Method of modulating resonant frequency of torsional MEMS device
    1.
    发明授权
    Method of modulating resonant frequency of torsional MEMS device 失效
    调制扭转MEMS器件谐振频率的方法

    公开(公告)号:US07938977B2

    公开(公告)日:2011-05-10

    申请号:US12703747

    申请日:2010-02-10

    IPC分类号: C23F1/00 H02K7/00 H02N1/00

    CPC分类号: G02B26/0833

    摘要: A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.

    摘要翻译: 公开了一种扭转MEMS装置。 扭转MEMS装置包括支撑结构,平台和至少两个铰链,其将平台连接到支撑结构。 该平台具有活动区域和非活动区域。 多个牺牲元件设置在非有效区域中。 如果扭转MEMS器件的谐振频率小于扭转MEMS器件的预定标准谐振频率,则去除至少一个牺牲元件以减小扭转MEMS器件的总质量,并且为了增加谐振频率 扭转MEMS器件。

    TORSIONAL MEMS DEVICE
    2.
    发明申请
    TORSIONAL MEMS DEVICE 审中-公开
    扭转MEMS器件

    公开(公告)号:US20100002285A1

    公开(公告)日:2010-01-07

    申请号:US12202312

    申请日:2008-08-31

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0833

    摘要: A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.

    摘要翻译: 公开了一种扭转MEMS装置。 扭转MEMS装置包括支撑结构,平台和至少两个铰链,其将平台连接到支撑结构。 该平台具有活动区域和非活动区域。 多个牺牲元件设置在非有效区域中。 如果扭转MEMS器件的谐振频率小于扭转MEMS器件的预定标准谐振频率,则去除至少一个牺牲元件以减小扭转MEMS器件的总质量,并且为了增加谐振频率 扭转MEMS器件。

    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE
    3.
    发明申请
    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE 审中-公开
    调制扭转MEMS器件的谐振频率的方法

    公开(公告)号:US20100002284A1

    公开(公告)日:2010-01-07

    申请号:US12207495

    申请日:2008-09-09

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0833

    摘要: A method of modulating resonant frequency of a torsional MEMS device is provided. A torsional MEMS device is provided and a resonant frequency test is performed to measure a raw frequency of the torsional MEMS device. If the raw resonant frequency of the torsional MEMS device is greater than a standard resonant frequency, at least one mass increaser is bonded to the torsional MEMS device. Therefore, the raw resonant frequency is reduced as much as the standard resonant frequency.

    摘要翻译: 提供了一种调制扭转MEMS器件的谐振频率的方法。 提供了扭转MEMS器件,并且执行谐振频率测试来测量扭转MEMS器件的原始频率。 如果扭转MEMS器件的原始共振频率大于标准谐振频率,则至少一个质量增量器结合到扭转MEMS器件。 因此,原始谐振频率与标准谐振频率一样降低。

    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE
    4.
    发明申请
    METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE 失效
    调制扭转MEMS器件的谐振频率的方法

    公开(公告)号:US20100134870A1

    公开(公告)日:2010-06-03

    申请号:US12703747

    申请日:2010-02-10

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0833

    摘要: A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.

    摘要翻译: 公开了一种扭转MEMS装置。 扭转MEMS装置包括支撑结构,平台和至少两个铰链,其将平台连接到支撑结构。 该平台具有活动区域和非活动区域。 多个牺牲元件设置在非有效区域中。 如果扭转MEMS器件的谐振频率小于扭转MEMS器件的预定标准谐振频率,则去除至少一个牺牲元件以减小扭转MEMS器件的总质量,并且为了增加谐振频率 扭转MEMS器件。

    External cavity tunable laser system formed from MEMS corner mirror
    5.
    发明授权
    External cavity tunable laser system formed from MEMS corner mirror 失效
    由MEMS角镜形成的外腔可调谐激光系统

    公开(公告)号:US07605970B2

    公开(公告)日:2009-10-20

    申请号:US10977044

    申请日:2004-10-29

    IPC分类号: G02B26/00

    摘要: A tunable laser system is provided. The tunable laser system includes a light source, a grating, a corner mirror array, and a receiver. In which, the light source emits a beam, and the grating is located in front of the light source for reflecting the beam to form a first reflective beam. Also, the corner mirror array is located in front of the grating for receiving the first reflective beam and forms a second reflective beam accordingly. In addition, the receiver is used to receive a third reflective beam formed from reflecting the second reflective beam through the grating.

