhesive layer contains an acrylic polymer (A) having a molecular weight distribution of 3.0 or less and an acrylic polymer (B) having a molecular weight distribution of more than 3.0; and a gel fraction of the pressure sensitive adhesive layer is 50 to 70%, and a number average molecular weight of a sol content thereof is 60,000 or more.
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公开(公告)号:US20180286736A1
公开(公告)日:2018-10-04
申请号:US15764377
申请日:2016-03-28
Applicant: LINTEC CORPORATION
Inventor: Yasuhiko KAKIUCHI , Takashi AKUTSU , Sayaka BANDOU , Yuichiro KOMASU
IPC: H01L21/683 , C09J7/38 , C09J7/20
Abstract: The sheet for semiconductor processing of the present invention includes a base, an unevenness-absorbing layer provided on one surface of the base, and a pressure sensitive adhesive layer provided on the unevenness-absorbing layer, wherein the pressure sensitive adhesive layer is composed of an energy ray-curable pressure sensitive adhesive, and a stress at rupture of the pressure sensitive adhesive layer after energy ray curing is 10 MPa or more.
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