公开(公告)号：US20020105995A1

公开(公告)日：2002-08-08

申请号：US10036848

申请日：2001-11-06

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Gonxue Hua

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/106 ,  H01S3/2258

Abstract: A molecular fluorine laser system for generating a laser output beam around 157 nm includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator. The resonator includes at least one optic for selecting a primary line including suppressing a secondary line among multiple characteristic photoemission lines around 157 nm. The same or a different optic, which may be intracavity or alternatively extracavity, may be configured for polarizing the selected line so that the output beam has a polarization of at least substantially 95% when the beam exits the laser system.

Abstract translation: 用于产生约157nm的激光输出光束的分子氟激光系统包括：填充有分子氟和缓冲气体的气体混合物的放电室，放电室内的多个电极，并连接到用于激发气体混合物的放电电路;以及 谐振器。 谐振器包括至少一个用于选择主线的光学器件，包括抑制157nm附近的多个特征光电子发射线中的次级线。 可以将相同或不同的光学元件（其可以是腔内或可选地为外腔）配置为使所选择的线偏振，使得当光束离开激光系统时，输出光束具有至少基本上95％的偏振。