    摘要翻译: 提供可调激光系统。 可调谐激光系统包括光源,光栅,角镜阵列和接收器。 其中,光源发射光束,并且光栅位于光源的前面,用于反射光束以形成第一反射光束。 此外,角镜阵列位于光栅的前面,用于接收第一反射光束并相应地形成第二反射光束。 此外,接收器用于接收通过将第二反射光束反射通过光栅而形成的第三反射光束。

    Piezoelectric laminate motion sensing apparatus and method

    公开(公告)号:US06998759B2

    公开(公告)日:2006-02-14

    申请号:US09908047

    申请日:2001-07-18

    IPC分类号: H01L41/08

    CPC分类号: H01L41/1132 H01L41/047

    摘要: A motion sensing system utilizing piezoelectric laminates with predetermined surface electrode patterns disposed thereon utilizes a frequency selector to pass motion waves of predetermined frequencies and an electrical circuit for processing the electrical signals for transmission to an activating device for appropriate activation. In particular, the frequency selector is a low frequency bandpass filter for free-fall acceleration wave frequencies. By directing appropriate action, the present invention increases the applicability of the device upon which it is mounted (e.g., for military or other hostile environment use), decreases the possibility of damage, and lengthens its useful life.

    Micro-Stamping Method for Photoelectric Process
    7.
    发明申请
    Micro-Stamping Method for Photoelectric Process 审中-公开
    光电工艺微冲压方法

    公开(公告)号:US20090038492A1

    公开(公告)日:2009-02-12

    申请号:US12189608

    申请日:2008-08-11

    IPC分类号: B41K1/42

    摘要: This invention discloses a micro-stamping method for photoelectric process. First of all, in this invention, the micro-stamping method provides a stamp, an ink, an inkpad and a substrate, wherein the stamp or the inkpad having specific protruding bodies and the ink is one element of the group consisting of red ink, green ink and blue ink. Further, by adherence of the ink to the stamp, the specific pattern can be transferred to the surface of the substrate. Furthermore, this micro-stamping method comprises an ink adherence process, a positioning process, a pattern transferring process and a fixation process, and the above-mentioned processes will repeat until the three inks, such as red ink, green ink and blue ink, all adhered and fixed on the predetermined places of substrate. Moreover, this invention can be applied in the fabricating of color filters of TFT-LCD, emitting layers of OLED (Organic Light Emitting Diode), emitting layers of PLED (Polymer Light Emitting Diode) or other related photoelectric processes.

    摘要翻译: 本发明公开了一种用于光电工艺的微型冲压方法。 首先,在本发明中,微冲压方法提供印模,油墨,墨垫和基材,其中具有特定突起体的印模或墨垫和墨是由红墨水, 绿色墨水和蓝色墨水。 此外,通过将油墨粘附到印模上,可以将特定图案转印到基板的表面。 此外,这种微冲压方法包括油墨附着工艺,定位工艺,图案转印工艺和定影工艺,并且上述过程将重复进行,直到三种油墨如红色油墨,绿色油墨和蓝色油墨, 全部粘附并固定在基板的预定位置上。 此外,本发明可以应用于制造TFT-LCD的滤色器,OLED(有机发光二极管)的发光层,PLED(聚合物发光二极管)发射层或其他相关的光电工艺的发光层。

    Micro grating structure
    8.
    发明授权
    Micro grating structure 有权
    微光栅结构

    公开(公告)号:US07002725B2

    公开(公告)日:2006-02-21

    申请号:US10810022

    申请日:2004-03-25

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0808

    摘要: The micro grating structure is provided. The micro grating structure includes a substrate; a first supporting structure and a second supporting structure; a first structure post and a second structure post, wherein the first structure post and the second structure post are mounted on the substrate between the first supporting structure and the second supporting structure; and a grating mounted between the first structure post and the second structure post and comprising a first, a second, a third and a fourth torsion beams, wherein the first and the second torsion beams are connected to the first and the second supporting structures respectively, the third and the fourth torsion beams are connected to the first and the second structure posts respectively, and the first, the second, the third and the fourth torsion beams are twisted by an electrostatic force so as to enable the grating to be inclined at an angle with respect to the substrate.

