公开(公告)号：US09953946B2

公开(公告)日：2018-04-24

申请号：US15125705

申请日：2015-03-16

Applicant: LINTEC CORPORATION

Inventor： Yuichiro Azuma ,  Hideaki Suzuki ,  Naoya Saiki ,  Yuta Sagawa

IPC: H01L23/00 ,  H01L21/683 ,  C09J7/02 ,  C09J133/06 ,  C09J133/12

CPC classification number: H01L24/29 ,  C09J7/38 ,  C09J133/06 ,  C09J133/12 ,  C09J2201/622 ,  C09J2203/326 ,  C09J2205/102 ,  C09J2205/114 ,  C09J2433/00 ,  C09J2461/00 ,  C09J2463/00 ,  H01L21/6836 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/94 ,  H01L2221/68327 ,  H01L2221/68377 ,  H01L2221/68386 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/73265 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2224/27 ,  H01L2924/0665 ,  H01L2224/45099

Abstract: A die-bonding layer formation film to be used for fixing a processed product to an adherend, includes an adhesive layer, wherein, the storage elastic modulus has a local minimum value at a temperature within a range of 80° C. to 150° C., wherein the adhesive layer has a shear strength to a peeling strength test substrate of 20 N/2 mm□ [N/(2 mm×2 mm)] or more and 50 N/2 mm□ [N/(2 mm×2 mm)] or less, wherein the shear strength is measured after the processed product is placed above the peeling strength test substrate via the die-bonding layer formation film and the die-bonding layer formation film on the peeling strength test substrate is heated at 175° C. for 1 hour and then further maintained under an environment of 250° C. for 30 seconds. Bubbles (voids) are unlikely to grow at the boundary between the adhesive layer and an adherend even when subjected to thermal history.