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公开(公告)号：US07801713B1
公开(公告)日：2010-09-21
申请号：US11561245
申请日：2006-11-17
CPC分类号： G01B11/0625 , G01B11/0641 , G01N21/211
摘要： A global node optimization (GNO) technique can generate a model for a planar multiple layer film stack structure, e.g. a binary grating structure. In this technique, after obtaining spectra and target thicknesses from one or more wafers, a continuous film approximation (CFA) and a grating factor (GF) set are identified. A model using the CFA and the GF set is optimized by simultaneously fitting a plurality of the spectra while minimizing error compared to the target thicknesses. After simultaneously fitting all of the spectra, a GNO stack is created. A GNO recipe is then created using the GNO stack. Notably, a tool implementing the GNO technique uses minimal modeling capabilities and computational resources.
摘要翻译： 全局节点优化（GNO）技术可以生成平面多层膜堆叠结构的模型，例如， 二进制光栅结构。 在该技术中，在从一个或多个晶片获得光谱和目标厚度之后，识别连续膜近似（CFA）和光栅因子（GF）集合。 使用CFA和GF集合的模型通过同时拟合多个光谱同时最小化与目标厚度相比的误差而被优化。 在同时拟合所有光谱后，创建GNO堆叠。 然后使用GNO堆栈创建GNO配方。 值得注意的是，实现GNO技术的工具使用最少的建模能力和计算资源。
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公开(公告)号：US07321426B1
公开(公告)日：2008-01-22
申请号：US10859637
申请日：2004-06-02
CPC分类号： G01N21/211 , G01N21/8422
摘要： An optical metrology system includes model approximation logic for generating an optical model based on experimental data. By eliminating theoretical model generation, in which the fundamental equations of a test sample must be solved, the model approximation logic significantly reduces the computational requirements of the metrology system when measuring films formed on patterned base layers. The experimental model can be created by selecting an expected mathematical form for the final model, gathering experimental data, and compiling a lookup model. The lookup model can include the actual measurement data sorted by output (attribute) value, or can include “grating factors” that represent compensation factors that, when applied to standard monolithic model equations, compensate for the optical effects of grating layers.
摘要翻译： 光学测量系统包括用于基于实验数据生成光学模型的模型近似逻辑。 通过消除理论模型生成，其中必须解决测试样本的基本方程，当测量在图案化基底层上形成的膜时，模型近似逻辑显着降低了计量系统的计算要求。 可以通过选择最终模型的预期数学形式，收集实验数据和编译查找模型来创建实验模型。 查找模型可以包括通过输出（属性）值排序的实际测量数据，或者可以包括表示当应用于标准单片模型方程时补偿光栅层的光学效应的补偿因子的“光栅因子”。
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3.发明申请公开(公告)号：US20100318212A1
公开(公告)日：2010-12-16
申请号：US12484902
申请日：2009-06-15
CPC分类号： G01N21/8422 , G01N21/171
摘要： A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.
摘要翻译： 公开了一种用于在薄平面或光栅膜堆叠中有助于测量热光诱导材料相变响应的方法和装置。 该方法可以包括使用小点可见光和紫外光谱（椭偏或反射）来测量材料相变响应。 该装置可以包括测量系统平台，至少一个电阻器，至少一个外部电探针和欧姆接触电路。
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4.发明申请公开(公告)号：US20130035872A1
公开(公告)日：2013-02-07
申请号：US13195063
申请日：2011-08-01
申请人： Carlos L. Ygartua
发明人： Carlos L. Ygartua
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples, measuring the chemical composition of the test samples, performing a processor-based regression analysis to determine an optical state function including correlations between the optical properties of the test samples and the chemical composition of the test samples, fabricating production samples of the stack using the process, measuring the optical properties of the production samples, and estimating the chemical composition of the production samples using the optical state function.
摘要翻译： 一种用于通过用该方法形成的叠层的光学性质来确定化学成分的方法，通过使用已知和有意义的变化制备测试样品以影响化学组成的变化，测量测试样品的光学性质， 测量测试样品的化学成分，执行基于处理器的回归分析以确定包括测试样品的光学性质与测试样品的化学成分之间的相关性的光学状态函数，使用该方法制造堆叠的生产样品 测量生产样品的光学性质，并使用光学状态函数估算生产样品的化学成分。
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5.发明授权公开(公告)号：US08548748B2
公开(公告)日：2013-10-01
申请号：US13195063
申请日：2011-08-01
申请人： Carlos L. Ygartua
发明人： Carlos L. Ygartua
IPC分类号： G01N31/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples, measuring the chemical composition of the test samples, performing a processor-based regression analysis to determine an optical state function including correlations between the optical properties of the test samples and the chemical composition of the test samples, fabricating production samples of the stack using the process, measuring the optical properties of the production samples, and estimating the chemical composition of the production samples using the optical state function.
摘要翻译： 一种用于通过用该方法形成的叠层的光学性质来确定化学成分的方法，通过使用已知和有意义的变化制备测试样品以影响化学组成的变化，测量测试样品的光学性质， 测量测试样品的化学成分，执行基于处理器的回归分析以确定包括测试样品的光学性质与测试样品的化学成分之间的相关性的光学状态函数，使用该方法制造堆叠的生产样品 测量生产样品的光学性质，并使用光学状态函数估算生产样品的化学成分。
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6.发明授权公开(公告)号：US08111384B2
公开(公告)日：2012-02-07
申请号：US12484902
申请日：2009-06-15
IPC分类号： G01B11/16
CPC分类号： G01N21/8422 , G01N21/171
摘要： A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.
摘要翻译： 公开了一种用于在薄平面或光栅膜堆叠中有助于测量热光诱导材料相变响应的方法和装置。 该方法可以包括使用小点可见光和紫外光谱（椭偏或反射）来测量材料相变响应。 该装置可以包括测量系统平台，至少一个电阻器，至少一个外部电探针和欧姆接触电路。
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