公开(公告)号：US20230366089A1

公开(公告)日：2023-11-16

申请号：US18029641

申请日：2021-10-08

Applicant: Lam Research Corporation

Inventor： Shriram Vasant Bapat ,  Pankaj Ghanshyam Ramnani ,  Brian Joseph Williams ,  Christopher Matthew Jones ,  Curtis W. Bailey ,  Emile Draper ,  Nagraj Shankar

IPC: C23C16/455 ,  C23C16/505

CPC classification number: C23C16/45565 ,  C23C16/505

Abstract: In some examples, a faceless showerhead comprises a body including a backing plate, the body devoid of a faceplate or plenum; a gas supply stem to admit gas into the showerhead; and a baffle supported adjacent the backing plate or the gas supply stem. The faceless showerhead may further comprise at least one support element for supporting the baffle in a baffle cavity in the backing plate or the gas supply stem.

公开(公告)号：US20240360921A1

公开(公告)日：2024-10-31

申请号：US18682020

申请日：2022-08-09

Applicant: Lam Research Corporation

Inventor： Rigel Martin Bruening ,  Emile Draper

IPC: F16K37/00 ,  H01L21/67

CPC classification number: F16K37/0083 ,  H01L21/67017

Abstract: An auto bit check feature for pneumatic valve verification as coupled with a gas line that may be coupled with a semiconductor device process chamber. The gas line can be charged to keep a connected valve closed, where activation of a solenoid forces the gas to bleed out and open the valve. The pneumatic gas line may be is purged to keep a connected valve closed, where activation of the solenoid forces gas to flow in the line and apply a pressure to open the valve. One or more airlines may be coupled between solenoid and the valve, depending on the type of solenoid and/or valve. Described is a method to auto verify that a valve is correctly connected to a specific solenoid in a pneumatic bank. The method can enable verification that a particular solenoid opens a desired valve.

公开(公告)号：US20220208575A1

公开(公告)日：2022-06-30

申请号：US17604934

申请日：2020-04-14

Applicant: Lam Research Corporation

Inventor： Miguel Benjamin Vasquez ,  Emile Draper

IPC: H01L21/67 ,  H01L21/677

Abstract: A foreline assembly for a quad station process module (QSM) is provided. In some examples, a foreline assembly comprises four inlets each connectable to a chamber port of a process module of the QSM and an outlet connectable directly or indirectly to a vacuum source. A first foreline bifurcation is disposed proximate the outlet of the foreline assembly. Two second bifurcations are each disposed between the first foreline bifurcation and a respective pair of the inlets. The first and second bifurcations divide the foreline assembly into three sections. A respective diameter of a foreline in each section increases stepwise at a respective bifurcation in a direction of gas flow from at least one of the inlets to the outlet of the foreline assembly and is constant within a respective section of the foreline assembly.