公开(公告)号：US20240331976A1

公开(公告)日：2024-10-03

申请号：US18740449

申请日：2024-06-11

申请人： Lam Research Corporation

发明人： Ying Wu ,  John Stephen Drewery ,  Alexander Miller Paterson ,  Xiang Zhou ,  Zhuoxian Wang ,  Yoshie Kimura

IPC分类号： H01J37/32

CPC分类号： H01J37/32146 ,  H01J37/32174 ,  H01J37/32091 ,  H01J37/321 ,  H01J2237/334

摘要： Systems and methods for synchronization of radio frequency (RF) generators are described. One of the methods includes receiving, by a first RF generator, a first recipe set, which includes information regarding a first plurality of pulse blocks for operating the first RF generator. The method further includes receiving, by a second RF generator, a second recipe set, which includes information regarding a second plurality of pulse blocks for operating a second RF generator. Upon receiving a digital pulsed signal, the method includes executing the first recipe set and executing the second recipe set. The method further includes outputting a first one of the pulse blocks of the first plurality based on the first recipe set in synchronization with a synchronization signal. The method includes outputting a first one of the pulse blocks of the second plurality based on the second recipe set in synchronization with the synchronization signal.

公开(公告)号：US12046450B2

公开(公告)日：2024-07-23

申请号：US18012212

申请日：2021-09-24

申请人： Lam Research Corporation

发明人： Ying Wu ,  John Stephen Drewery ,  Alexander Miller Paterson ,  Xiang Zhou ,  Zhuoxian Wang ,  Yoshie Kimura

IPC分类号： H01J37/32

CPC分类号： H01J37/32146 ,  H01J37/32174 ,  H01J37/32091 ,  H01J37/321 ,  H01J2237/334

摘要： Systems and methods for synchronization of radio frequency (RF) generators are described. One of the methods includes receiving, by a first RF generator, a first recipe set, which includes information regarding a first plurality of pulse blocks for operating the first RF generator. The method further includes receiving, by a second RF generator, a second recipe set, which includes information regarding a second plurality of pulse blocks for operating a second RF generator. Upon receiving a digital pulsed signal, the method includes executing the first recipe set and executing the second recipe set. The method further includes outputting a first one of the pulse blocks of the first plurality based on the first recipe set in synchronization with a synchronization signal. The method includes outputting a first one of the pulse blocks of the second plurality based on the second recipe set in synchronization with the synchronization signal.

公开(公告)号：US20230274913A1

公开(公告)日：2023-08-31

申请号：US18012212

申请日：2021-09-24

申请人： Lam Research Corporation

发明人： Ying Wu ,  John Stephen Drewery ,  Alexander Miller Paterson ,  Xiang Zhou ,  Zhuoxian Wang ,  Yoshie Kimura

IPC分类号： H01J37/32

CPC分类号： H01J37/32146 ,  H01J2237/334 ,  H01J37/32091 ,  H01J37/321

摘要： Systems and methods for synchronization of radio frequency (RF) generators are described. One of the methods includes receiving, by a first RF generator, a first recipe set, which includes information regarding a first plurality of pulse blocks for operating the first RF generator. The method further includes receiving, by a second RF generator, a second recipe set, which includes information regarding a second plurality of pulse blocks for operating a second RF generator. Upon receiving a digital pulsed signal, the method includes executing the first recipe set and executing the second recipe set. The method further includes outputting a first one of the pulse blocks of the first plurality based on the first recipe set in synchronization with a synchronization signal. The method includes outputting a first one of the pulse blocks of the second plurality based on the second recipe set in synchronization with the synchronization signal.