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公开(公告)号：US20220011364A1
公开(公告)日：2022-01-13
申请号：US17294342
申请日：2019-11-20
IPC分类号： G01R31/317 , G01R31/28 , H04W84/18
摘要： Various embodiments include methods and apparatuses to test production tools and related electrical components therefor including individual printed-circuit boards (PCBs). In one example, a test-plug hardware-platform includes at least one input/output (I/O) connector, and a configurable control system to provide command and operational signals through the I/O connector and collect data through the I/O connector from at least one PCB under test. A wireless-mesh network within the test-plug hardware-platform can interface wirelessly with at least the PCB under test. The at least one PCB operating within a production tool or other piece of equipment. Other methods and systems are disclosed.
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公开(公告)号：US20170352461A1
公开(公告)日：2017-12-07
申请号：US15173568
申请日：2016-06-03
发明人： Devon Pelkey , Dirk Rudolph
CPC分类号： H01F7/064 , F02D41/20 , F16K31/0675 , H01F7/18 , H01F7/1816 , H01F2007/1822
摘要： A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.
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公开(公告)号：US11853026B2
公开(公告)日：2023-12-26
申请号：US17052778
申请日：2019-05-06
发明人： Eric Tu , Dirk Rudolph , Ales Janhar , John Folden Stumpf , Justin Remulla
IPC分类号： G05B19/05 , G05B19/042
CPC分类号： G05B19/058 , G05B19/0421 , G05B19/0425 , G05B19/0426
摘要： Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.
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公开(公告)号：US10294560B2
公开(公告)日：2019-05-21
申请号：US14016720
申请日：2013-09-03
发明人： Dirk Rudolph , Antonio Xavier
摘要： A throttle valve includes a throttle body including a housing having an inner surface. The throttle body includes first and second stop surfaces arranged on the inner surface. A throttle plate is rotatable inside the housing of the throttle body about a shaft between closed and open positions. A first projection is located on a first surface of the throttle plate adjacent to a radially outer end of the throttle plate. A second projection is located on a second surface of the throttle plate adjacent to a radially outer end of the throttle plate. The second surface is opposite the first surface. The first and second projections extend outwardly from the throttle plate in opposite directions and in corresponding directions of rotational movement of the throttle plate during closing to bias against the second stop surface when the throttle valve is closed.
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公开(公告)号：US10210977B2
公开(公告)日：2019-02-19
申请号：US15173568
申请日：2016-06-03
发明人： Devon Pelkey , Dirk Rudolph
摘要： A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.
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公开(公告)号：US10770263B2
公开(公告)日：2020-09-08
申请号：US16595351
申请日：2019-10-07
发明人： Dirk Rudolph
IPC分类号： G01R31/40 , H01J37/244 , H01J37/32
摘要： Systems and methods for determining a fault in a gas heater channel are described. One of the methods includes receiving measured parameters associated with a plurality of heater elements of the gas heater channel. The gas heater channel transfers one or more gases from a gas supply to a plasma chamber. The method further includes calculating a measured parallel resistance of the plurality of heater elements from the measured parameters, comparing the measured parallel resistance to an ideal parallel resistance of the heater elements of the gas heater channel, and determining based on the comparison that a portion of the gas heater channel is inoperational. The method includes selecting an identity of one of the heater elements from a correspondence between a plurality of identities of the heater elements and the measured parallel resistance.
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公开(公告)号：US10453651B2
公开(公告)日：2019-10-22
申请号：US15965497
申请日：2018-04-27
发明人： Dirk Rudolph
IPC分类号： G01R31/40 , H01J37/244 , H01J37/32
摘要： Systems and methods for determining a fault in a gas heater channel are described. One of the methods includes receiving measured parameters associated with a plurality of heater elements of the gas heater channel. The gas heater channel transfers one or more gases from a gas supply to a plasma chamber. The method further includes calculating a measured parallel resistance of the plurality of heater elements from the measured parameters, comparing the measured parallel resistance to an ideal parallel resistance of the heater elements of the gas heater channel, and determining based on the comparison that a portion of the gas heater channel is inoperational. The method includes selecting an identity of one of the heater elements from a correspondence between a plurality of identities of the heater elements and the measured parallel resistance.
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公开(公告)号：US09960009B2
公开(公告)日：2018-05-01
申请号：US14802876
申请日：2015-07-17
发明人： Dirk Rudolph
IPC分类号： G01R19/25 , H01J37/244
CPC分类号： H01J37/244 , H01J37/3244 , H01J37/32449 , H01J37/32522 , H01J37/32926 , H01J37/3299 , H01J2237/24564
摘要： Systems and methods for determining a fault in a gas heater channel are described. One of the methods includes receiving measured parameters associated with a plurality of heater elements of the gas heater channel. The gas heater channel transfers one or more gases from a gas supply to a plasma chamber. The method further includes calculating a measured parallel resistance of the plurality of heater elements from the measured parameters, comparing the measured parallel resistance to an ideal parallel resistance of the heater elements of the gas heater channel, and determining based on the comparison that a portion of the gas heater channel is inoperational. The method includes selecting an identity of one of the heater elements from a correspondence between a plurality of identities of the heater elements and the measured parallel resistance.
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公开(公告)号：US20170018401A1
公开(公告)日：2017-01-19
申请号：US14802876
申请日：2015-07-17
发明人： Dirk Rudolph
IPC分类号： H01J37/244 , G01R31/02
CPC分类号： H01J37/244 , H01J37/3244 , H01J37/32449 , H01J37/32522 , H01J37/32926 , H01J37/3299 , H01J2237/24564
摘要： Systems and methods for determining a fault in a gas heater channel are described. One of the methods includes receiving measured parameters associated with a plurality of heater elements of the gas heater channel. The gas heater channel transfers one or more gases from a gas supply to a plasma chamber. The method further includes calculating a measured parallel resistance of the plurality of heater elements from the measured parameters, comparing the measured parallel resistance to an ideal parallel resistance of the heater elements of the gas heater channel, and determining based on the comparison that a portion of the gas heater channel is inoperational. The method includes selecting an identity of one of the heater elements from a correspondence between a plurality of identities of the heater elements and the measured parallel resistance.
摘要翻译： 描述了用于确定气体加热器通道中的故障的系统和方法。 其中一种方法包括接收与气体加热器通道的多个加热器元件相关联的测量参数。 气体加热器通道将一种或多种气体从气体供给传送到等离子体室。 该方法还包括根据测量的参数计算多个加热器元件的测量的并联电阻，将所测量的并联电阻与气体加热器通道的加热器元件的理想平行电阻进行比较，并且基于比较来确定一部分 燃气加热器通道不工作。 该方法包括从加热器元件的多个身份与所测量的并联电阻之间的对应关系中选择一个加热元件的标识。
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公开(公告)号：US12000887B2
公开(公告)日：2024-06-04
申请号：US17294342
申请日：2019-11-20
IPC分类号： G01R31/317 , G01R31/28 , H04W84/18
CPC分类号： G01R31/31713 , G01R31/2806 , H04W84/18
摘要： Various embodiments include methods and apparatuses to test production tools and related electrical components therefor including individual printed-circuit boards (PCBs). In one example, a test-plug hardware-platform includes at least one input/output (I/O) connector, and a configurable control system to provide command and operational signals through the I/O connector and collect data through the I/O connector from at least one PCB under test. A wireless-mesh network within the test-plug hardware-platform can interface wirelessly with at least the PCB under test. The at least one PCB operating within a production tool or other piece of equipment. Other methods and systems are disclosed.
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