公开(公告)号：US20020101900A1

公开(公告)日：2002-08-01

申请号：US10001217

申请日：2001-11-30

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Gongxue Hua

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/106 ,  H01S3/2258

Abstract: A molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator for generating an output beam. The resonator includes at least one wavelength selection optic for selecting a primary line among multiple characteristic photoemission lines around 157 nm including suppressing a secondary line among the plurality of characteristic photoemission lines around 157 nm to below 1%. The resonator further includes at least one polarizing optic for polarizing the selected line so that the output beam has a polarization of at least substantially 95%, and preferably 97.5% or more.

Abstract translation: 分子氟激光系统包括：填充有至少包括分子氟和缓冲气体的气体混合物的放电室，放电室内的多个电极并连接到用于激励气体混合物的放电电路，以及用于产生输出光束的谐振器 。 谐振器包括至少一个波长选择光学器件，用于在157nm以下的多个特征光发射线中选择一条主线，包括抑制157nm附近的多个特征光电子发射线中的次级线至低于1％。 谐振器还包括至少一个偏振光学器件，用于偏振所选择的线，使得输出光束具有至少大致为95％，优选为97.5％或更大的极化。