公开(公告)号：US20020031157A1

公开(公告)日：2002-03-14

申请号：US09842281

申请日：2001-04-24

Applicant: Lambda Physik AG

Inventor： Peter Heist ,  Matthias Kramer ,  Juergen Kleinschmidt ,  Sergei Govorkov ,  Marcus Serwazi ,  Thomas Junemann

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

Abstract translation: 准分子或分子氟激光系统包括包含气体混合物的放电室，连接到用于激励气体混合物的电源电路的多个电极，用于产生激光束的谐振器，处理器和用于监测放大的自发发射的装置 ASE）信号，例如优选ASE检测器。 处理器从优选的ASE检测器接收指示激光的ASE信号的信号。 基于来自ASE检测器的信号，处理器确定是否启动用于调整激光系统的参数的响应动作。