    摘要翻译: 提供微光栅结构。 微光栅结构包括基片; 第一支撑结构和第二支撑结构; 第一结构柱和第二结构柱,其中所述第一结构柱和所述第二结构柱安装在所述第一支撑结构和所述第二支撑结构之间的所述基板上; 以及安装在所述第一结构柱和所述第二结构柱之间并且包括第一,第二,第三和第四扭转梁的光栅,其中所述第一和第二扭转梁分别连接到所述第一和第二支撑结构, 第三和第四扭转梁分别连接到第一和第二结构柱,并且第一,第二,第三和第四扭转梁被静电力扭转,以使光栅能够以 相对于基板的角度。

    External cavity tunable laser system formed MEMS corner mirror
    9.
    发明申请
    External cavity tunable laser system formed MEMS corner mirror 失效
    外腔可调谐激光系统形成MEMS角镜

    公开(公告)号:US20050123017A1

    公开(公告)日:2005-06-09

    申请号:US10977044

    申请日:2004-10-29

    IPC分类号: H01S3/00 H01S3/081 H01S5/14

    摘要: A tunable laser system is provided. The tunable laser system includes a light source, a grating, a corner mirror array, and a receiver. In which, the light source emits a beam, and the grating is located in front of the light source for reflecting the beam to form a first reflective beam. Also, the corner mirror array is located in front of the grating for receiving the first reflective beam and forms a second reflective beam accordingly. In addition, the receiver is used to receive a third reflective beam formed from reflecting the second reflective beam through the grating.

    摘要翻译: 提供可调激光系统。 可调谐激光系统包括光源,光栅,角镜阵列和接收器。 其中,光源发射光束,并且光栅位于光源的前面,用于反射光束以形成第一反射光束。 此外,角镜阵列位于光栅的前面,用于接收第一反射光束并相应地形成第二反射光束。 此外,接收器用于接收通过将第二反射光束反射通过光栅而形成的第三反射光束。

    Micro-stamping method for photoelectric process
    10.
    发明申请
    Micro-stamping method for photoelectric process 审中-公开
    光电工艺微冲压法

    公开(公告)号:US20050069644A1

    公开(公告)日:2005-03-31

    申请号:US10674153

    申请日:2003-09-29

    摘要: This invention discloses a micro-stamping method for photoelectric process. First of all, in this invention, the micro-stamping method provides a stamp, an ink, an inkpad and a substrate, wherein the stamp or the inkpad having a specific raised pattern and the ink is one element of the group consisting of red ink, green ink and blue ink. Further, by adherence of the ink to the stamp, the specific pattern can be transferred to the surface of the substrate. Furthermore, this micro-stamping method comprises an ink adherence process, a positioning process, a pattern transferring process and a fixation process, and the above-mentioned processes will repeat until the three inks, such as red ink, green ink and blue ink, all adhered and fixed on the predetermined places of substrate. Moreover, this invention can be applied in the fabricating of color filters of TFT-LCD, emitting layers of OLED (Organic Light Emitting Diode), emitting layers of PLED (Polymer Light Emitting Diode) or other related photoelectric processes.

    摘要翻译: 本发明公开了一种用于光电工艺的微型冲压方法。 首先,在本发明中,微冲压方法提供印模,油墨,墨垫和基材,其中印模或墨垫具有特定凸起图案,墨是由红墨水 ,绿色墨水和蓝色墨水。 此外,通过将油墨粘附到印模上,可以将特定图案转印到基板的表面。 此外,这种微冲压方法包括油墨附着工艺,定位工艺,图案转印工艺和定影工艺,并且上述过程将重复进行,直到三种油墨如红色油墨,绿色油墨和蓝色油墨, 全部粘附并固定在基板的预定位置上。 此外,本发明可以应用于制造TFT-LCD的滤色器,OLED(有机发光二极管)的发光层,PLED(聚合物发光二极管)发射层或其他相关的光电工艺的发光层。